Novel MEMS dipole monopole antenna for wireless systems operating at 77 GHz

FREE-DOWNLOAD EA Soliman, S Sedky, MO Sallam, S Hassan… – PIERS Online, 2010
Abstract— In this paper, we present a novel MEMS antenna designed for operation at 77
GHz. The antenna consists of two right-angle metal arms which are supported by two vertical
silicon walls. These walls are fabricated using bulk micromachining through Deep