Tri-Axis Accelerometer

Implementation of a Monolithic Single Proof-Mass Tri-Axis Accelerometer Using CMOS-MEMSTechnique

FREE DOWNLOAD [PDF] CM Sun, MH Tsai, YC Liu… – Electron Devices, IEEE …, 2010
Abstract—This paper presents a novel single proof-mass tri-axis capacitive type complementary
metal oxide semiconductor- microelectromechanical system accelerometer to reduce the
foot- print of the chip. A serpentine out-of-plane (Z-axis) spring is designed to reduce