ENGINEERING RESEARCH PAPERS

mems IEEE PAPER 2017




APPLICATION OF A NOVEL FORMALDEHYDE SENSOR WITH MEMS (MICRO ELECTRO MECHANICAL SYSTEMS) IN INDOOR AIR QUALITY TEST AND
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Abstract. In the indoor air environment in Taiwan, formaldehyde concentration stays at a high level, which is an important issue affecting indoor air quality, and the formaldehyde issue in medical building spaces is more severe. The novel formaldehyde sensor based on

Simulations of sliding adhesive contact between microgear teeth in silicon-based MEMS work in a vacuum environment
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ABSTRACT Sliding friction and adhesive contact interactions between microgear silicon based MEMS teeth working in a clean and vacuum environment have been modelled using a multiscale hierarchical elastic structure. Here the results of numerical simulations based This book is meant to introduce piezoelectric microelectromechanical system ( MEMS ) resonators to a broad audience of engineers, graduate students, and researchers with the scope of offering a review of the field as well as generating excitement for future research

A novel MEMS -based sensor for simultaneous pH and dissolved oxygen profiling in biofilms
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Microsensors have become a powerful tool in the development of biofiltration techniques for gaseous pollutants abatement, from the information obtained in situ within biofilms. Concentration profiles recorded using microsensors allow the determination of mass

Simulation of MEMS Based Drug Delivery System
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Abstract MTransdermal drug delivery is having lot of attention in medical field. A gaining need of controlled drug delivery enabled MEMS drug delivery systems to penetrate this field. In this, paper we designed a micro-pump with piezo electric actuation scheme. The

Heat Distribution of Current Output Type Artificial Neural Networks IC for the MEMS Microrobot
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Abstract Heat distribution of the artificial neural networks IC developed for controlling microrobots is described in this paper. We measured the temperature distribution of the designed IC using thermography. As a result, it is found that the major heat source is the

Hexapod type MEMS microrobot equipped with an artificial neural networks IC
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Abstract This paper proposes a hexapod type microrobot controlled by an artificial neural networks IC. The structural component of the microrobot is produced by micro electro mechanical systems ( MEMS ) process. The rotary actuator inside the robot is composed of

Sensitivity of the MEMS based Piezoresistive Wind Speed Sensor with Comparative Study of Different Shapes of Paddles
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Abstract- MEMS (Micro-Electro-mechanical System) technology is one of the prominent technologies which has many advantages such as high accuracy, low cost and small size. Conventional rectangular beam cantilever are based on detection of the surface stress of the

Finite Element Analysis of MEMS based Piezoresistive Diamond Thin Film Cantilever Pressure Sensor
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Abstract- MEMS (Micro-Electro-Mechanical Systems) technology is an emerging technology, now-a-days, which consists of both electrical and mechanical components integrated on the same chip. The main objective of this paper is to design and simulate the cantilever based

Acceleration Components Measurements in Vertical Traversing Elevators using MEMs and Wireless Signals
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Abstract Twelve lifts in a University and adjoint campus buildings, all traversing vertically 6-7 floors are taken up for study here. From the start to stop continuous movement is observed and their accelerations in mutually perpendicular directions are measured. They are sensed Abstract Inertial navigation system (INS) has an increasingly important role in indoor navigation, which mainly uses inertial measurement units based on Micro Electro Mechanical System ( MEMS ) to acquire data, and which is independent of the external

Quality Factor analysis for Nitinol based RF MEMS Resonator
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Abstract A paper is proposed for the study of quality factor for various materials of the cantilever beam to be used as a Micro Electro Mechanical Systems ( MEMS ) resonator. In order to develop such resonators the simulation of Thermoelastic Damping (TED) becomes This book contains 17 chapters, which is written by selected experts who have present high quality papers on topics closely relevant to the theme of nano devices, sensors, and MEMS . We can understand current status, challenges, and future directions on design, fabrication,

Frequency Reconfiguration of Microstrip Patch Antenna with Serpentine Spring Shaped RF MEMS Switch
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Abstract. In this paper, a reconfigurable microstrip patch antenna with RF MEMS switch providing frequency reconfiguration is presented. This paper gives a brief account on the methodology of designing an antenna changing its frequency using RF MEMS switches. By

A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring)
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Cantilever beam MEMS piezoelectric accelerometers are the simplest and most widely used accelerometer structure. This paper discusses the design of a piezoelectric accelerometer exclusively for SHM applications. While such accelerometers need to operate at a lower

Development of RF MEMS cantilever beam to maximize capacitance in an activated state
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Abstract This paper presents a simple design of planar cantilevers to be used in RF MEMS switches with reduced dielectric charging. It has been achieved by locating a DC biasing pad aside of RF line and dielectric insulator, while usually insulator is placed between

Design of Anti-Sticking Membrane for RF MEMS Tunable Capacitor
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Abstract The paper describes a radio frequency microelectromechanical (RF MEMS ) tunable capacitor with electrostatic actuation and an anti-sticking membrane. The varactor capacitance changes from 0.3 pF to 3.5 pF with| S (1, 1)|>-0.25 db at 10 GHz. Actuation

Capacitive-Gap MEMS Resonator-Based Oscillator Systems for Low-Power Signal Processing
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The increasing role of wireless technology in our daily lives is accompanied by a need for reduced radio power consumption. This will be especially important as wireless devices become ubiquitous, going beyond the smartphones of today to perhaps networks of more

ANN Approach for Modeling of Mechanical Characteristics of RF MEMS Capacitive Switches-An Overview.
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Abstract RF MEMS switches are nowadays based on a mature technology and are becoming a common component in the development of compact and tunable communication or measurement systems. The prediction of the switch performance is

MEMS micromirror based light sheet generator for biomedical imaging
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Fig. 2: Tilt angle vs voltage for static mirror (top) and tilt angle vs frequency at 150Vpp for resonant scanning mirror (bottom). Fig.1: Schematic of (a) the resonant scanning mirror and (b) the static positioning mirror. Ralf Bauer and Deepak Uttamchandani Centre for Microsystems

Recent Application and Future Development Scope in MEMS
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Abstract-This paper deals with recent developments and future of micro-electromechanical systems, or MEMS . Micro-Electro-Mechanical Systems ( MEMS ) are extensively used in the field of scientific and engineering. MEMS encompass the process-based technologies used

Vehicle Accident Spotting and Monitoring by Utilizing MEMS Accelerometer and GPS Tracing
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Abstract: The fast development from claiming engineering has made our lives easier. The coming innovations also expanded those traffic dangers and the street mishaps occur habitually which makes enormous reduction from huge lives due to poor emergency

An Approach to monitor PCB vibrations using MEMS accelerometers
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Abstract-Vibration analysis is one of the principals used to monitor a particular system. It is the great need in present scenario and can be widely used in many practical applications. The paper focuses on designing a circuit board to measure PCB vibrations using grid of

RF- MEMS -Based DPDT Switch on Silicon Substrate for Ku-Band Space-Borne Applications
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A RF- MEMS (radio-frequency microelectromechanical-system) based DPDT (double pole double throw) switch for the Ku band has been designed and analyzed for this article. The switch topology is based on the FG-CPW (finite ground-coplanar waveguide) configuration

Assessment of usefulness of the mems -based integrated navigation unit in car navigation
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Abstract Due to the development of MEMS , there is an opportunity to build a low-cost integrated navigation systems, operating independently of horizon visibility. This paper presents the proposal of an integrated GPS/IMU platform using MEMS technology. In order

Closed-Loop Control of Gimbal-less MEMS Mirrors for Increased Bandwidth in LiDAR Applications
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ABSTRACT In 2016, we presented a low SWaP wirelessly controlled MEMS mirror-based LiDAR prototype which utilized an OEM laser rangefinder for distance measurement [1]. The MEMS mirror was run in open loop based on its exceptionally fast design and high Microelectronics Packaging II, DOI 10.1007/978-3-319-51697-4_7 The original version of this book was inadvertently published with an incorrect author name in chapter 7. The correct

A Novel Reconfigurable MMIC Antenna with RF- MEMS Resonator for Radar Application at K and Ka Bands
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Abstract This paper presents a new reconfigurable antenna based on coplanar waveguide (CPW). The design for reconfigurable antenna is based on monolithic microwave integrate circuit (MMIC). This scheme combines a CPW antenna and switchable resonator radio

Novel Conception of a Tunable RF MEMS Resonator
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Abstract This paper presents a new monolithic microwave integrated circuit (MMIC) based on coplanar waveguide (CPW) design for a tunable resonator based on RF MEMS . This RF structure, which can be used for system on chip (SOC), is constituted with MEMS Bridge Abstract The design and performance of piezoresistive MEMS -based MWCNT/epoxy composite strain sensor using COMSOL Multiphysics Toolbox has been investigated. The proposed sensor design comprises su-8 based U-shaped cantilever beam with

RESEARCH ON THE APPLICATION OF STABLE ATTITUDE ALGORITHM BASED ON DATA FUSION OF MULTI-DIMENSIONAL MEMS INERTIAL SENSORS
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In order to obtain the stable and accurate carrier attitude angle information in both static and dynamic conditions, we need to fuse the multi-dimensional MEMS inertial sensor data, to solve the problems of various errors of a singledimensional sensor. In this paper, we design

MEMS Accelerometer Specifications and Their Impact in Inertial Applications
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Accelerometers are inertial sensors used to measure forces, and subsequently acceleration, across three orthogonal axes; the measurements are output as a digital or analog signal and further utilized in other applications. Another type of inertial sensor is a gyroscope, which

Research Article Adaptive Sliding Mode Control of MEMS AC Voltage Reference Source
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The accuracy of physical parameters of a tunable MEMS capacitor, as the major part of MEMS AC voltage reference, is of great importance to achieve an accurate output voltage alleviated of the malfunctioning noise and disturbance. Even though strenuous endeavours

Micro-Electro-Mechanical Systems ( MEMS ) technology
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Page 1. 1 Micro-Electro-Mechanical Systems ( MEMS ) Technology by Professor Chris R. Chatwin
University of Sussex http://www.sussex.ac.uk/profiles/9815 Page 2. 2 Summary Spider Mite shows
scale Page 6. 6 MEMS ? The complexity of devices that may be created using polysilicon surface

THE MEASUREMENT OF DISPLACEMENT WITH THE USE OF MEMS SENSORS: ACCELEROMETER, GYROSCOPE AND MAGNETOMETER.
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Abstract: The paper presents the method of determining the global orientation of links of the measuring arm by gauging the angles of the links relative to the vector of the gravitational and magnetic field using inertial sensors. A method of using Kalman filter to average the

Implementation of ATM security system using GSM and MEMS
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ABSTRACT In this paper is designed for providing security using MEMS Accelerometer. The output of MEMS device is given to ADC circuit to convert the analog values to digital which is inbuilt for LPC2148 microcontroller. Whenever the accelerometer is disturbed it gives signal

Development of Diagnostic Device for COPD: A MEMS Based Approach
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Summary Chronic obstructive pulmonary disease (COPD) is one of most common diseases related to breathing. In this study, a new diagnostic method is developed to detect the COPD parameters by using a microelectromechanical system ( MEMS ) based acceleration sensor.

Digital rate MEMS vibratory gyroscope modeling, tuning and simulation results
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Abstract. This paper is dealing with modeling, tuning and simulation of standing wave control and information processing algorithm for rate MEMS ring-type vibratory gyroscope. Standing wave control algorithm is presented in the form allowing transition from rate to rate

DOUBLE BOSS SCULPTURED DIAPHRAGM EMPLOYED PIEZORESISTIVE MEMS PRESSURE SENSOR WITH SILICON-ON-INSULATOR (SOI)
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Abstract This paper presents the detailed study on the measurement of low pressure sensor using double boss sculptured diaphragm of piezoresistive type with MEMS technology in flash flood level measurement. The MEMS based very thin diaphragms to sense the low

A Fixed Central Bridge RF MEMS Switch for Multiband Applications
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Abstract Micro Electro Mechanical Systems have been introduced during past three decades. Based on MEMS technology, vast variety of nonelectrical elements like mechanical, chemical, magnetic and optical parts can be miniaturized to micrometer scales

Design and implementation of a MEMS piezoelectric sensor array for patient specific instrumentation used for total ankle replacement
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For several decades, research has been conducted for Total Ankle Replacement (TAR) to be established as the optimal surgical treatment for diseased or degenerative ankle joints. Few reports exist regarding patient specific instrumentation for TAR and to the author

Radiomeasuring pressure transducer with sensitive MEMS capacitor
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Abstract. In the article the pressure transducer with frequency output based on the structure of the bipolar-field transistors with negative resistance and tenso sensitive MEMS capacitor has been considered. A mathematical model of the radiomeasuring pressure transducer in

Coriolis MEMS -sensing technology
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16| May 2017 Flow Control high-precision, high reproducibility of miniature three dimensional microstructures. BMC sensors utilize single-crystalline silicon as the sensing material. Silicon is among the best materials in the world for highly reliable, long-term

Spartan-6 FPGA Based MEMS Accelerometer Processing Electronics for Navigation
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Abstract: Micro-Electro-Mechanical System ( MEMS ) technology holds great promise for navigation systems because of the reduced size and cost of MEMS inertial sensors relative to conventional devices In this project, Accelerometer sensors data has to be acquired from

Wire Less Wheel Chair Direction Control with Gesture Recognition ( MEMS Accelerometer)
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Abstract: The main aim of this project is to control the wheel chair using MEMS . The MEMS will be fixed to the hand. Whenever the hand moves in a particular direction, the mechanical movement of the hand will be recognized by MEMS . MEMS converts this mechanical hand

SU-8 Polymer Based Bio- MEMS Micromachining: A Review
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ABSTRACT Technological devices fabricated from polymer based materials are gaining special attention for prospective biomedical applications. Specifically, the micro-machining

Analysis of microelectronic performances of Zinc Phthalocyanine (ZnPc) organic heterojunction diode for MEMS applications
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The I- V characteristics of ZnPc device is investigated. Besides, the behavior of device is emphasized in order to use it in MEMS applications. Experimental Measurement Analysis of microelectronic performances of Zinc Phthalocyanine

Development of a Tabletop Fabrication Platform for MEMS Research, Development, and Production
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A general rule of thumb for new semiconductor fabrication facilities (Fabs) is that revenues from the first year of production must match the capital cost of building the fab itself. With modern fabs routinely exceeding $1 billion to build, this rule serves as a significant barrier to

Current Trends in MEMS Drug Delivery Techniques
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Abstract The popularisation of the microsystems has paved a way for the evolution of a new class of controlled drug delivery devices which allow tailored delivery of drugs. Additionally, these drug delivery systems enhance efficiency and patient consent.

Review of MEMS technology its applications in various fields
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Abstract- MEMS are small integrated devices which combine electronics, electrical as well as mechanical element to meet the control related functional requirements such as sensing and actuation. Basically MEMS technology believes in Good things comes in small packet. To

MEMS ACCELEROMETER BASED DIGITAL PEN FOR DIGITS RECOGNITION WITH TRAJECTORY RECOGNITION ALGORITHM
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Abstract This paper proposed an MEMS accelerometer based digital pen for gesture recognition of handwritten digits. Here by changing the position of MEMS (micro electro mechanical systems) we can able to show the digits drawn by user on the PC and so it can

An alternative pathway to MEMS development in Brazil: conventional, modified and novel devices
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1. Abstract This work proposes an alternative strategy to tackle MEMS development in Brazil, initially aiming at speeding the time-to-prototype process while building up the know-how to design and characterize MEMS components, both traditional and novel. To foster the take-off

MEMS based Force Sensor for structural mechanics Interpretation in Micro devices
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A novel MEMS based piezoelectric force sensor system is proposed in this article to detect the mechanical impact generated out of the particular system. The force sensor systems are implanted to have a continuous monitoring of the device and to analyses the basic

A Novel Coupled Algorithm for Shell Structure-Electric field Interaction Analysis in MEMS Piezoelectric Actuator
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Abstract. In this study, we developed a finite element coupled algorithm for shell structure electric field interaction analysis of piezoelectric based actuators. The finite element coupled algorithm is based on Block Gauss-Seidel partitioned iterative coupling scheme with full

Parametric Excitation and Detection of An Electrostatic MEMS Actuator
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Summary. We describe a method to measure electrically out-of-plane motions of an electrostatic MEMS transducer excited parametrically via an in-plane (horizontal) electrostatic transducer. The method exploits homodyne detection of the current induced by

MEMS based Hand Gesture Wheel Chair Movement Control with Emergency Alert
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ABSTRACT The objective of this project is to develop a control on wheel chair which helps to the physically disabled persons using their hand movement or their hand gesture recognition through MEMS technology. In this article a fully committed wheel chair to the

Rf Based Mems Collision Avoidance System Using Controller Area Network
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ABSTRACT In modern world leads to growth of different technologies for the purpose of avoiding collision between the vehicles in highway. Driver and passenger safety is one of the prime concerns in modern day vehicle. The work proposes an intelligent embedded

Embedded MEMS accelerometers for the in-situ measurement of blocked forces in coupled structures
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Transfer Path Analysis (TPA) is a widely used tool in automotive industry to develop products of high noise, vibration and harshness (NVH) quality and to efficiently trouble shoot potential NVH issues in the vehicle or on component level. A TPA, such as classical [1] or in-

Design and Modelling of MEMS based Piezoelectric and Electrostatic Energy Harvester
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In this work, Design, simulation and modelling of a Micro Electro Mechanical System ( MEMS ) based uni-morph piezoelectric energy harvester and electrostatic energy harvester is done. Piezoelectric harvester consists of an active piezoelectric layer, stainless steel Abstract The accurate measurement of glucose level in the blood is an important task to prevent the progression of the chronic disease like diabetes mellitus. This letter proposes a simulation based approach to evaluate the ZnO based ultrasonic piezoelectric Micro-

COULD AN ARRAY OF MEMS MICROPHONES BE USED TO MONITOR MACHINERY CONDITION OR DIAGNOSE FAILURES?
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During the last decades, vibration analysis has been used to evaluate condition monitoring and fault diagnosis of complex mechanical systems. The problem associated with these analysis methods is that the employed sensors must be in contact with the vibrant surfaces.

Application of fast analytical design on MEMS pressure sensors
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Abstract This study provides a fast analytical design for Micro Electro-mechanical system ( MEMS ) pressure sensors. By utilizing the Kirchhoff-Love law and perfect gas theory to design an analytical model of pressure sensors, it shows that square pressure sensors Design of Indoor Pedestrian Navigation System based on MEMS
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Abstract This paper presents an indoor pedestrian navigation system based on MEMS inertial sensor. The system is implemented by PDR, The course estimation is based on the data fusion between gyro and electronic compass; Step size estimation is based on particle

Photonic Biosensors Enabled by MEMS and Microfluidics Integration
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Frank NIKLAUS1, Göran STEMME1, and Tommy HARALDSSON1 1Micro and Nanosystems, KTH Royal Institute of Technology, Osquldas väg 10, SE-10044 Stockholm, Sweden* gylfason@ kth. se Photonic biosensors have in recent years progressed rapidly

ANALYSIS OF COMPLEMENTARY BEAM STRUCTURED RF MEMS SWITCH FOR WIRELESS APPLICATIONS
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Abstract This paper analysis the performance of a RF MEMS switch having a complementary beam structure operating at frequency ranging from 0 to 12GHz, which facilitates its application in the field of wireless mobile communication. This design is a modified

Design and Simulation of MEMS Capacitive Pressure Sensor Array for Wide Range Pressure Measurement
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ABSTRACT The major breakthrough for future in MEMS is to integrate micro sensors, micro actuators and micro electronics and other technologies on a single chip. MEMS pressure sensor are the very first MEMS components that have emerged in the micro system world.

Design of Pinched Flow Fractionation Based MEMS Device for Size and Density Based Cell Separation
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The cell separation application is garnering more attention in the areas of clinical diagnosis and medical environment. In this paper, the pinched flow fractionation technique (PFF) based microchannel is designed to separate the biomolecules (RBCs, WBCs and platelets)

CONTAMINATIONS IN MEMS PROCESSES AND REMOVAL METHODOLOGY
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Abstract Wafer impurities and process particulates are one of the prime reason of MEMS device failure. Various cleaning methodologies are evolved but cleaning remains a critical process in MEMS domain as varied materials along with micromachining operations are

2 Design, Fabrication and Analysis of Threshold-Value 3 Judging Mechanism in MEMS Safety and Arming 4 Device
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Abstract: In order to meet the military requirements of the fuze, such as precision strike, efficient 14 mutilates ability and low collateral damages, the microminiaturization is an inevitable trend of 15 secure system. Based on the silicon-based MEMS S A device

NOVEL MICRO, WIRELESS, MEMS -BASED CONDITION MONITORING SYSTEM FOR MODERN MACHINE TOOLS WITH LIMITED ACCESS
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Abstract: Currently available condition monitoring systems (CMS) offer many types of tools, including stationary systems, portable on-site instrumentation and finally wireless, autonomous systems. However, for a particular group of modern machine tools with limited

Demonstration of Electrostatic MEMS Bifurcation Sensors
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Summary. A novel electrostatic MEMS sensor employing a dynamic bifurcation detection technique is demonstrated. The sensor detects ethanol vapor in binary mode, reporting ON state (1) for concentrations above a preset threshold and OFF-state (0) for concentrations

Fabrication and Characterization of Crab-type Capacitive MEMS Accelerometer for Defense Applications
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System ( MEMS ) based accelerometers are being widely used in defense sectors for navigational control of missiles and fighter aircrafts due to their improved reliability, accuracy and excellent performance over its conventional counterpart. This paper presents fabrication

Design and Implementation of a Network Enabled High-Throughput MEMs -based Seismic Sensor
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Abstract-The rapid technological evolution in sensors, sensor platforms and networking is enabling the deployment of large sensor networks for live monitoring of seismic activity with high spatial resolution. In this regard, this paper presents our work in designing and

Wireless Earthquake Alarm Design based on MEMS Accelerometer
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Abstract: This paper mainly used to monitoring the Wireless Earthquake alarm design using MEMS accelerometer. Earthquake is a vibration transmitted in the earth crust. Most of the naturally occurring earthquake are caused by Earth plate movement. In 1997, The idea gave

VLSI DESIGN FOR HUMAN HEALTH MONITERING AND MEDICAL ALERT SYSTEM BASED ON FPGA, MEMS AND SPECIAL SENSOR NETWORK
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Abstract: The main objective of this paper is used to monitor the physical health conditions of elderly people, patients. Where the system detects and informs the abnormal health condition (eg blood pressure, pulse rate and fall detection) by using the smart sensor MEMS Electrohydrodynamic High-Throughput Core-Shell Droplet Sources
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Coaxial electrospraying is a microencapsulation technology based on electrohydrodynamic jetting of two immiscible liquids that allows precise control with low size variation of the geometry of the core-shell particles it generates. Coaxial electrospraying is a very promising

Optical switching in MEMS controlled ECTL containing nonlinear optical materials
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Abstract Optical switching which used a grating structure as an external reflector in the External Cavity Tunable Laser (ECTL) is studied in this paper. ECTL consists of the laser cavity and switching cavity. The laser cavity emits the laser beam and the switching cavity

OVERVIEW OF MEMS SENSORS AND ASSOCIATED ASPECTS
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Abstract MEMS technology is pervading in all domains ranging from commercial to strategic sectors so it is imperative that application oriented development encompassing fabrication, characterization, assembly and packaging aspects to be looked into to get the reliable

Thermodynamic limits for approximate MEMS memory devices
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Abstract In this paper we present the results obtained evaluating the energy cost of operating a micro elctro-mechanical system as a memory bit. The experiment has been conducted at an effective temperature above the room temperature in order to make the

Influence of MEMS Microphones Imperfections on the Performance of First-Order Adaptive Differential Microphone Arrays
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The performance of an acoustic beamformer is dependent upon a number of factors. Major issues are the number of microphones used, the target localization error, the microphone position error in the array and the microphones amplitude and phase mismatch, denoted as

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