MEMS MICRO ELECTRO MECHANICAL SYSTEMS IEEE PAPERS AND PROJECTS-2020



Microelectromechanical systems, also written as micro-electro-mechanical systems and the related micromechatronics and microsystems is the technology of microscopic devices, particularly those with moving parts. It merges at the nanoscale into nanoelectromechanical systems and nanotechnology.



A resonant pressure MEMS sensor based on levitation force excitation detection
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This paper proposes a MEMS resonant pressure sensor through implementing an out-of- plane repulsive (levitation) force to enhance the sensor detection threshold and consequently widen its sensing range. 2D and 3D finite-element simulations are conducted This paper presents the design and simulation of a MEMS based clamped capacitive pressure sensor for blood pressure measurement. Normally, Blood pressure for human beings varies in the range of 0.1 0.14 MPa. The operating range of this sensor design This introductory monograph presents a broad overview of methods of both analysis and synthesis of Micro Electro Mechanical Systems ( MEMS ) and devices, mainly addressed to graduate students and young researchers in the area of electrical and computer engineering

Lateral pull-in instability of electrostatic MEMS transducers employing repulsive force
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We report on the lateral pull-in in capacitive MEMS transducers that employ a repulsive electrostatic force. The moving element in this system undergoes motion in two dimensions. A two degreeof-freedom mathematical model is developed to investigate the pull-inPurpose The current trend for continuous drug product manufacturing requires new, affordable process analytical techniques (PAT) to ensure control of processing. This work evaluates whether property models based on spectral data from recent Fabry P rot

A method of Ga removal from a specimen fabricated on MEMSbased chip for in-situ transmission electron microscopy
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In-situ transmission electron microscopy (TEM) holders, which are widely used in recent years, employ a chip-type specimen stage. To prepare the specimen on the microelectromechanical system ( MEMS )-based chip, focused ion beam (FIB) and ex-situ lift In this work, the operation of an active self-recovery mechanism embedded within microelectromechanical systems ( MEMS ) switches for Radio Frequency (RF) passives (ie RF- MEMS ) is reported and discussed. The mechanism is able to counteract stiction induced

Broadband compact single-pole double-throw silicon photonic MEMS switch
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We demonstrate a photonic Single-Pole Double-Throw (SPDT) switch based on electrostatically actuated MEMS waveguides implemented in IMECs ISiPP50G silicon photonics platform with custom MEMS release post-processing. An average Extinction Ratio

Low-frequency Buckled Beam MEMS Energy Harvester
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Vibrational energy harvesting at the MEMS scale is a unique challenge for low-frequency sources which are ubiquitous but do not operate at resonant frequencies of structures on the micro scale. It is natures law that resonant frequency is inversely proportional to mass

Silicon MEMS Compatible Bipropellant Micro Rocket Engine Using Steam Injector
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Rocket engines miniaturized and fabricated using MEMS or other techniques have been an active area of research for two decades. At these scales, miniaturized steam injectors like those used in Victorian-era steam locomotives are viable as a pumping mechanism and This paper introduces an effective and efficient microstructure of a differential area changing capacitive accelerometer to ensure low cross-axis sensitivity, high linearity and low noise figure for low frequency applications like Structural Health Monitoring and seismic sensing

ANALYSIS OF MEMS AND WPAN BASED HIGH POWER FREE ARC SWITCHING
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ABSTRACT Micro Electro Mechanical System ( MEMS ) is the fuse of automatic components, electronics, actuators and sensors. The indispensable activity in RF MEMS is to utilize little automatic gadgets as well as corporal activity to achieve the capacity of a microwave control

MEMSbased thermal conductivity sensor for hydrogen gas detection in automotive applications
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Page 1. Sensors and Actuators A 305 (2020) 111670 Contents lists available at Sensors and Actuators A: Physical journal homepage: thermal conductivity sensor for hydrogen gas detection in automotive applications Dominik

A vibrating beam MEMS accelerometer for gravity and seismic measurements
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Results The devices are initially characterised on a tilt platform 1 in which the sensitive axis is oriented at specified tilt angles relative to the vertical to obtain an estimate of the scale factor and also to characterise the tilt sensitivity of the device. The tilt sensitivity arises The impact of the response speed of a microelectromechanical system ( MEMS ) bolometer on the quality of terahertz (THz) imaging with rapid scan has been investigated and compared with a pyroelectric detector (PED). The imaging system was an active imaging

MEMS Commercialization Report Card Part 10: Industry Association, Part
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Welcome back to the MEMS Commercialization Report Card series. This will be the first of two parts on the topic of industry associations in the continuing series, which provides the details of the Report Card and the rationale for its current and the previous years

Optimization of piezoelectric MEMS process on Sr and La co-doped PZT thin films
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Doped lead-zirconate-titanate (PZT) thin films are preferred for the development of micro- electro-mechanical-systems ( MEMS ) based acoustic sensors because of their inherent higher dielectric and piezoelectric coefficients. Patterning process used to develop such

MEMS Commercialization Report Card Part 9: Marketing Part 4
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Episode 5 Design for Manufacturing and Test/Part 2 Marketing is one of the 14 critical success factors in the commercialization of MEMS as well as virtually for all products. Marketing is Everything is the title of the Harvard Business Review article authored by Silicon Valley marketing In this paper a sensor based on MEMS resonators is proposed for digital microfluidics applications. The sensor system consists of a disk as active area immobilized for capturing any special particles. This disk can azimuthally vibrate by means of two in phase Simulation of MEMSbased, microelectromechanical-systems, radio frequency (RF) passive components, ie RF- MEMS is not an easy task, as it involves the coupling of different physical domains (mechanical, electrical, electromagnetic). This work discusses the RF- MEMS ie micro electro mechanical-systems ( MEMS ) for radio frequency (RF) passive components, started to make their way into mass-market applications in the telecommunication segment. One critical aspect to ensure easy employment of such devices

Investigation of on-chip integrated inductors fabricated in SOI-MUMPs for RF MEMS ICs
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This paper presents for the first time implementation of zig zag and solenoidal on-chip inductors in standard and cost effective SOI-MUMPs fabrication process. The solenoidal inductor offers high Q-factor and inductance as compared to planar zig zag inductor

MEMS Commercialization Report Card Part 12: Summary, Conclusions Wrap Up
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Welcome back again to the continuation of the MEMS Industry Commercialization Report Card Series. This will be the last in the series that started in mid-December and will be a summary of some of the key points that have been made in the previous 11 articles. It willAbstract Packaging of Radio Frequency MicroElectroMechanical-Systems (RF- MEMS ) and other passive components is a delicate issue, especially in the riverbed of upcoming application contexts like 5G and the Internet of Things, in which frequencies of operation are

MEMS Commercialization Report Card Part 2: Clusters
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This is the second in a multi-episode series addressing the MEMS Industry Commercialization Report Card. Episode 1 , which appeared in the December issue of this publication included an introduction to the Report Card, its evolution, the market The exponentially rise in technologies have broadened the horizon of human life to exploit enhanced systems and solutions to make precise, timely and optimal decision. Undeniably, majority of the scientific contributions intends to make human society and allied industrial

Optimization of piezoelectric MEMS process on Sr and La co-doped PZT thin films
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Doped lead zirconate titanate (PZT) thin films are preferred for the development of micro electro mechanical systems ( MEMS )-based acoustic sensors because of their inherent higher dielectric and piezoelectric coefficients. Patterning process is used to develop such

Modeling of nuclear radiation detection with MEMS
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In this paper we aim to analyze the possibility of detecting nuclear radiation with a microdetector MEMS based. A part of our work is related to modeling the response of some materials like silicon to the interaction with nuclear radiation in particular with alpha

Scalar Magnetometry Below 100 fT/Hz in a MEMS Cell
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Zero-field optically-pumped magnetometers are a room-temperature alternative to traditionally used superconducting sensors detecting extremely weak magnetic fields. They offer certain advantages such as small size, flexible arrangement, reduced sensitivity in

Microfabrication of MEMS Electro-Thermal Actuators for Problem-Based Learning
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Microelectromechanical systems ( MEMS ) is a multidiscipline area requiring knowledge in various STEM disciplines such as: mechanics, material science, chemistry, physics, and electronics etc.. A graduate course at the University of New Mexico focuses on learning

Mini-invasive technique of implanting the first domestic wireless epicardial pacemaker with a MEMSconverter
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This article describes a minimally invasive surgical technique for implanting the pacemaker with a microelectromechanical system ( MEMS ) converter of kinematic energy into electrical energy in patients with life-threatening rhythm disorders. This kind of technique is This paper presents the design and simulation of RF MEMS switch using uniform U-Shaped meanders. High isolation and low insertion loss are the main performance parameters enhanced by considering the inductive sections on the design and developing high This paper presents a design optimization approach for a single-drive, 3-axis Microelectromechanical Systems ( MEMS ) gyroscope. Mathematical models for springs are obtained and a simplified structure for single-drive, 3-axis MEMS gyroscope is proposed. In A thermal sensor integrated with its driving circuit by using Cu on polyimide (COP) as a substrate was developed. A heater, working as the thermal flow sensor and constant temperature circuit (CTC), working as its driving feedback circuit, were successfully Abstract Design, fabrication, and characterization of SU-8/carbon black (CB) nanocomposite based single axis acceleration sensor is presented. The entire sensor made of SU-8 photosensitive polymer is fabricated using the process spin pattern anchor release device This paper presents, the design and simulation of RF MEMS shunt capacitive switch. The electromechanical and electromagnetic analysis of the switch has been done using COMSOL (FEM) and HFSS tools. The proposed switch has the design with non-uniform This paper examines the simulation-based performances of piezoelectric MEMS vibration energy harvester made up of two Tapered-L shaped springs and one seismic mass, which is designed for supplying energy to the bearing fault observing device or else identifying the An important step in the MEMS switch fabrication is the formation of a suspended micron- sized beam. Typically, the beam is made of gold due to its high electrical conductivity and chemical inertness. However, the fabrication process is complicated by poor suitability of Au

UWB Positioning System with the Support of MEMS Sensors for Indoor and Outdoor Environment
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Positioning systems should depend on a number of sub-systems such as global positioning system (GPS), inertial navigation system (INS), lidar, radar, vision systems etc. due to the growing popularity of autonomous vehicles. High accuracy of positioning process must be Post-void alarm systems to monitor bedwetting in nocturnal enuresis (NE) have been deemed unsatisfactory. The aim of this study is to develop a safe, comfortable and non- invasive pre-void wearable alarm and associated technologies using advanced

Design, Simulation, Fabrication and Characterization of Piezoelectric MEMS Cantilever for Gas Density and Viscosity Sensors Applications
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Summary: A MEMS cantilever based resonant device for gas monitoring actuated and sensed piezoelectrically, has been designed, simulated, fabricated and tested. Aluminum Nitride (AlN) has been used as active material to implement the piezoelectric actuator and sensor. SimulationNonlinear coupling between modes through internal resonance has many applications in MEMS resonators. The primary objective of this work is to systematically study all possible internal resonance conditions between the first three modes and the feasibility of mode We present a method for tuning the resonance frequency of a comb resonator using a combination of mechanically softening and hardening springs in order to achieve a high tuning range of resonant frequency. The nonlinear behavior of the structure is due to an

PARKINSONS DISEASE DETECTION AND ANALYSIS USING PIEZO RESISTIVE TACTILE MEMS SENSOR
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In this paper, an accurate methodology is proposed to detect compliance of soft tissue using two serpentine springs as a combined structure in micro machined piezo resistive tactile sensor, small vibrations and variations with live tissue also detected. The measuring range

CHARACTERIZATION OF TITANIUM OXIDE SPUTTERED THIN FILMS FOR MEMS BASED GAS SENSING DEVICES
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For the gas sensing application, semiconducting metal oxide material such as TiO play an important and steadily increasing role in the field of electronics, especially their application as gas sensing devices. The principle of operation is based on the interaction of a gasThis paper presents the simulation and analysis of capacitive shunt SPDT RF MEMS switch for high radio frequency applications. The design is based on the shunt configuration consisting of 2 capacitive type switches. To reduce pull in voltage, the high-frequency

Design and analysis of MEMS based electrospray thruster
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This paper presents a design of MEMS based Electrospray thruster with high throughput, low volume and high output velocities. The performance of thruster can be improved by choosing best possible dimensions of cone height, half angle, propellant height and its In manufacturing process, the stability of cutting state is especially important for processing quality. Monitoring cutting force is a research hotspot for a long time. In this paper, an integrated cutting force measurement system based on piezoresistive MEMS sensor for

Design and of analysis of SPDT Ohmic RF MEMS switch
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This paper reports on the simulation and analysis of Ohmic SPDT (single pole double throw) switch for telecommunication application. A comparative study is performed by varying the gaps from 3 to 2 μm for three different types of beam materials, namely gold, aluminum, and

MEMS Actuators for Biomedical Applications: A Review
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Abstract Micro-electromechanical-system ( MEMS ) based actuators, which transduce certain domains of energy into mechanical movements in the microscopic scale, are increasingly contributing to the areas of biomedical engineering and healthcare applications. They are

PARAMETRIC ANALYSIS AND OPTIMIZATION OF AIN-BASED RF MEMS SWITCHES.
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RF MEMS switches exhibit excellent performance at high frequencies in comparison to semiconductor devices. The technology of MEMS switches using the electrostatic principle has been extensively developed. Unfortunately, practical difficulties, such as high actuationThis paper presents the design of a novel multi-ring vibratory gyroscope. The design incorporates two sets of rings, inner and outer, separated by a set of perforated inertial masses and connected to the outermost anchors by the means of springs. The structures

A MEMS based Fabry P rot accelerometer with high resolution
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Optical MEMS has become exceedingly popular because of its high performance and resistance to electromagnetic interference. A MEMS based Fabry P rot accelerometer consisting of a G-shaped mass-spring structure sensing chip, laser diode, cube beam splitter In this paper, the design of asymmetric cantilever radio frequency micro electromechanical system (RF- MEMS ) capacitive shunt switch is presented. The analysis and design have considered for single meander, uniform serpentine and non-uniform serpentine asymmetric This paper focuses on the material selection for high power based shunt capacitive RF- MEMS switches. Multi Attribute Decision Making (MADM) based material selection techniques such as TOPSIS and VIKOR have been used for this purpose. The materials are This paper presents a 4-bit micro-electromechanical system ( MEMS ) digital attenuator with improved attenuation accuracy by surface micromachining. The attenuator is consisted of monoblack type radio frequency MEMS switches and TaN film resistors fabricated on a glass

MEMS system for AR HMDs
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MEMS based projectors are attractive to use for AR HMDs for their high-resolution, small- footprint, and low-power properties. High dynamics capabilities are required to achieve the desired image quality. These achieved by a combination of innovative mechanical design In this paper, we have designed and simulated a capacitive pressure sensor for harsh environment. The sensor is metal insulator-metal type sensor in which the structure is designed using gold and the dielectric using silicon nitrate with thickness of 0.5 μm. The Nanomechanical test instruments can precisely measure force and displacement and produce repeatable load-unload curves that can be used in characterizing mechanical behaviour at the nanoscale. In this study, a newly developed translucent nanomechanical

A Survey of Error Analysis and Calibration Methods for MEMS Triaxial Accelerometers
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MEMS accelerometers are widely used in various fields due to their small size and low cost, and have good application prospects. However, the low accuracy limits its range of applications. To ensure data accuracy and safety we need to calibrate MEMS

MEMs Field Deployment
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Rutgers CAIT personnel recently developed a real-time lead sensor for use in sediment systems. The largest hurdle by far however was the development of a digestion procedure to accurately assess the actual concentration within a given mass of sediment. The sensor thatSilicon carbide piezoresistive pressure sensor is more suitable for harsh environment due to its wide bandgap, corrosion tolerance, excellent chemical inertness, high Youngs modulus and high carrier mobility. In this paper, a square diaphragm with X-shaped piezo-resistor Purpose In this work, nonlinear free vibration of electrostatically actuated micromechanical system has been investigated. These nonlinear solutions are analytically derived. Methods An undamped spring-mass model and dynamic equation of motion are employed for the In this paper, Polyethylene oxide (PEO) is used as the main material to prepare PEO LiClO a polymer electrolyte packaging material. The complexation mechanism of PEO LiClO 4 was studied by fourier transform infrared (FT-IR) spectra. Finally, the bonding of PEO LiClO This paper studies the influence of Casimir force on the static and dynamic characteristics of electrostatically actuated fixed fixed microbeam. The theoretical formulation for the study is obtained using the Euler Bernoulli beam theory. The formulation of governing equation

Energy Harvester from MEMS based Piezoelectric
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Abstract: Piezoelectric energy harvester (PEH) is emerging as a novel device which can convert mechanical energy into electrical energy. It is mainly used to collect ambient vibration energy to power sensors, chips and some other small applications. This paper firstA double layered SnO 2/WO 3 sensing film was prepared on a P-type silicon wafer and the sensing characteristics of SnO 2 film and SnO 2/WO 3 double layered film have been investigated. The micro films were characterized by X-ray diffraction, scanning electronThis paper we proposed in GPS (Global Position System) for driver to reduce accident in many critical situation. Our project will provide an optimum solution to the Car accidents cause a large number of deaths and disabilities every day this have been keeping in the

PARAMETRIC-AMPLIFICATION AND PASSIVE TEMPERATURE COMPENSATION IN MEMS MICROCANTILEVER VAPOR SENSORS
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ABSTRACT Indoor Air Quality (IAQ) refers to the air quality within and around buildings. Volatile Organic Compounds (VOCs) are one of the most harmful indoor air pollutants as they contribute to various health problems. The market for VOC sensors is currently In this work, a modelling approach of complete RF- MEMS (MicroElectroMechanical-Systems for radio frequency) passives is discussed. The methodology takes into account both the non- linear electromechanical and the RF behaviour, and is suitable for being implemented and This paper presents the design and simulation of Hybrid type RF MEMS switch for satellite communication application. The Hybrid switch beam is having non-uniform meanders and holes. The gold material is used as a beam and CPW. The gap between the beam andIn our life, music is a vital entertainment part whose important elements are musical instruments. Forexample, the acoustic drum plays a vital role when a song is sung. With the modern era, the style of themusical instruments is changing by keeping identical tune such MEMS piezoresistive pressure sensors are most widely explored for various applications such as industrial, automotive and medical field. Each application covers a wide operating range from very low pressure to the higher pressure. In this paper a novel structure is

Design of a MEMSBased Capacitive Resonator for Target Analyte Detection
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The present study introduces a microelectromechanical systems ( MEMS ) capacitive comb- finger resonator designed for the detection of different target analytes by using the detection mechanism based on the resonance frequency shift. This kind of applications is generally This paper presents the design and simulation of a MEMS pressure sensor with a digital output for measuring pressure in the range of 0 1 bar. The sensor uses the diaphragm deflection and a simple mechanical structure to convert the applied pressure to a logic This paper introduces the configuration of the MEMS tuning fork gyroscope with the connecting diamond-shaped frame to achieve the anti-phase mode in the driving direction. The connecting frame is an important element to compensate for the phase deviation in two

Novel Patterning Technologies for Semiconductors, MEMS /NEMS and MOEMS 2020
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The papers in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations not be available for publication. AdditionalA new model of RF switch was designed using MEMS technology with a cantilever structure which is giving high sensitivity. The materials having low spring constant have been taken and will be examined in COMSOL by identifying the relation between Eigen frequency and