Impact dynamics of MEMS switches



FREE-DOWNLOAD RP LaRose… – Nonlinear Dynamics, 2010
Abstract During operation, a MEMS switch is acti- vated by an applied voltage. This causes the
switch, of- ten a doped silicon microbeam, to be attracted toward (pulled-into) a substrate. The
component–substrate contact completes a circuit and permits the flow of cur- rent






 

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