Milligram Scale High Voltage Power Electronics for Piezoelectric Microrobots



Piezoelectric actuators can achieve high efficiency and power density in very small geometries, which shows promise for microrobotic applications, such as flapping-wing robotic insects. From the perspective of power electronics, these actuators present two challenges: high operating voltages, ranging from tens to thousands of volts; and a low electromechanical coupling factor, which necessitates the recovery of unused electrical energy. This paper explores the power electronics design problem by establishing the drive requirements of piezoelectric actuators, presenting circuit topologies and control methods suitable for driving different types of piezoelectric actuators in microrobotic applications, and demonstrating experimental realizations of sub-100mg power electronics circuits.

Highly compact yet powerful actuators are crucial in many

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. In recent years, a number of actuation methods have been proposed or applied in a microrobotic context, including piezoelectric [1], electrostatic [2], and dielectric elastomer actuators [3]. These actuation methods have the potential to achieve high effi- ciencies and high power densities in very small geometries. Piezoelectric actuators in particular have shown promise in applications with very stringent weight and power density requirements, such as the Harvard Microrobotic Fly (HMF) – a flapping-wing robotic insect capable of liftoff with external power . In order to produce mechanical output, the actuation methods mentioned above rely on the presence of electric charge on various conductive surfaces in order to either generate high electric fields, as in the case of piezoelectric actuators, or high electrostatic forces, as in the case of electrostatic and dielectric elastomer actuators. Moreover, the geometries of such actuators inherently produce significant electrical capacitance, and therefore high operating voltages are usually necessary to accumulate a sufficient amount of electric charge on the actuator electrodes, ranging from tens to thousands of volts. For example, the piezoelectric actuators used in the HMF require drive voltages in the range of 200-300V. There are two major challenges in the design of power electronics capable of driving capacitive actuators: generating high voltages from low-voltag

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