mosfet threshold voltage variation

Lack of spatial correlation in mosfet threshold voltage variation and implications for voltage scaling

FREE-DOWNLOAD [PDF] N Drego, A Chandrakasan… – … , research Transactions on, 2009
Abstract—Due to increased variation in modern process tech- nology nodes, the spatial correlation
of variation is a key issue for both modeling and design. We have created a large array test-structure
to analyze the magnitude of spatial correlation of threshold voltage ( ) in a 180 nm CMOS