The Sensitivity Analysis of a MEMS Microphone with Different Membrane Diameters




FREE-DOWNLOADCT Yang – Journal of Marine Science and Technology, 2010 –
In MEMS capacitive microphone design, it is very critical to get highest yielding rate and sensitivity
as the two major factors dominate structure design of microphone. The central- post MEMS microphone
is introduced in this paper to differ- entiate from traditional fixed membrane boundary