free research papers-mems-micro electro mechanical system-12
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A Multi Axial BioImplantable MEMS Array Bone Stress Sensor
Fernando Alfaro
doctoral dissertation, tech. report CMU-RI-TR-07-31, Robotics Institute, Carnegie Mellon University, August, 2007
(33MB)
BioImplantable Bone Stress Sensor
Fernando Alfaro, Lee Weiss, Phil Campbell, M.C. Miller, C. Heyward, J.S. Doctor, and Gary Fedder
Proceedings of the 2005 research Engineering in Medicine and Biology 27th Annual Conference (EMBS ’05), September, 2005.
“Chip-Size” Antennas for Implantable Sensors and Smart Dust
P. Basset, Fernando Alfaro, D. Novosel, A. de la Plaza, D. Stancil, and Gary Fedder
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS ’05), June, 2005, pp. 457 460.
Silicon-based microdialysis chip with integrated fraction collection and biofouling control
George Lopez Subrebost
doctoral dissertation, tech. report CMU-RI-TR-05-53, Robotics Institute, Carnegie Mellon University, October, 2005
(15MB)
Conductive Polymer ‘Molecular Wires’ Increase Electrical Conductance Across Artificial Cell Membranes
Alik Sunil Widge, M. Jeffries-El, and Yoky Matsuoka
In The 26th Annual International Conference of the research Engineering in Medicine and Biology Society, September, 2004, pp. 5058 5063.
(384KB)
Conductive Polymer ‘Molecular Wires’ For Neuro-Robotic Interfaces
Alik Sunil Widge, M. Jeffries-El, Carl Lagenaur, Victor Weedn, and Yoky Matsuoka
Proceedings of the 2004 research International Conference on Robotics and Automation (ICRA ’04), May, 2004.
(536KB)
Mock CMOS: An Inexpensive, Fast, and Versatile Microfabrication Technique Using One Metal and One Silicon Dioxide Film
George Lopez Subrebost
tech. report CMU-RI-TR-02-13, Robotics Institute, Carnegie Mellon University, May, 2002
(3MB)
Actuation for Probe-Based Mass Data Storage
Fernando Alfaro and Gary Fedder
Technical Proceedings of the Fifth International Conference on Modeling and Simulation of Microsystems (MSM ’02), April, 2002, pp. 202 205.
In Situ Fabricated Microchannels Using Porous Polymer and Xenon Difluoride Etchant
George Lopez Subrebost, Alan J. Rosenbloom, Victor Weedn, and Kaigham Gabriel
Proceedings of the Sixth International Symposium on Micro Total Analysis System (mTAS 2002), Nara, Japan, Nov. 2-8, 2002., November, 2002.
A Versatile, Fast and Inexpensive Microfabrication Technique Using a One Metal and One Silicon Dioxide Film
George Lopez Subrebost and Kaigham Gabriel
Proceedings of the 2002 ASME International Mechanical Engineering Congress and Exposition (IMECE 2002), New Orleans, CA, November 17-22, 2002., November, 2002.
A Comparison of Induction-Detection NMR and Force-Detection NMR on Micro-NMR Device Design
Wen-Chieh Lin and Gary Fedder
tech. report CMU-RI-TR-01-06, Robotics Institute, Carnegie Mellon University, March, 2001
(146KB)
A CMOS-MEMS lateral-axis gyroscope
Huikai Xie and Gary Fedder
Proceedings of The 14th research International Conference on Micro Electro Mechanical Systems (MEMS ’01), January, 2001, pp. 162 165.
(470KB)
MEMS memory elements
Richard Carley, R.T. El-Sayed, David Guillou, Fernando Alfaro, Gary Fedder, S. Schlosser, D. Nagle, G. Ganger, and Jim Bain
Proceedings of the 2001 Non-Volatile Memory Technology Symposium (NVMTS ’01), November, 2001, pp. 1 5.
Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives
Huikai Xie, Lars Erdmann, Qi Jing, and Gary Fedder
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems (MSM 2000), March, 2000, pp. 181 184.
(113KB)
A CMOS z-axis capacitive accelerometer with comb-finger sensing
Huikai Xie and Gary Fedder
Proceedings of The 13th research International Conference on Micro Electro Mechanical Systems (MEMS ’00), January, 2000, pp. 496 501.
(540KB)
A 1 mG lateral CMOS-MEMS accelerometer
Hao Luo, Gary Fedder, and Richard Carley
Proceedings of The 13th research International Conference on Micro Electro Mechanical Systems (MEMS ’00), January, 2000, pp. 502 507.
(492KB)
Emerging simulation approaches for micromachined devices
Tamal Mukherjee, Gary Fedder, D. Ramaswamy, and J. White
research Transactions on Computer-Aided Design of Integrated Circuits and Systems, Vol. 19, No. 12, December, 2000, pp. 1572 1589.
(336KB)
A lateral capacitive CMOS accelerometer with structural curl compensation
G. Zhang, Huikai Xie, L.E. de Rosset, and Gary Fedder
Proceedings of The 12th research International Conference on Micro Electro Mechanical Systems (MEMS ’99), January, 1999, pp. 606 611.
(717KB)
Multi-mode Sensitive Layout Synthesis of Microresonator
Sitaraman Iyer, Tamal Mukherjee, and Gary Fedder
International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, April, 1998.
(2MB)
Mechanical Property Measurement of 0.5 m CMOS Microstructures
Michael Lu, Xu Zhu, and Gary Fedder
MRS 1998 Spring Meeting, April, 1998.
(171KB)
Hierarchical Representation and Simulation of Micromachined Inertial Sensors
J.E. Vandemeer, M.S. Kranz, and Gary Fedder
Modeling and Simulation of Micromsystems Conference, April, 1998.
(318KB)
Design Methodology for Mixed-Domain Systems-on-a-Chip
Tamal Mukherjee and Gary Fedder
research Computer Society Workshop on VLSI, April, 1998.
(93KB)
Structured Design Of Microelectromechanical Systems
Tamal Mukherjee and Gary Fedder
Proceedings of 34th Design Automation Conference, June, 1997, pp. 680-685.
(135KB)
Automated Optimal Synthesis of Microresonators
Gary Fedder, Sitaraman Iyer, and Tamal Mukherjee
9th Int’l Conf. on Solid State Sensors and Actuators (Transducers ’97), June, 1997, pp. 1109-1112.
(617KB)
Distributed MEMS: New Challenges for Computation
A. Berlin and Kaigham Gabriel
research Computational Science and Engineering Journal, Vol. 4, No. 1, March, 1997, pp. 12-16.
(133KB)
Nodal Simulation of Suspended MEMS With Multiple Degrees of Freedom
Jan E. Vandemeer, Michael S. Kranz, and Gary Fedder
ASME Winter Annual Conference, November, 1997.
(92KB)
Integrated MEMS in Conventional CMOS
Gary Fedder
Proc. of the NSF/ASME Workshop on Tribology Issues and Opportunities in MEMS, November, 1997.
(250KB)
Physical Design for Surface-Micromachined MEMS
Gary Fedder and Tamal Mukherjee
Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, April, 1996, pp. 53-60.
(120KB)
A Vision of Structured CAD for MEMS
Gary Fedder
Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, April, 1996, pp. 76-80.
(53KB)
Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process
Gary Fedder, Suresh Santhanam, M. L. Reed, Steve Eagle, D. F. Guillou, Michael Lu, and L. R. Carley
Proceedings of the research Micro Electro Mechanical Systems Workshop, February, 1996, pp. 13-18.
(1MB)
Modeling and Simulation of Microresonators with Meander Suspensions
Gary Fedder and K. H. Clark
Simulation and Design of Microsystems and Microstructures, September, 1995, pp. 175-183.
(175KB)
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