CMOS-MEMS Piezoresistive Accelerometer


A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass

FREE DOWNLOAD [PDF]MHM Khir, P Qu… – Sensors, 2011
Article A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass 
environmentally-friendly. In this work, a low cost, high sensitivity CMOS-MEMS
piezoresistive accelerometer is designed, fabricated and tested



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