MEMS 2021




Bandwidth and Power Enhancement in the MEMS Based Piezoelectric Energy Harvester using Magnetic Tip Mass
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In this paper, the performance and frequency bandwidth of the piezoelectric energy harvester (PZEH) is improved by introducing two permanent magnets, which is attached to the proof mass of a dual beam structure. Both magnets are in the vicinity of each other and

A Study on Recent Trends in IC- Mems Integration. Recent Trends in Sensor Research Technology. 2021; 8 (1): 1 5p
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MEMS devices are incorporated with IC technologies because of its miniature size, efficient functionality and broad range of applications. The technology involved is capable of integrating both electrical and mechanical systems. MEMS are nowadays used extensively

S. Saravana Kumar. Military Applications of MEMS Technology
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The paper is centered on the study of applications on MEMS based sensors in military regions. The study initially deals with a MEMS sensor which is capable of monitoring the missile altitude and its rotational roll rate along with its pitch and yaw. Missiles are being

A Study on Medical Applications of MEMS Technology (Bio- MEMS )
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This paper consists of the study based on the application of Bio- MEMS in Medical Science. In recent years MEMS have been developed for various domains to ease our day-to-day life and activities. But Bio- MEMS has been one of the best fields that MEMS technology is used

MEMS Sensors in IoT Applications
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IoT is a system which connects objects and users via internet. Things can be much more simplified using MEMS technology where they can operate with Ultra low power and can provide accurate results in a convenient method. MEMS can improve traditional

Fiber-Coupled MEMSbased NIR Spectrometers for Material Characterization in Industrial Environments
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Recently emerged near-infrared (NIR) spectrometers based on micro-electromechanical systems ( MEMS ) are a highly compact, rugged and cost-efficient alternative to infrared spectrometers conventionally used in industrial environments. The majority of the devices

MEMS Controlled Contactless Steering and Locking System For E-Vehicles
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The advancing technologies had lead to the automation of every sector, thus reducing the human intervention and providing for the improvised performance and efficiency. One such sector of immense importance is the electric vehicle that have been emerging in both

Dynamic characterization of biosensing MEMS cantilevers with different position of the driving electrode-vacuum response versus ambient conditions
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The scope of this research work is orientated to analyze the effect of the driving electrode position on the dynamic response of electrostatically actuated sensing MEMS used in bio- mass detection. The mass-absorption detection is based on the change in the resonant

Research on Novel Denoising Method of Variational Mode Decomposition in MEMS Gyroscope
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The noise signal in the gyroscope is divided into four levels: sampling frequency level, device bandwidth frequency level, resonant frequency level, and carrier frequency level. In this paper, the signal in the dual-mass MEMS gyroscope is analyzed. Based on the

RF MEMS Switches for Reconfigurable Microstrip Patch Antennas
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In this paper, we have designed a reconfigurable micro strip patch antenna by using RF MEMS . Primarily we have analyzed the performance of different shunt capacitive RF MEMS switches and eventually we have incorporated the switch on reconfigurable micro strip patch

An Analysis of Applications of Various MEMS Sensors in Aerospace Industry
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Aircrafts are considered the fastest means of transport and its variations like UAVs are a big hit in the military armory. There is a lot of designing involved in the manufacturing of such vehicles. To avoid any untoward incidents, the balance of the aircraft must be maintained

Distributed MEMS Sensors using Plasmonic Antenna Array Embedded Sagnac Interferometer
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A micro Sagnac interferometer is proposed for electron cloud distributed sensors formed by an integrated (micro-electro-mechanical systems) MEMS resonator structure. The Sagnac interferometer consists of four microring probes integrated into a Sagnac loop. Each of the

Development Of Smart Shin Guards For Soccer Performance Analysis Based On MEMS Accelerometers, Machine Learning, And GNSS
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The performance analysis of a soccer team has become an important topic for soccer coaches. Parameters like the number of shots, passes or sprints during a match provides information about the game quality. However, currently available systems are based on cost

Efficient Wideband Spectrum Sensing Using MEMS Acoustic Resonators.
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April 12 1 978-1-939133-21-2 Open access to the Proceedings of the 18th USENIX Symposium on Networked Systems Design and Implementation is sponsored by Efficient Wideband Spectrum Sensing Using MEMS Acoustic Resonators Junfeng Guan, Jitian ZhangMicro-Electro-Mechanical Systems ( MEMS ) are a latest technology in area of mechanical, electrical, electronics and chemical engineering. Micro-Electro-Mechanical Systems, or MEMS consists of mechanical, electrical systems whose order of size in microns. It is a

Novel optical MEMS FTIR, based on Bragg grating structure
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Furrier transform infrared spectroscopy (FTIR) is the key instruments in all the chemical labs for the analysis of chemical compositions in many applications such as identification of organic compounds, biochemical, food safety etc. In this paper, we introduce a new FTIR

Simulation of Gymnastics Performance Based on MEMS Sensor
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The development and progress of multi-sensor data fusion theory and method also lay the foundation for the research of human posture tracking system based on inertial sensor. This paper mainly studies the simulation of gymnastic performance based on MEMS sensors. InABSTRACT Micro Electro Mechanical System ( MEMS ) is the fuse of automatic components, electronics, actuators and sensors. The indispensable activity in RF MEMS is to utilize little automatic gadgets as well as corporal activity to achieve the capacity of a microwave control

Small Autonomous Robot Actuator (SARA): A Solar-powered Wireless MEMS Gripper
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One ideal for an autonomous microrobotic system is one composed of motors, mechanisms, sensing, computation, communication, and power, which is able to interact with its environment and the internet in an intelligent manner. Much progress has been made in the SixNy/a-Si/SixNy thin film RF- MEMS switches were fabricated by unconventional PECVD process using surface micromachining approach. The mechanical properties of tri-layer were measured by nanoindentation and wafer curvature method. Deflections of switches

Why MEMS Accelerometers Are Becoming the Designers Best Choice for CbM Applications
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The global condition-based monitoring (CbM) market has experienced significant growth over the past few years, and this looks set to continue. 1 This growth coincides with the rapid advancement of MEMS accelerometers for use in vibration sensing applications, now

MEMSActuated Compliant Mechanisms for Medical Robotics
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Fibre-optic medical robots, hereinafter fibre-bots, are microscale robotic devices manipulating the tip of a laser fibre for medical applications. Fibre-bots always require a large-power-density manipulation mechanism. They are more suitable to use local

Design and simulation of a novel dual current mirror based CMOS‐ MEMS integrated pressure sensor
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This paper presents a novel dual current mirror based CMOS circuit for design and development of highly sensitive CMOS- MEMS integrated pressure sensors. The proposed pressure sensing structure has been designed using piezoresistive effect in MOSFETs and 5An RF MEMs microelectromechanical system variable capacitor has been demonstrated with a 22: 1 tuning range, tuning from 1.5 to 33.2 pF of capacitance. This capacitor was constructed using bistable MEMs membrane capacitors with individual tuning ranges of 70In this manuscript, two Micro-Electro-Mechanical System ( MEMS ) capacitive pressure sensors with different dielectrics are designed and simulated with device simulation software. This paper describes the performance analysis of a capacitive pressure sensorTraditional screen-printing technologies have long been used for manufacturing large volume RF circuits. While being an extremely low cost manufacturing solution, there have been relatively few major advancements. For this reason, the resulting thick-film components

Design and Analysis of a Novel MEMS Piezoresistive Pressure Sensor with Annular Groove Membrane and Centre Mass for Low Pressure Measurements
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Purpose: Micro Electronic Mechanical System ( MEMS ) based pressure sensors have found their use in multiple applications lately in the field of healthcare, automotive etc. These sensors however face a tradeoff between sensitivity and linearity which limits sensor

Design and Performance Analysis of Low Pull in Voltage RF MEMS Shunt Switch for Millimeterwave Therapy, IoT and 5G Applications
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Recent Advancements in the wireless communication systems utilizes miniaturized devices based on Micro Electro Mechanical System technology for present and future 5G wireless applications. Now a days, RF devices are utilizing the frequencies upto 30 GHz and a huge This work shows experimental results obtained in testing a thin film piezo actuated silicon membrane in a controlled environment. The main aim of this work was to select humidity concentration as one of the most influencing factors on vibrating characteristic of the circular

High-Sensitivity MEMS Pressure Sensor Utilizing Bipolar Junction Transistor with Temperature Compensation M. Basov
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The paper presents MEMS pressure sensor chip utilizing novel electrical circuit with bipolar- junction transistor-based (BJT) differential amplifier with negative feedback loop (PDA-NFL). Pressure sensor chips with two circuits have been manufactured and tested: the first chip

CVD grown Graphene Microfilms as a Promising Microscaled Solid Lubricant for the Lubrication of Silicon MEMS Devices
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Abstract Friction, wear, stiction, adhesion, and absence of suitable lubrication methods are important challenges, severely restricting and limiting the expeditious development of Microelectromechanical system ( MEMS ) technology. This paper aims to explore the

Integration and Control of a MEMS Optical Phased Array Scanner
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The paper presents an integration and control of a surface micromachined optical phased array (OPA) system based on tightly spaced and narrow piston-motion micromirrors. The individually actuated micromirrors are made of polysilicon and metal thin films to realize an The living mechanism is different for all the creatures and animals. The system that helps to have the energy for the individual is mainly by the fluid running in their system. Human blood, which is a major combination of RBC, WBC, platelets and plasma plays a role as fluidZinc oxide (ZnO) is a multifunctional material and flaunts optical, piezoelectric and semiconducting properties. ZnO thin film, as a basic layer, is used in micro-electro- mechanical systems ( MEMS )-based devices for sensing and actuation purpose. ZnO-based

Big Data Tracking and Automatic Measurement Technology for Unmanned Aerial Vehicle Trajectory Based on MEMS Sensor
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Xing*, E-mail: xingjun@ dlpu. edu. cn Xinzhe Wang, E-mail: wxzagm@ dlpu. edu. cn Jie Dong, E-mail: dongjie@ qq. com Abstract: Due to the high cost and large error of traditional UAV big data tracking and automatic measurement technology, a method of big dataSeismometers are instruments used to detect and quantify motions on the ground including those generated by quakes and volcano eruptions. The data obtained by seismometers placed on the lunar surface would contain plenty of information that can provide a good

Integrated Navigation on Vehicle Based on Low Cost MEMS SINS/GNSS using LS-SVM
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The strapdown Inertial Navigation System is a stand-alone system that can effectively prevents external interference and widely be used in various fields of land, sea and air . The strapdown inertial navigation system can establish its own natural mathematics

Design and Application of MEMSBased Hall Sensor Array for Magnetic Field Mapping. Micromachines 202 1 299
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A magnetic field measurement system based on an array of Hall sensors is proposed. The sensors are fabricated using conventional microelectromechanical systems ( MEMS ) techniques and consist of a P-type silicon substrate, a silicon dioxide isolation layer, a

ON RESAMPLING NON-UNIFORM SCANNING PATTERNS MEMS SCANNERS EXAMPLE
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Constructing an image acquired by a non-uniform scanning pattern is a difficult task. The main challenges are:(1) resampling technique (2) discrepancy between demanded (dictated by control signal) and actually performed, empirical scanning path. Here, we show how to50 GHz were recently achieved in CMOS technology . To improve their sensitivity and signal-to-noise ratio, while maintaining microwave performance, several design parameters must be considered, such as the number and placement of thermocouples. This paper