Novel Vibrating Wire Like NEMS and MEMS Structures for Low Temperature Physics




FREE-DOWNLOAD E Collin, J Kofler, JS Heron, O Bourgeois… – Journal of Low …, 2010
. Novel “Vibrating Wire Like” NEMS and MEMS Structures for Low Temperature Physics .
Indeed, aluminum-coated “goal-post” shaped MEMS1 were tested in the range 1–30
K, and they displayed perfectly suitable characteristics