CMOS MEMS accelerometer
A low-noise low-offset capacitive sensing amplifier for a 50-µg/v Hz monolithic CMOS MEMS accelerometer
FREE DOWNLOAD [PDF] J Wu, GK Fedder… – Solid-State Circuits, IEEE …, 2004
Abstract—This paper describes a CMOS capacitive sensing amplifier for a monolithic MEMS
accelerometer fabricated by post-CMOS surface micromachining. This chopper stabilized amplifier
employs capacitance matching with optimal transistor sizing to minimize sensor noise