Validation of compact models of microcantilever actuators for RF-MEMS design

FREE-DOWNLOADE Brusa… – Analog Integrated Circuits and Signal …, 2009
Abstract Electromechanical behavior of microcantilever specimens for in-plane and out-of-plane
bending tests, currently designed by industry for Radio-Frequency application, are here
analyzed. Main features of these two layouts are discussed. In particular,