model of a MEMS accelerometer

Physical model of a MEMS accelerometer for low-g motion tracking applications

FREE DOWNLOAD [PDF] from psu.eduWT Ang, SY Khoo, PK Khosla… – … and Automation, 2004. …,
Abstract – This paper develops a physical model of a MEMS capacitive accelerometer in order
to use the accelerometer effectively io low-g motion tracking applications. The proposed physical
model includes common physical parameters used to rate an accelerometer: scale factor