CMOS MEMS accelerometer-2

A CMOS MEMS accelerometer with bulk micromachining

FREE DOWNLOAD [PDF] A Chaehoi, L Latorre… – 2004
Summary: Due to the lack of important seismic mass, CMOS-FSBM cantilevers have never been
carefully considered for intertial sensing. This paper demonstrates that such beams can be used
for acceleration measurement. A dedicated cantilever has been designed and fabricated.