Low-g MEMS accelerometer

Nonlinear regression model of a Low-g MEMS accelerometer

FREE DOWNLOAD [PDF]WT Ang, PK Khosla… – Sensors Journal, IEEE, 2007
Abstract—This paper proposes a nonlinear regression model of a microelectromechanical systems
capacitive accelerometer, targeted to be used in tilt sensing and low- motion-tracking
applications. The proposed model for the accelerometer’s deter- ministic errors includes