CMOS MEMS PRESENT AND FUTURE
ELECTROCERAMIC-BASED MEMS Nava Setter Fabrication-Technology and Applications Series Editor: Harry L. Tuller ELECTROCERAMIC-BASED MEMS Fabrication-Technology and Applications THE KLUWER INTERNATIONAL SERIES IN ELECTRONIC MATERIALS: SCIENCE AND
Tightly coupled MEMS INS/GPS integration with INS aided receiver tracking loops
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Abstract Global Positioning System (GPS) receiver positioning capabilities are being challenged by increasing requirements on positioning and navigation under environments with GPS attenuated signal. This dissertation focuses on the performance enhancement of
Operating system management of MEMS -based storage devices
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MEMS -based storage devices promise significant performance, reliability, and power improvements relative to disk drives. This paper compares and contrasts these two storage technologies and explores how the physical characteristics of MEMS -based storage devices
MEMS for RF/microwave wireless applications: the next wave
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Microelectromechanical systems ( MEMS ) technology is on the verge of revolutionizing RF and microwave applications. 1 The requirements of present day and future RF/microwave systems for lower weight, volume, power consumption and cost with increased functionality
Integration of DGPS with a low cost MEMS -based inertial measurement unit (IMU) for land vehicle navigation application
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This paper focuses on evaluating the feasibility of using a low cost Micro Electro Mechanical System ( MEMS ) based Inertial Measurement Unit (IMU) integrated with Differential Global Positioning System (DGPS), for land vehicle navigation. The main focus is on position
A review of silicon carbide development in MEMS applications
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Due to its desirable material properties, Silicon Carbide (SiC) has become an alternative material to replace Si for Microelectromechanical Systems ( MEMS ) applications in harsh environments. To promote SiC MEMS development towards future cost-effective products
Nodal analysis for MEMS design using SUGAR v0. 5
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This paper presents the development of a simulation program (SUGAR) for planar MEMS devices. The approach is based on nodal analysis to solve coupled nonlinear differential equations. The current version SUGAR v0. 5 can perform DC, steady state, and transient
Modelling the electrostatic actuation of MEMS : state of the art 2005
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Most of MEMS devices are actuated using electrostatic forces. Parallel or lateral plate actuators are the types commonly used. Nevertheless, electrostatic actuation has some limitations due to its non-linear nature. This work presents a methodic overview of theAnnual Subscription: Member and nonmember prices available on request. Single copies: IEEE members $10.00 (first copy only), nonmembers $20.00 per copy.(Note: Add $4.00 for postage and handling charge by any order from $1.00 to $50.00, including prepaid orders.)
Development of high-performance high-volume consumer MEMS gyroscopes
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This paper discusses the challenges and success factors for creating the worlds first integrated MEMS gyroscopes for the consumer electronics market. A disruptive MEMS processing platform called Nasiri-Fabrication is described which has enabled Motion
Introduction to Applications and Industries for Microelectromechanical Systems ( MEMS ).
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Microelectromechanical Systems ( MEMS ) have gained acceptance as viable products for many commercial and government applications. MEMS are currently being used as displays for digital projection systems, sensors for airbag deployment systems, inkjet print head For the past decade, we have witnessed tremendous advances in nano-and biorelated science, with enormous technical information and literature published worldwide. However, limited numbers of commercialized and industrialized items have appeared. Reproducibility
3D MEMS simulation modeling using modified nodal analysis
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The modeling, simulation, and experimental verification of several MEMS devices are presented. Simulated results include 3D mode analysis, residual stress effects, thermal expansion, nonlinear deflections, time-varying electrostatic forces, process sensitivities
Microscale combustion research for applications to MEMS rotary IC engine
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ABSTRACT A research program is currently underway with the purpose of developing a MEMS -sized rotary (Wankel-type) internal combustion micro-engine, which would use liquid hydrocarbon as fuel and would be capable of delivering power on the order of milli-watts
On MEMS reliability and failure mechanisms
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Microelectromechanical systems ( MEMS ) are a fast-growing field in microelectronics. MEMS are commonly used as actuators and sensors with a wide variety of applications in health care, automotives, and the military. The MEMS production cycle can be classified as three
Mathematical analysis of an electrostatically actuated MEMS device
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We perform a rigorous mathematical analysis of a simple membrane based model of an electrostatically actuated MEMS device. Using both analytical and numerical techniques, we prove the existence of a fold in the solution space of the displacement, implying the
Physical design for surface-micromachined MEMS
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We are developing physical design tools for surfacemicromachined MEMS , such as polysilicon microstructures built using MCNCs Multi-User MEMS Process service. Our initial efforts include automation of layout synthesis and behavioral simulation from a MEMS
Structured design methods for MEMS final report
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Over the last three decades, the microelectronics industry has undergone unprecedented growth and has had an enormous impact on the nation, in what is often called the VLSI revolution . Research activities in both industry and academia have led to the rapid
Future challenges for MEMS failure analysis
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MEMS processes and components are rapidly changing in device design, processing, and, most importantly, application. This paper will discuss the future challenges faced by the MEMS failure analysis as the field of MEMS (fabrication, component design, and
Tactile texture recognition with a 3-axial force MEMS integrated artificial finger.
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Recently, several three-axial MEMS -based force sensors have been developed. This kind of force micro sensor is also called tactile sensor in literature for its similarities in size and sensitivity with human mechanoreceptors. Therefore, we believe these three-axial force CSE PROJECTS