On-chip robotics-Technical issues and future direction


free-downloadF Arai – … on Micro-Nano Robotics and New Evolution, …, 2010 –

Abstract Micro-nano robotics plays an important role to supply advanced devices and equipments
in Bio-medical engineering and science. There is an increasing interest in miniaturization and
integration of functional devices by MEMS/NEMS technologies. Recent interest is in




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