periodic perforated MEMS microstructure

analytical formula and FEM simulations for the viscous damping of a periodic perforated MEMS microstructure outside the lubrication approximation

FREE-DOWNLOADD Homentcovschi, BT Murray… – Microfluidics and Nanofluidics, 2010 –
Abstract The article presents an axi-symmetrical model for determining the total damping coefficient
of a periodic perforated microelectromechanical systems (MEMS) micro- structure for cases where
the lubrication approximation yielding the Reynolds’ equation is no longer appropriate. .