ENGINEERING RESEARCH PAPERS

research paper-micro electro mechanical system-MEMS recent 2014




ORGANIC ELECTRONICS SYSTEMS-COMBINING ORGANIC MEMS AND ORGANIC FIELD EFFECT TRANSISTOR (OFET)
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Recent progresses in organic electronics have led to the development of low cost, flexible and efficient organic devices such as MEMS and OFET sensors. On the one side, polymer micro-cantilever MEMS have been demonstrated as promising device for physical,

On the Quenching Behaviour of a Semilinear Wave Equation Modelling MEMS Technology
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Abstract. In this work we study the semilinear wave equation of the form utt= uxx+ /(1- u) 2, with homogeneous Dirichlet boundary conditions and suitable initial conditions, which, under appropriate circumstances, serves as a model of an idealized electrostatically

Investigation of energy dissipation in low frequency vibratory MEMS demonstrating a resonator with 25 minutes time constant
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ABSTRACT We report a conventionally batch micromachined silicon tuning fork MEMS resonator, with ultra-low energy dissipation. The dissipation time constant of 25 minutes was experimentally achieved by using a test device with natural frequency of 570 Hz and

Encapsulation of implantable integrated MEMS pressure sensors using polyimide epoxy composite and atomic layer deposition
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Abstract. Implantable MEMS sensors are an enabling technology for diagnostic analysis and therapy in medicine. The encapsulation of such miniaturized implants remains a largely unsolved problem. Medically approved encapsulation materials include titanium or

Experimental Validation of Damping Model for a MEMS Bistable Electrostatic Energy Harvester
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Abstract. This paper validates lumped models of an asymmetric bistable MEMS electrostatic energy harvester against measurements. A conventional model of constant damping coefficient turns out to be ineffective in predicting or reproducing the device response. This

MEMS: Accelerometers and Distributed Sensing for Rapid Earthquake Characterization
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Introductory Paragraph: Earthquake early warning efforts aim to detect earthquakes and provide seconds of warning for surrounding populations. Here, we test the feasibility of rapidly detecting and characterizing earthquakes with the Quake-Catcher Network (QCN),

Ultra-Broadband Telecom MEMS-VCSEL for Frequency-Tunable Terahertz Generation with Photomixers
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Abstract:We report on all-fiber tunable terahertz (THz) signal generation based on a tunable Micro Electro-Mechanical System Vertical-Cavity Surface-Emitting Laser (MEMS- VCSEL) and a fixed wavelength VCSEL. The VCSELs pump a ni-pn-ip supperlattice

Regularized model of post-touchdown configurations in electrostatic MEMS: Interface Dynamics
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Abstract Interface dynamics of post contact states in regularized models of electrostatic- elastic interactions are analyzed. A canonical setting for our investigations is the field of Micro-Electromechanical Systems (MEMS) in which flexible elastic structures may come

Analysis of the Building Stability Using MEMS in Wireless Sensor Networks.
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Abstract-Analysis of the stability of the building is a needed measurement process for all buildings in the cities. Periodic monitoring of the structure for such damage is therefore a key step in rationally planning of safety and serviceability. However, in order for the installation

An Automatically Mode-Matched MEMS Gyroscope With Wide and Tunable Bandwidth
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Abstract:This paper presents the architecture and experi-mental verification of the automatic mode-matching system that uses the phase relationship between the residual quadrature and drive signals in a gyroscope to achieve and maintain matched resonance

No touchdown at zero points of the permittivity profile for the MEMS problem
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(Joint work with Jong-Shenq Guo) We study the quenching behavior for a semilinear heat equation arising in models of micro-electro mechanical systems. The problem involves a source term with a spatially dependent potential, given by the dielectric permittivity profile,

Sensitivity Study of the MEMS Microphone with a Composited Layer Diaphragm
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Abstract: Microphones which convert the acoustic wave into electrical output have exhibits many important applications in our daily life, such as mobile phones, tablet PC, labtop computers, etc. MEMS condenser microphones have attracted more research interesting

Monolithic 50x50 MEMS silicon photonic switches with microsecond response time
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Fast optical circuit switches (OCS) can deliver reconfigurable bandwidth in datacenter networks, augmenting electronic packaging switching and offering potential cost saving and performance improvement [1,2]. 3D MEMS- based OCS has been used in datacenter-

Hybrid Elements for Modelling Squeeze Film Effects Coupled with Structural Interactions in Vibratory MEMS Devices
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Abstract: We present a hybrid finite element based methodology to solve the coupled fluid structure problem of squeeze film effects in vibratory MEMS devices, such as gyroscopes, RF switches, and 2D resonators. The aforementioned devices often have a thin plate like

Structure Preserving Model Order Reduction and System Level Simulation of MEMSPiezoelectric Energy Harvester
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Abstract In this work, we present an automatized, computationally efficient and stable compact modeling technique for a large-scale multiport model of MEMS based piezoelectric energy harvester. The method includes structure preserving model order reduction based

A MEMS reconfigurable pixel microstrip patch antenna for conformal load bearing antenna structures (CLAS) concept
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Abstract:A four by four pixelated microstrip patch antenna is reconfigured in three frequencies using RF MEMS switches. The proposed antenna can be integrated within a physical structure under the CLAS concept which can replace bolt-on antennas. Structural

The Feel of MEMS Barometers
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Background Tactile sensing is widely considered an essential capability for effective grasping and manipulation [1]–[3]. Parameters, such as the location of object contacts on the robot hand and contact pressure distribution, are believed to be essential for effective

Experimental investigation on mode coupling of bulk mode silicon MEMS resonators
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ABSTRACT This paper demonstrates the effect of nonlinear elasticity on the coupling between different bulk modes of silicon MEMS resonators. From experimental data, we observe that the coupling has a strong dependence on the resonant mode order, the

Development of a MEMS-Based ER Microgripper Using Alternating-Pressure Source
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Abstract We propose and develop a multi-DOF MEMS-based ER microgripper system using an alternating-pressure source, which utilizes an ERF flow induced by synchronizing ER microvalves and the pressure source. Each ER microfinger has only one pipe for supply

MEMS Variable Stiffness Spring and Its Application in Fuze.
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Abstract: MEMS processing technology can manufacture any complex structures in a plane, using this point, a variable stiffness design idea for the planar micro-spring is proposed. That is, using one type of structure named contact pairs to achieve stiffness change during the

An Application of Homotopy Analysis Method for Estimation the Diaphragm Deflection inMEMS Capacitive Microphone
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Abstract: In this article, homotopy analysis method (HAM) is introduced to analyze the deflection of polysilicon diaphragm of Micro Electro Mechanical Systems (MEMS) capacitive microphone. The residual stresses in the material used to make the diaphragm change

Design and fabrication of InP free-standing optical waveguides for MEMS
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ABSTRACT We present the design and fabrication of an optical MEMS device on InP platform. The device is based on a suspended parallel waveguide configuration with side pillars supports. Electrodes are integrated on the device layer to provide MEMS actuation

Simultaneous Actuation and Sensing for Electrostatic Drives in MEMS using Frequency Modulated Capacitive Sensing
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Abstract: This paper presents a displacement sensing technique that can be integrated into a microfabricated microelectromechanical system (MEMS) device. This sensor determines displacement by measuring the capacitance of a MEMS electrostatic drive, as the

Accelerated testing of multi-walled CNT composite electrical contacts for MEMS switches
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Abstract The use of gold-coated multi-walled carbon nanotube (Au/MWCNT) bilayer composite surfaces has been discussed in previous work as a method for improving the reliability of switch contacts [1, 2]. A consequence of large lifetimes means that testing to

Review of MEMS sensor and Its Application in Automobile
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ABSTRACT This paper presents the Review on the different MEMS sensor. Micro machined electro-mechanical systems (MEMS), also called micro fabricated systems (MS), have evoked great interest in the scientific and engineering communities. This is primarily due

A Novel Method of MEMS System-level Modeling via Multi-Domain Virtual Prototyping in SystemC-AMS
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Abstract:Micro Electro-Mechanical Systems (MEMS) have been developed for years and find a wide range of applications. Nevertheless, there is still a lack of efficient collaboration between expert teams involved in MEMS design to enable an efficient multidisciplinary

On Deriving Surface Tension Force in MEMS
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Abstract This paper presents the comparison between the force balance method and the surface energy method in deriving surface tension forces of some microelectromechanical systems (MEMS) problems. For studying the force balance of the capillary rise in the wick

MEMS cantilever with electrostatically-controlled tip contact
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A MEMS cantilever IR detector that lifts from the surface by electrostatic force is described. The design is comprised of three parallel square conductors. The lower two are fixed and are held at opposite potential, the upper moveable cantilever is biased the same as the MEMS and Nanotechnology, Volume 8: Proceedings of the 2014 Annual Conference on Experimental and Applied Mechanics represents one of the eight volumes of technical papers presented at the 2013 SEM Annual Conference Exposition on Experimental and

DESIGN AND DEFORMATION ANALYSIS OF MEMS BASED PIEZORESISTIVE PRESSURE SENSOR.
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ABSTRACT The present work reports about the design and simulation analysis of MEMS based piezoresistive pressure sensor. The design includes diaphragm using n-silicon material and piezoresistor using p-silicon material those are integrated on to diaphragm.

An Accurate Heading Solution using MEMS-based Gyroscope and Magnetometer Integrated System (Preliminary Results)
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ABSTRACT: An accurate heading solution is required for many applications and it can be achieved by high grade (high cost) gyroscopes (gyros) which may not be suitable for such applications. Micro-Electro Mechanical Systems-based (MEMS) is an emerging

Hybrid Piezoelectric MEMS Resonators for Application in Bio-Chemical Sensing
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Abstract MEMS resonator exhibits extraordinary high sensitivity when used as bio-chemical sensor for detecting weight of specimen, adsorption of molecules or cells, etc. by resonant frequency shift, in which piezoelectric transduction is effective to reduce driving voltage as

Characterization of electrodeposited nanocrystalline Ni-Mn thin films for MEMS applications
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Electrodeposition is an easy, speedy and economical technique for preparing nano structured thin films. The electrodeposition of metals, alloys and semiconductors has found widespread use in the manufacture of micro electro mechanical system (MEMS). Nickel

MEMS actuation for a continuously tunable optical buffer
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ABSTRACT We present our work towards development of an optical buffer based on the InP platform that consists of two suspended coupled optical waveguides. A continuously tunable delay in the propagation time can be achieved by varying the spacing between the

MEMS Cantilever Resonators under Soft AC Voltage of Frequency near Natural Frequency
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ABSTRACT This paper deals with nonlinear-parametric frequency response of AC near natural frequency electrostatically actuated MEMS cantilever resonators. The model includes fringe and Casimir effects, and damping. Method of Multiple Scales (MMS) and

MEMS Floating Actuator with Low Voltage and Large Deformable Mirror for Adaptive Optics
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Micro-electro-mechanical (MEMS) actuators are required in many applications that displace out-of-plane from the substrate such as adaptive optics [1] and steering mirrors [2]. Four main transducing mechanisms, electrostatic, piezoelectric, thermal and magnetic, have

Compact Modelling and Scaling Analysis of MEMS Condenser Microphones for Sensor Optimization
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MEMS condenser microphones normally have high sensitivity and low power consumption, and it is an important and promising micro device used in many consumer electronics, such as smartphones, tablet PC, etc. To develop low-cost reliable MEMS condenser

Reliability Prediction for MEMS Accelerometer under Random Vibration Testing
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Abstract MEMS accelerometer can measure acceleration information for carrier in movement, mainly used in the inertial navigation field of aerospace and aviation accompanied with vibration interference. In order to analyze the reliability of MEMS

Optimization of MEMS Accelerometer Parameter with Combination of Artificial Bee Colony (ABC) Algorithm and Particle Swarm Optimization (PSO)
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ABSTRACT Optimizing the design of devices that belongs to l\/Iicro Electro Mechanical System (MEMS) technology is turning out to be a main area of research currently. Several algorithms are available to produce an optimized design of l\/IEl\/IS. The l\/IEl\/IS

Development of MEMS Based 3-Axis Accelerometer for Hand Movement Monitoring
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Abstract-This project develops a hand movement monitoring system, which feeds the data into the computer and gives the 3D image rotation according to the direction of the tilt and hence monitoring the movement of the hand in context to its tilt. Advancement of MEMS

The Failure of a Novel Solid MEMS Switch under High Impact
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Abstract This paper mainly studied the leads reliability of the novel solid MEMS switch under high impact and the influence of some factors such as the current and thermal on the leads by FEM simulation analysis. Through simulation analysis, the mainly weakness and the MEMS piezoelectric energy harvester is optimally designed and fabricated, and its vibration characteristics, output voltage, power, power spectral density (SD) and frequency response function under harmonic and random excitation is studied by theory analysis, simulation

An optimal calibration method for a MEMS inertial measurement unit
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Abstract An optimal calibration method for a microelectro-mechanical inertial measurement unit (MIMU) is presented in this paper. The accuracy of the MIMU is highly dependent on calibration to remove the deterministic errors of systematic errors, which also contain

Design, Analysis and Comparison of Various MEMS Switches for Reconfigurable Planar Antenna
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Abstract: This paper presents design and analysis of a novel beam for electrostatically actuated Radio Frequency Micro Electro Mechanical Systems (RF MEMS) shunt switches. In the proposed beam design, geometrical variations in terms of structure shape, material,

Circuit modelling and eigenfrequency analysis of a poly-si based RF MEMS switch designed and modelled for IEEE 802.11 ad protocol
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Abstract This paper presents the equivalent circuit modelling and eigenfrequency analysis of a wideband robust capacitive radio frequency (RF) microelectromechanical system (MEMS) switch that was designed using Poly-Si and Au layer membrane for highly reliable

MEMS IMU/ZUPT Based Cubature Kalman Filter applied to Pedestrian Navigation System
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Abstract: In most related work with Pedestrian navigation, indirect filtering approach is used based on linear error based Kalman Filter (KF). In this research, it is proposed to outperform this approach by the use of direct filtering approach. Based on only MEMS IMU, we

Analysis and Study the Stress Level of MEMS Resonator Designed using Different Types of Spring
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Abstract: Reducing stress level by material properties is a major challenge in designing micro electro-mechanical systems (MEMS) resonator using different types of spring. The function of MEMS resonator is significantly influenced by the properties of material. Here

USE OF MEMS ACCELEROMETERS/INCLINOMETERS AS A GEOTECHNICAL MONITORING METHOD FOR GROUND SUBSIDENCE
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ABSTRACT Accelerometer and inclinometer are inertial sensors capable of measuring corresponding magnitude of Earth gravitational field along the direction of each axis. By means of rotation matrices related to inertial navigation methods, the output values of a

A Dual-Axis Electrostatically Driven MEMS Microgripper
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Abstract This paper presents the design of a new monolithic twoaxis electrostatically actuated MEMS microgripper with integrated capacitive position and force sensors working at the micro-scale level. Each of the two jaws of the micro-gripper possesses two degrees-

Wireless Acoustic Signal Monitoring Using MEMS sensor and ATmega on LabVIEW Platform
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Abstract:Acoustics and vibrations caused on machine structures can result in faulty or collapse of the whole mechanical system. These acoustics produced by machinery are vital indicators of machine health. Acoustic signals analysis can be used as a tool for locating In most sources of low-temperature waste heat, the heat is dissipated to the atmosphere due to a lack of cost-effective solutions that can efficiently convert the heat into useable electrical energy. The ability to capture this thermal energy could increase the efficiency of existing This paper presents a novel robust adaptive control strategy for MEMS gyroscope, based on the coupling of the fuzzy logic control with sliding mode control (SMC) approach and adaptive laws. The drawbacks of the conventional SMC include chattering phenomenon

Research on the Temperature Compensation Algorithm of Zero Drift in MEMS Gyroscope Based on Wavelet Transform and Improved Grey Theory.
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Abstract: The MEMS gyroscope zero drifts dominantly affects measurement accuracy of gyroscope. For the nonlinear problem that MEMS gyro zero drift varying with the temperature changes, the wavelet transform was performed to filter the static experiment zero drift data,

Analytical Design of Micro Electro Mechanical Systems (MEMS) based Piezoelectric Accelerometer for High g Acceleration
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Abstract-This paper describes the analytical analysis of MEMS based accelerometer consisting of proof mass suspended by quasi beams. The mathematical equations have been used to find the geometrical specification to design an accelerometer. The purpose

Urban MEMS based seismic network for post-earthquakes rapid disaster assessment
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Abstract. In this paper, we introduce a project for the realization of the first European real- time urban seismic network based on Micro Electro-Mechanical Systems (MEMS) technology. MEMS accelerometers are a highly enabling technology, and nowadays, the In this paper, a backstepping sliding mode control incorporating the adaptive fuzzy logic controller is proposed to achieve robust tracking performance for the Micro Electro Mechanical systems (MEMS) triaxial gyroscope. An adaptive fuzzy backstepping controller An improved design of microelectromechanical system (MEMS) switch for radio frequency (RF) applications has been proposed using non-uniform serpentine flexure structure. An analytical modeling of non-uniform serpentine flexure is obtained using small

MEMS Project in Saudi Arabia: Global Solution Business Initiative
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The MODON Environment Management System (MEMS) project started with a feasibility study on eco-industrial cities as part of the Fiscal Year 2011 Project Commissioned to Research and Promote Infrastructure-related System Export (Business Feasibility Study

Experimental Quantification of the Residual Stress of Thin Membrane Materials in MEMSDevices Using Point Deflection
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Abstract In this study, a novel methodology to assess the stiffness and evaluate the residual stress of thin, flexible polymer membranes is presented. This methodology is based on original test structures where the membrane is supported by a liquid in a circular cavity

Modelling and Simulation of the Effect of Air Damping on the Frequency and Quality factor of a CMOS-MEMS Resonator
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Abstract: This paper reports analytical modeling and finite element analysis (FEA) of the effect of two types of air damping (squeeze film and slide film damping) on resonance frequency and quality factor of a multi-layer CMOS-MEMS resonator designed for

Parametric Research of MEMS Safety and Arming System
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Abstract In this paper, a planar-zigzag-type multi-slot safety and arming system has been proposed. The system comprises of the W-type micro-spring, slider and zigzag slot. Through simulating and analyzing the micro-spring by applying ANSYS, establishing the

Feasible Development of a Carbon-Based MEMS Using a MEMS Fabrication Process
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Abstract: We aimed to develop a process technology for constructing a carbon-based micro- electromechanical system that does not require a high-temperature and high-energy process. A HOPG (highly oriented pyrolytic graphite) crystal microsheet was prepared by

An Autonomous Waist-Mounted Pedestrian Dead Reckoning System by Coupling Low-CostMEMS Inertial Sensors and GPS Receiver for 3D Urban Navigation
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Abstract Global positioning system (GPS) offers a perfect solution to the 3-dimension (3D) navigation. However, the GPS-only solution can't provide continuous and accurate position information in the unfavourable environments, such as urban canyons, indoor buildings,

A Nonsingular Terminal Sliding Mode Approach Using Adaptive Disturbance Observer for Finite-Time Trajectory Tracking of MEMS Triaxial Vibratory Gyroscope
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This paper develops a nonsingular terminal sliding mode controller (NTSMC) with adaptive disturbance observer (ADOB) for finite-time trajectory tracking of a MEMS triaxial vibratory gyroscope, which has parameter variations and external high-amplitude disturbance. A

Fabrication and Properties of Patterned Nichrome Thin Film Using MEMs Technology
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Analysis of Piezoresistive based MEMS Tactile Sensor for Human Skin Heat Condition
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Abstract The major requirement of implantable biomedical equipment like pacemaker, hearing aid device must have low power consumption and reliability. In order to provide a power to this biomedical equipment'sa new approach is presented in this paper, to extract

A Pedestrian Dead Reckoning System Integrating Low-Cost MEMS Inertial Sensors and GPS Receiver
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Abstract The body-mounted inertial systems for pedestrian navigation do not require any preinstalled facilities and can run autonomously. The advantages over other technologies make it especially attractive for the applications such as first responders, military and Piezoelectric vibration energy harvester as an autonomous power source for various types of sensors, actuators and MEMS devices has been investigated over the last decade. Traditional MEMS-based PZT single beam vibration energy harvester has low voltage

Changed Piezoelectric Design Regarding High Electric Power Growing Employing MEMS
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Abstract: Depending on Conventional energy sources will no longer applies as an excellent decision. Whereas, innovating new methods of power generation has a much scope for research and development. By all these importance of power generation we propose a

Study of a MEMS Vibratory Gyroscope Using Adaptive Iterative Learning Control
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Abstract This paper proposes a framework, namely adaptive iterative learning control (AILC), which is used in the control of a microelectromechanical system (MEMS) gyroscope, to realize high-precision trajectory tracking control. According to the characteristics of the In this introductory chapter, the motivation and main topic of this work are introduced. After a general introduction to microelectromechanical systems (MEMS), the different existing approaches for the integration of the MEMS with the driving and controlling electronics are

Microwave Performance Simulation of RF-MEMS Switch
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Abstract. This paper presents the calculation model of capacitive RF-MEMS switch for the isolation and insertion loss, and then adopts CST software to simulate microwave performances. The simulation results show that return loss can reach-21.5 dB and

A High PSRR Voltage Reference for High Efficiency Power Management Circuit of MEMSEnergy Harvesters
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Abstract A high power supply rejection ratio (PSRR) bandgap voltage reference (BGR) which is used in the signal processing circuit of energy harvesters is presented in this paper. The PSRR of the BGR is improved by adding a pre-regulating circuit and a low pass filter.

A Comparative studies of MEMS Inertial Sensors on its Design and Fabrication
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A Comparative studies of MEMS Inertial Sensors on its Design and Fabrication Khairun Nisa Khamil, Siti Amaniah Mohd Chachuli, Siti Fatimah Sulaiman, Haziezol Helmi Mohd Yusof Keywords: MEMS, inertial sensor, design, fabrication, review

Design and Simulation of MEMS-based Piezoelectric Accelerometer
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Abstract MEMS Accelerometer, the new inventions which revolutionized the technical world. Now, it's time for the self assistive accelerometers. In this paper, we have designed the trampoline, annular diaphragm structured piezoelectric accelerometers using PZT-5H with

MEMS-based Low-g Inertial Switch.
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Abstract: In this paper, a novel MEMS-based switch is designed and characterized for the purpose of sensing the low g acceleration and output on-off signa1. The switch consists of an annular proof-mass suspended by helix spring that is fixed to the pedestal which In this work, we present a methodology to monitor the state of damage-or crack-containing flexible plates through low-cost, commercial off-the-shelf MEMS accelerometers. Under quasi-static, time-varying loading conditions we track the evolution of the damaged zone (

RF MEMS for Reconfigurable RF Front-End: Research in Australia
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A New Design and Optimization of Capacitive MEMS Accelerometer.
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Abstract-In this paper, design and optimization of a folded beam for a shunt capacitive MEMS accelerometer is presented together with a comparison of important parameters to five beams with different geometries in range of 20g-100g for crash detection. The

Analysis of MEMS Diaphragm of Piezoresistive Intracranial Pressure Sensor
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Abstract:In the present paper, the design and simulation of square diaphragm, MEMS piezoresistive pressure sensor for intracranial application has been presented. The pressure sensor design presented in this paper consists of a carbon nanotube (CNT) suspended on

A Framework for MEMS Based Hand Gesture Recognition System for Controlling the Mouse Cursor using Wireless Technology
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Abstract:HAND gesture recognition provides an intelligent, natural, and convenient way of human–computer interaction (HCI). Sign language recognition (SLR) and gesture-based control are two major applications for hand gesture recognition technologies. SLR aims to

Mechanical Properties and Residual Stress of Thin 3C-SiC (111) Films Determined Using MEMSStructures
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Characteristic and analysis of silicon germanium material as MEMS pressure sensor
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ABSTRACT The silicon based pressure sensor is one of the major applications of the piezoresistive sensor. This paper focuses on the structural design and optimization of the MEMS piezoresistive pressure sensor to enhance the sensitivity. A finite element method (

MEMS Microcantilevers Sensor Modes of Operation and Transduction Principles
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Abstract MEMS based microcantilever is a microfabricated mostly rectangular bar shaped structure, longer as compared to width, and has a thickness much smaller than its length or width. Microfabricated silicon cantilever sensor arrays represent a powerful platform for

HAND GESTURE RECOGNITION USING MEMS FOR SPECIALLY CHALLENGED PEOPLE
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ABSTRACT: This paper presents three different gesture recognition models which are capable of recognizing seven hand gestures, ie, up, down, left, right, tick, circle and cross, based on the input signals from MEMS 3-axes accelerometers. The accelerations of a

Static and Dynamic Performance Evaluation of a Piezoresistive Silicon MEMS Strain Sensor
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ABSTRACT Static and dynamic characterization was performed on a prototype piezoresistive silicon MEMS strain sensor. Static tests showed the MEMS sensor's gauge factor ranged from 10-13, which is higher than a foil gauge's gauge factor. Power

Review of MEMS Techniques and Applications in Aerodynamics Research
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Impact Velocity Analysis of Capacitive RF-MEMS Switch
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Impact velocity is an important performance parameter for capacitive RF-MEMS switch. This paper establishes a differential equation, in order to analyse the influencing factors of impact velocity. The simulation results show that impact velocity can reach 1.5 m/s when bias

A systematic MEMS sensor calibration framework
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J. Sens. Sens. Syst., 4, 97–102, 2015 www.j-sens-sens-syst.net/4/97/2015/ doi:10.5194/jsss-4 -97-2015 Author(s) 2015. CC Attribution 3.0 License. A. Dickow and G. Feiertag Munich University of Applied Sciences, Munich, Germany Correspondence to: A. Dickow

Calibration of MEMS capacitive accelerometers using Electrical Stimulus BIST
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The applications which use MEMS accelerometer have been on rise and many new fields which are using the MEMS devices have been on rise. The industry is trying to reduce the cost of production of these MEMS devices. These devices are manufactured using

Overcoming Some of the Challenges in 3D Micro-Assembly Techniques to Package MEMSDevices
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Abstract This article compiles the most important packaging techniques for micro electromechanical systems (MEMS). In addition, the main electrical interconnection techniques are investigated: wire-bonding, tape automated bonding (TAB), adhesive-

MEMS Micro-Era Missile-Borne
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Design and Optimization of Piezoresistive MEMS Pressure Sensors Using ABAQUS
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Abstract: In this paper, optimization of a piezoresistive Micro Electro Mechanical System (MEMS) pressure sensor has been intended. The aim of this study is to find an optimal diaphragm shape by Finite Element Method (FEM) using ABAQUS , which is the most

Process Control Challenges of Wet Etching Large MEMS Si Cavities
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Anisotropic etching of silicon refers to the directional-dependent etching, usually by alkaline etchants like aqueous KOH, TMAH and other hydroxides like NaOH. With the strong dependence of the etch rate on crystal orientation and on etchant concentration and

Spin-on-Glass (SOG) Based Insulator of Stack Coupled Microcoils for MEMS Sensors and Actuators Application
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ABSTRACT A comprehensive study on the spin-on-glass (SOG) based thin film insulating layer is presented. The SOG layer has been fabricated using simple MEMS technology which can play an important role as insulating layer of stack coupled microcoils. The

3C-SiC: New Interest for MEMS Devices
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Design of the MEMS-Based Straight-Beam Micromirror Using a Genetic Algorithm
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A system for optimizing the design of a MEMS mirror that meets a set of specified constraints has been developed to optimally serve optical fiber-based networking applications. An optimization algorithm based on genetic algorithms was implemented for the complex For carrying out a balance study, a measurement system was developed to measure the inclination of a balance training platform. The measurement of this inclination is carried out with the help of a dual–axis micro–electro–mechanical–system (MEMS) inclination sensor

Reliability Design about Release Holes in Beam of Fuze MEMS G-Switch
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Abstract: Fuze microstructures include micro acceleration switches, security mechanisms, which the key elements are the elastic elements, such as micro beams, micro springs. Micro material and structure of the elastic element will determine the mechanical properties of

A MEMS-based Fixed-Fixed Folded Spring Piezoelectric Energy Harvester
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Systems (MEMS) research. In this thesis, a fixed-fixed folded spring-based harvester is presented as an alternative mechanical element for beam-based piezoelectric harvesters to reduce its natural frequency for low frequency applications (30-300 Hz). The research

PZT THIN FILMS FOR PIEZOELECTRIC MEMS MECHANICAL ENERGY HARVESTING
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ABSTRACT This thesis describes the optimization of piezoelectric Pb (ZrxTi1-x) O3 (PZT) thin films for energy generation by mechanical energy harvesting, and self-powered micro- electro-mechanical systems (MEMS). For this purpose, optimization of the material was

An Improved Design Method of the MEMS-Based Folded-Beam Micromirror
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In this paper, the folded-beam torsion MEMS mirror that meets a set of specified constraints was developed. An optimization algorithm that we newly adopted in the RCS (restricted competition selection) GA (genetic algorithm) could overcome some difficulties in single-

EXPERIMENTAL STUDY OF A ALUMINA PACKAGED 5-BIT RF MEMS PHASE SHIFTER IN HIGH TEMPERATURE CONDITIONS
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ABSTRACT RF MEMS 5-bit Electrostatically actuated phase shifter die is packaged on Alumina substrate carrier. The RF MEMS phase shifter is subjected to high temperature environment from ambient (+ 25 C) to+ 180 C. The measured S-parameter data are

Behavioral Modeling and Simulation of an Open-loop MEMS Capacitive Accelerometer with the MATLAB/SIMULINK
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Abstract:In this paper, an open-loop MEMS capacitive accelerometer has been modeled and simulated. The capacitive transducer is the simplest configuration which can converts mechanical displacement due to inertial forces to electrical signals. The mathematical

Evaluation and analysis of methods for fixed and variable MEMS inductors design
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Abstract: This paper investigates fixed and tunable MEMS inductors. A detailed technical discussion is given on those parameters that influence the inductance, quality factor, resonance frequency, and tuning range. Based on these parameters, the available

Electrical Lumped Model for Implemented RF-MEMS Capacitive Switch on Semi-suspended Coplanar-waveguide
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Abstract:A novel electrical lumped model for an RF MEMS capacitive switch which is implemented on a semi-suspended coplanar-waveguide is proposed and studied. The quality factor is mathematically studied taking the effects of air-gaps and substrate

CORRECTION OF TEMPERATURE AND ACCELERATION EFFECTS ON MEMS GYRO OUTPUT SIGNALS
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Page 1. CORRECTION OF TEMPERATURE AND ACCELERATION EFFECTS ON MEMS GYRO OUTPUT SIGNALS Page 2. Page 3. Approval of the thesis: CORRECTION OF TEMPERATURE AND ACCELERATION EFFECTS ON MEMS GYRO OUTPUT SIGNALS

Sensors, MEMS, and Electro-Optical Systems
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The papers included in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication.

MEMS Bulk Fabrication Process
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Thermally actuated membrane or beam Optical pyrometer with thermocouples on diaphragm Micro mirror with moving surfaces Heater on diaphragm either poly or diffused resistor plus temp sensor Heater plus interdigitated chemical sensor Gas flow sensor

A 0.35 µm CMOS Pierce Oscillator for MEMS SAW Resonator
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Abstract:This paper presents the pre and post layout simulation results for a pierce oscillator integrated with MEMS SAW resonator. The oscillator is designed to be interface with 1.78 GHz MEMS SAW resonator. The pierce oscillator has achieved 18dB gain, 1.8

Hand Gesture Based Robot Control using MEMS and ARM-9
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Abstract: Gestures thought of because the most natural communicatory manner for communications between human and computers in virtual system. Hand gesture may be a methodology of non-verbal communication for personalities for its freer expressions rather

Comparative study on standard geometrical structures of cantilever-based MEMSpiezoelectric energy harvester over T-shaped cantilever beam for low
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The requirements to maximize the harvested power within the variation of cantilever dimensions, weight and cost are the main challenge to maintain the power capability at ambient vibration frequencies. Previously, the rectangular shaped cantilevers were widely

PERFORMANCE ENHANCEMENT OF A SILICON MEMS PIEZORESISTIVE SINGLE AXIS ACCELEROMETER WITH ELECTROPLATED GOLD ON A PROOF
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ABSTRACT This paper presents realization of MEMS piezoresistive single axis accelerometer with electroplated gold on the proof mass. The piezoresistive accelerometer shows very high sensitivity and good linearity. But performance behavior of the system

REAL-TIME BIO SENSING USING MICRO-CHANNEL ENCAPSULATED MEMSRESONATORS _
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Abstract This work presents a label-free bio-molecular detection technique based on realtime monitoring of the resonant frequency of micromechanical thermal-piezoresistive rotational mode disk resonators encapsulated in microfluidic channels. Mass loading via

MEMS SENSORS CONTROLLED HAPTIC FOREFINGER ROBOTIC AID
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ABSTRACT The ability to feel the world through the tools we hold is Haptic Touch. The concept of sensory elements transforming information into touch experience by interacting with things remotely is motivating and challenging. This paper deals with the design and

Design of Piezoresistive MEMS Pressure Sensor Chip for Special Environments
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Abstract: To meet the pressure sensors used in special harsh environments, the MEMS piezoresistive pressure sensor design is proposed that the technology is more mature and more extensive used. The research of Piezoresistive sensor chip is done based on the

VLSI DESIGN FOR HUMAN HEALTH MONITERING AND MEDICAL ALERT SYSTEM BASED ON FPGA, MEMS AND SPECIAL SENSOR NETWORK
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ABSTRACT: The main objective of this paper is used to monitor the physical health conditions of elderly people, patients. Where the system detects and informs the abnormal health condition (eg blood pressure, pulse rate and fall detection) by using the smart

MEMS Adaptive Optics Development at IPMS
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Page 1. Fraunhofer MEMS AO at IPMS, Page 1 ¦ Outline MEMS Adaptive Optics Development at IPMS Andreas Gehner, Fraunhofer IPMS ¦ Introduction Fraunhofer MEMS AO at IPMS, Page 5 MEMS Technology Platform at IPMS Page 6. Fraunhofer MEMS AO at IPMS, Page 6

Nanosatellite orbit control using MEMS cold gas thrusters
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Abstract. We introduce nanosatellite orbit control using a novel miniaturized cold gas propulsion module based on microelectromechanical systems (MEMS) technology. Firstly, the design and characteristics of the propulsion module suitable for CubeSat class

Design and Manufacture of Anisotropic Dry Adhesives for MEMS Compatible Pick and Place
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Abstract Directionality or anisotropy is one of the benchmark properties of gecko adhesion, allowing geckos to adhere strongly to a surface and detach easily with little effort. Geckos achieve anisotropy by means of intricate micro-nano hierarchical structures on its feet,

NEW WIRELESS IR GAS DETECTOR FOR SAFETY INTERGRITY LEVEL 2 APPLICATIONS USING MEMS TECHNOLOGY
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ABSTRACT Infrared hydrocarbon gas detectors are essential for safety at oil and gas installations, but cables for power and communication complicate installation. A detector with a low-power optical design based on a Microelectromechanical system (MEMS) gives

Failure Analysis of Set-Back Arming Process of MEMS SA Device
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Abstract: Failure is one key problem of MEMS SA (safety and arming) device for its practical application. To make research of failure of MEMS SA device in action process, a method based on FTA was employed to make analysis on arming process of the set-back

Analysis and Design of MEMS-Based Multi-Functional Aperture Antennas
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Abstract Future antennas consist of low-profile smart multi-functional radiating apertures which support multi-beams of multi-bands with multi-polarizations. They can scan the surrounding environment, choose the band of interest and generate the required beam

Numerical Simulation of a Novel Electroosmotic Micropump for Bio-MEMS Applications.
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Abstract: High lamination in microchannel is one of the main challenges in Lab-On-a-Chip's components like micro total analyzer systems and any miniaturization of fluid channels intensify the viscose effects. In chipscale, the electroosmotic flow is more efficient.

CMOS AND MEMS BASED MICROSYSTEMS FOR MANIPULATION AND DETECTION OF MAGNETIC BEADS FOR BIOMEDICAL APPLICATIONS
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ABSTRACT Magnetic micro/nano beads as labels of bio-particles have been attracting more and more interest in many environmental and health applications, such as gene and drug delivery, purification, and immunoassay. The miniature size and high sensitivity of

BORON-DOPED HYDROGENATED AMORPHOUS SEMICONDUCTOR MEMS
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A micromachining process for the fabrication of micro-electro-mechanical systems (MEMSs), using both boron-doped silicon and silicon-germanium amorphous films (a-SiB: H and a- Si0. 50Ge0. 50B: H) prepared with plasma-enhanced chemical vapor deposition (PECVD)

MEMS Accelerometer Based 3D Mouse and Handwritten Recognition System
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ABSTRACT: Due to the rapid development and research in the field of computer technology, human-computer interaction techniques have become an indispensable system in our daily life. This paper presents MEMS accelerometer based embedded system for handwritten

A REVIEW ON HIGH SENSITIVE BIOSENSOR USING MEMS
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Abstract:Biosensor using MEMS ie BIOMEMS is a device which is used for various biomedical applications. This paper presents a cantilever based biosensor which converts biological recognition analysis into measurable mechanical displacement which is highly

MEMS-VCSEL Array for Multiple Wavelengths
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Abstract-This paper describes the Vertical Cavity Surface Emitting Laser (VCSEL) wavelength engineering for use in high speed short reach systems which may include the wavelength expansion and integration and also the wavelength stabilization based on

Design and Optimization of Piezoresistive MEMS Pressure Sensors Using ABAQUS
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Research Article Design and Optimization of Piezoresistive MEMS Pressure Sensors Using ABAQUS Nader Mohammadia,*, Arash Mohammadzadeha, Farahnaz Fallah Taftib Keywords: Diaphragm shape, Holes, MEMS, Piezoresistive pressure sensor, Wheatstone Bridge.

1220. Design considerations of a MEMS cantilever beam switch for pull-in under electrostatic force generated by means of vibrations.
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Abstract. This study is about investigation of design considerations of a MEMS switch that is considered to pull in under electrostatic force generated by a piezoelectric based voltage generator inside the MEMS. Here the energy source to drive the piezoelectric device is

An Integrated Framework to Reduce Time to Market for MEMS/NEMS Developments
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ABSTRACT Innovative products based on micro and nanotechnologies (MNT) have made rapid improvements in terms of functionality, cost and performance. Several developments based on these technologies have already benefited society greatly. However, many

Charge Pumped MEMS Actuation for High Force and Large Displacement.
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Abstract: Charge-pumping represents an unusual approach to MEMS actuation with the potential benefits of large displacement coupled with high force, as well as simple out-of- plane motions, large-scale self-assembly, simple single contact and even the possibility of

Low-Cost MEMS Accelerometers for Short Duration Micro ROV Distance Measurement
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Combining MEMS-based IMU data and vision-based trajectory estimation
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F. Tsaia*, H. Changb and AYS Suc aCenter for Space and Remote Sensing Research bDepartment of Civil Engineering cResearch Center for Advanced Science and Technology National Central University, Zhong-li, Taoyuan 320 Taiwan ftsai@ csrsr. ncu. edu. tw;

DEVELOPMENT OF A HIGH YIELD FABRICATION PROCESS FOR MEMS BASED RESONANT MASS SENSORS FOR CELL DETECTION APPLICATIONS
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v ABSTRACT DEVELOPMENT OF A HIGH YIELD FABRICATION PROCESS FOR MEMS BASED RESONANT MASS SENSORS FOR CELL DETECTION APPLICATIONS vii ÖZ HÜCRE ALGILAMA UYGULAMALARI IÇIN MEMS TABANLI YÜKSEK RANDIMANLI REZONANT

Low Loss High Isolation NEMS/MEMS Switch for High Frequency RF Applications
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Abstract: MEMS switches are advantageous in terms of low power consumption, switching times, high isolation, low insertion loss and many more. This paper proposes a MEMS switch with high isolation and low insertion loss. The model used is a CPW configuration with a

A LOW VOLTAGE CAPACITIVE MEMS SWITCH–DESIGN
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Abstract: RF MEMS shunt capacitive switches are being extensively developed for its high frequency applications such as satellites communication systems, wireless communication systems, instrumentation systems, mobile phones, automotive and defence applications.

Fault Detection Considerations in Silicon Based MEMS Resonators by Observing Changes in Dynamic Behaviour
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Abstract-This study is about fault detection in silicon-based MEMS resonators. The main idea in finding out the failure is to establish a proper relationship between the mechanical structure and its electrical equivalent and prosecuting related measurements. In order to

Wireless Black Box Using MEMS Accelerometer and GPS Tracking for Accidental Monitoring of Vehicles
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Abstract--In this work, wireless black box using MEMS accelerometer and GPS tracking system is developed for accidental monitoring. The system consists of cooperative components of an accelerometer, microcontroller unit, GPS device and GSM module,

2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2014)
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IEEE Catalog Number: ISBN: CFP14DTI-POD 978-1-4799-3221-4 INVITED TALK 1: ELECTROMAGNETIC PHENOMENA: CONTROL OF MAGNETIC PROPERTIES VIA ELECTRICAL INPUT 1 $ Melanie W. COLE SESSION C1: RELIABILITY AND

Design of Piezoelectric MEMS Sensor for Energy Harvesting from Low Frequency Applications
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Abstract:This paper presents a design of a Piezo-electric sensor model which acts as an energy harvester based on vibrations. The ample vibration-based micro electromechanical systems (MEMS) piezoelectric harvester has become an important subject in most

Design and Simulation of MEMS 3D Piezoelectric Accelerometer
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Abstract-The globalization is creating the world smarter every day. As a result, the world is using sophisticated applications. MEMS Accelerometer, one of the new inventions revolutionized the technical world. Now, it's time for the self-powered accelerometers

Novel architecture of MEMS microphone that employs deflecting micro beams and piezoresistive nano gauges
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Accurate simulations of the discussed transducer couple acoustic, mechanical and electric behavior of the system. Due to micrometric dimensions of acoustic vents, thermal and viscous boundary layers have to be taken into account. Additionally the influence of

Comparative Study on System Model and Finite Element Analysis of a Monolithic 3DOF MEMSCapacitive Accelerometer
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This paper presents a comparative study on the design of a monolithic 3DOF MEMS capacitive accelerometer using both analytical and numerical techniques. Monolithic accelerometer is a single structure having three individual single axis accelerometers on a

ALLAN VARIANCE ANALYSIS ON ERROR CHARACTERS OF LOW-COST MEMSACCELEROMETER MMA8451Q
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Abstract: This paper gives an evaluation of low-cost MEMS digital accelerometer errors. Such evaluation is required to construct an appropriate model of the accelerometer. Allan Variance is a simple and efficient method for verifying and modelling the errors by

Modeling of a MEMS Floating Element Shear Stress Sensor
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ABSTRACT A MEMS floating element shear stress sensor has been developed for flow testing applications,targeted primarily at ground and flight testing of aerospace vehicles and components. Shear stress, known also as skin friction, is one of the major components of

The multi-point pressure and temperature measurement system based on MEMS sensors
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Abstract:This paper deals with design and testing process of the pressure and temperature measurement system for aerodynamic tunnel, named SIESTA (System of Intelligent Sensors for Experimental Avionic Applications), announced in [1]. The system comprises three

Design of Efficient CMOS Fingerprint Sensors Using MEMS Technology
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Abstract: This paper describes the Performance of Efficient high speed and low cost fingerprint sensor system and reports on the development of a tactile fingerprint sensor made by a CMOS compatible front side bulk micromachining technology for high

Model Predictive Control of MEMS Vibratory Gyroscope
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Abstract: This paper presents a MPC (Model Predictive Control) algorithm for MEMS vibratory gyroscopes based on force-balancing control strategy. In the proposed MPC method, using a set of orthonormal basis functions named Laguerre functions, a new

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