Fabrication and performance evaluation of a micro igniter membrane assembly for MEMS thruster array

FREE-DOWNLOAD J Lee, K Kim… – Proceedings of the 8th PowerMEMS, 2009 –
Abstract: The fabrication and performance evaluation of a MEMS thruster array assembled with
an improved micro igniter are described. We improved the stability of the igniter by using a glass
membrane with a thickness of tens of microns. The membrane was fabricated by