Fundamentals of thin film piezoelectric materials and processing design for a better energy harvesting MEMS

FREE-DOWNLOAD K Wasa, I Kanno… – Proc. PowerMEMS 2009,
Abstract: Piezoelectric materials are essential for harvesting energy from mechanical
vibrations. Thin films of piezoelectric materials including AlN and binary perovskite compounds
PZT are widely studied for a fabrication of energy harvesting MEMS. The piezoelectric