ENGINEERING RESEARCH PAPERS

MEMS MICRO ELECTRO MECHANICAL SYSTEMS IEEE PAPER 2018




Variable Structure Control of a Mass Spring Damper Subjected to a Unilateral Constraint: Application to RF MEMS Switches
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A feedback control strategy is presented for improving the transient response of the ubiquitous mass-spring-damper (MSD) system; the closed-loop system has a small settling time with no overshoot for a step input. This type of response is ideal for MSD systems ABSTRACT This paper reports the developments toward an integrated, tri-axial, frequency- modulated, consumergrade, and microelectromechanical system ( MEMS ) gyroscope. A custom low-power (160A), low-phase-noise integrated circuit is designed specifically for

Design, Manufacturing and Test of a High-Precision MEMS Inclination Sensor for Navigation Systems in Robot-Assisted Surgery
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ABSTRACT : Robot supported minimally invasive interventions are state of the art in operating theatres. To increase the accuracy of surgical instrument positioning, high-precision motion tracking systems are required. The miniaturization of microelectromechanical systems ABSTRACT Stiction is a failure mode of microelectromechan-ical systems ( MEMS ) involving permanent adhesion of moving surfaces. Models of stiction typically describe the adhesion as a multiple asperity adhesive contact between random rough surfaces, and they thus ABSTRACT A mechanically coupled array technique to enable a fully differential operation of single-crystal silicon thermalpiezoresistive resonators (TPRs) has been demonstrated to alleviate resistive feedthrough issues often seen in TPRs, therefore, featuring clear In recent years, different systems like the FKFS swing system were introduced in wind tunnels to generate a transient flow field. With this development, the measurement of transient pressure data also becomes increasingly important. Pressure strips, presented by

A Study on High Precision MEMSIMU/GPS/Magnetometer/Barometer Integrated Navigation System
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ABSTRACT . Considering the urgent need of low cost, high performance and high precision navigation system, a MEMSIMU/GPS/magnetometer/barometer integrated navigation system based on DSP is designed. Using the output of MEMSIMU, we can obtain the

Development and Performance Enhancement of MEMS Helix Antenna for THz Applications using 3D HFSS-based Efficient Electromagnetic Optimization
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ABSTRACT Interest of Micro-Electromechanical System ( MEMS ) antennas in Terahertz (THz) applications has rapidly expanded in recent years due to the advent of accurate Computer Aided Design (CAD). The very special needs of newly proposed MEMS antennas, especially ABSTRACT Since the discovery of the ears of Ormia ochracea, a parasitic fly, a significant work in designing a microelectromechanical ( MEMS )-based directional microphone and its potential applications in medical device, hearing aids, has been carried out. In this paper ABSTRACT Mechanical behavior of micro-and nanoscale materials has received considerable attention in recent years because of their widespread use in micro /nanotechnology applications. These materials are also intriguing from a scientific standpoint because their

State space modeling of fluid flow for thrust control in memsbased micropropulsion
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ABSTRACT : This paper presents a dynamic system approach for the modeling of fluid flow in microchannels to be used in thrust control applications. A micro-resistojet fabricated using MEMS (Microelectromechanical Systems) technology has been selected for the analysis

ADVANCED WIRELESS BOX USING MEMS FOR VEHICLE ACCIDENTAL MONITORING WITH PERFECT LOCATION
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ABSTRACT In this work wireless black box with Micro Electro Mechanical System ( MEMS ) accelerometer for accidental vehicle monitoring is developed. The system consists of Micro Electro Mechanical System ( MEMS ) accelerometer, microcontroller unit and Global System

ON LANE-EMDEN SYSTEMS WITH SINGULAR NONLINEARITIES AND APPLICATIONS TO MEMS
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(Sλ,) where λ and are positive parameters andis a smooth bounded domain of RN (N≥ 1). Here we prove the existence of a critical curve Γ which splits the positive quadrant of the (λ,)-plane into two disjoint sets O1 and O2 such that the problem (S λ,) has a smooth

Dynamics of a System of Two Coupled MEMS Oscillators
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1 Introduction This work is concerned with a type of MEMS device in which a laser is used to measure the devices deformation via an interference pattern. As a side effect, the laser heats the device and affects the interference gap, resulting in a feedback loop which causes the device

MEMS analogous micro-patterning of liquid crystalline elastomers using a fluorinated photoresist
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Liquid crystalline elastomers (LCEs) combine the properties of polymeric elastomers with the selforganization of liquid crystals. Their actuation capacities through the anisotropy-to- isotropy change of macromolecular chains make them an unique class of shape memory

Implantable Bio- MEMS for the treatment of Cancer
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ABSTRACT : Treatment of cancer has invoked technological forays that have been vying with each other and which were often supplanted by researchers with fresh and innovative approaches. Notable among these novel approaches is the Micro-Electro-Mechanical ABSTRACT The paper presents an analysis of electrostatically driven polymer-coated MEMS cantilever resonator under parametric modulation induced by vapor sorption. This is done by harmonic modulation of the analyte concentration in vapor phase. A parametric resonance is

A STUDY ON MEMS WITH THEIR APPLICATIONS IN MICROWAVE AND ACCELERATION SENSOR
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ABSTRACT All the microelectromechanical system ( MEMS ) devices can be combined with integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers having various advantages. MEMS accelerometers are very simple, but also most applicable

MEMS Microcantilevers: The Coming Generation Sensing Elements
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ABSTRACT - MEMS is the integration of active and passive elements on a single chip, which combine electronics, electrical as well as mechanical elements to use in sensing and actuation. MEMS technology used the Microcantilevers as basic sensing elements

Inkjet Printed Flexible MEMS Switches for Phased-array Antennas
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ABSTRACT --This paper presents a fully inkjet printed flexible MEMS switch for phased-array antennas. The physical structure of the printed MEMS switch consists of an anchor with a clamp-clamp beam, a sacrificial layer, and bottom transmission lines. 5-mil Kapton
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