Nanomembrane-enabled MEMS sensors-Case of plasmonic devices for chemical and biological sensing

FREE-DOWNLOADZ Jakšic… – Micro Electronic and Mechanical
The world is witnessing a rapidly increasing need for various types of sensing devices. The requirements
are for smaller, smarter and more versatile sensors. The microelectrome- chanical (MEMS) devices
represent a natural way to proceed along these lines and it is no wonder that the number .