Validation of compact models of microcantilever actuators for RF-MEMS design
FREE-DOWNLOADE Brusa… – Analog Integrated Circuits and Signal …, 2009 Abstract Electromechanical behavior of microcantilever specimens for in-plane and out-of-plane bending tests, currently designed by industry for Radio-Frequency application, are here analyzed. Main features of these two layouts are discussed. In particular,
Spectral and modulation properties of a largely tunable MEMS-VCSEL in view of gas phase spectroscopy applications
FREE-DOWNLOADS Schilt, K Zogal, B Kögel, P Meissner… – Applied Physics B: …, 2010 . Spectral and modulation properties of a largely tunable MEMS-VCSEL in view of gas phase spectroscopy applications . This device combines a vertical-cavity surface-emitting laser (VCSEL) with a micro-machined (MEMS) Bragg mirror in a very compact arrangement.
Mechanical modelling of capacitive RF MEMS shunt switches
FREE-DOWNLOADR Marcelli, A Lucibello, G De Angelis… – Microsystem …, 2010 – Abstract The mechanical response of a RF MEMS shunt connected switch in coplanar waveguide configuration has been studied by using both an uni-dimensional approach based on analytical equations and a Finite Element Method (FEM) with commercial software simulations.