Vacuum packaged silicon MEMS gyroscope with Q-factor above 0.5 million
FREE-DOWNLOAD AA Trusov, AR Schofield… – IMAPS Device Packaging, 2010
We report a vacuum sealed silicon MEMS gyroscope with a measured Q-factor of 0.64
million. The z-axis sensor utilizes a novel mechanical design which suppresses substrate energy
dissipation and maximizes the sense-mode Q-factor. A silicon- on-insulator device was .