Chip scale packaging of a MEMS accelerometer
FREE DOWNLOAD [PDF] from colorado.eduLE Felton, N Hablutzel… – Electronic …, 2004
Abstract Accelerometers fabricated with Micro Electro Mechanical Systems (MEMS) technology
are widely used in automotive cra,sh detection and vehicle dynamic control systems.
Recently, there has been increased interest in the use of MBMS accelerometers in smart