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SUBMICRON CMOS TECHNOLOGY-lecture notes


• CMOS Technology
• Fundamental IC Process Steps
• Typical Submicron CMOS Fabrication Process
• Summary

• Categories of CMOS technology:
1.) Submicron technology – Lmin  0.35 microns
2.) Deep Submicron technology (DSM) – 0.1 microns  Lmin  0.35 microns
3.) Ultra-Deep Submicron technology (UDSM) – Lmin  0.1 microns

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