Design and Fabrication of MEMS Micropumps using Double Sided Etching

FREE-DOWNLOAD PV MICROPUMP – Journal of Microelectronics and Electronic …, 2010 –
AbstractÀIn this paper, we report a simple technique for the fabrication of planar valveless
micropumps. The technique utilizes MEMS fabrication methods by using a double sided etch
technique. Instead of using several masks and process steps, an anisotropic wet etch