accurate MEMS accelerometer model

An efficient and accurate MEMS accelerometer model with sense finger dynamics for applications in mixed-technology control loops

FREE DOWNLOAD [PDF] C Zhao, L Wang… – Behavioral Modeling and …, 2007 –
1. INTRODUCTION Micro-ElectroMechanical Systems (MEMS) require an inte- gration of mechanical
and electrical elements. These two dis- parate parts of a MEMS system have traditionally been
de- signed separately using different methodologies and tools in different energy