Modeling and analysis of electrostatic MEMS filters




FREE-DOWNLOAD BK Hammad, EM Abdel-Rahman… – Nonlinear Dynamics, 2010
Abstract We present an analytical model and closed- form expressions describing the response
of a tunable MEMS filter made of two electrostatic resonators cou- pled by a weak
microbeam. The model accounts for the filter geometric and electric nonlinearities as well