Demonstration of Integrated Micro-Electro-Mechanical Relay Circuits for VLSI Applications

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FREE-DOWNLOAD M Spencer, F Chen, C Wang… – Solid-State Circuits, …, 2011
. designed on these test chips illustrate a range of important functions necessary for the imple-
mentation of integrated VLSI systems and  . has been developed, correlated to measurements,
and then also applied to predict MEM relay performance if the technology were scaled to a 



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