The design and analysis of a novel MEMS force amplifier
FREE-DOWNLOAD E KOSA, U SONMEZ, H KIZIL… – Turkish J. Eng. Env. …, 2010
Compliant micromechanisms achieve high amplification of forces that can be used as a cutting
force in micro- and nanofabrication. In the present study, we designed, simulated, and optimized
a novel, simple micro-compliant system by SOI-MUMPs technology. The position and