Mechanical modelling of capacitive RF MEMS shunt switches

free research papers, nanotechnology

FREE-DOWNLOADR Marcelli, A Lucibello, G De Angelis… – Microsystem …, 2010 –
Abstract The mechanical response of a RF MEMS shunt connected switch in coplanar waveguide
configuration has been studied by using both an uni-dimensional approach based on analytical
equations and a Finite Element Method (FEM) with commercial software simulations.



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