Planar MEMS supercapacitor using carbon nanotube forests




FREE-DOWNLOADYQ Jiang, Q Zhou… – … Mechanical Systems, 2009. MEMS …,
ABSTRACT Planar micro supercapacitors utilizing vertically aligned carbon nanotube (CNT)
forests with the design of interdigital electrodes have been demonstrated. Conductive substrates
using Mo/Al/Fe metal stack shows best CNT forest synthesis results with high electrical