Energy-based characterization of microelectromechanical systems
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Energy-based characterization of microelectromechanical systems (MEMS) and component modeling using VHDL-AMS-download
ABSTRACT This paper presents an approach to defining and char- acterizing component models
that promotes the estab- lishment of reusable intellectual property (IP) for micro- electromechanical
systems (MEMS), in particular, and composite microsystems, in general. System dynam