lateral CMOS-MEMS accelerometer


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A 1 mg lateral CMOS-MEMS accelerometer

FREE DOWNLOAD [PDF] H Luo, GK Fedder… – … . MEMS 2000. The Thirteenth …, 2000
This paper reports a lateral CMOS-MEMS accelerometer with a measured noise floor of lmG/
mz and a dynamic range larger than 13G. The accelerometer is fully compati- ble with conventional
CMOS processes enabling the inte- gration of most of the conditioning circuits. It is




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