visual approach on MEMS process modeling using device cross-sections

FREE-DOWNLOAD T Schmidt, M Mielke, K Hahn, R Brück… – Proceedings of …, 2010 –
With MEMS entering fast moving consumer mar- kets the need for more efficient design concepts
becomes apparent. Without a common technology platform in sight, the only feasible solution
seems to be extensive modularization and re-use of existing manufacturing tech- nology