mems micro-electro-mechanical systems IEEE PAPERS 2019






Gas Ingress and Egress of MEMS Multi-Chip Modules and MEMS Devices
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Hermetic microcircuit packaging was the dominant method of protecting semiconductor devices in the 1960s and 1970s. After losing majority market sectors to plastic encapsulated microelectronics over the last a few decades, hermetic packaging remains the preferred

Case History Study of Seismic-Driven 3-D MEM Calibrated with 1-D MEMs and Petrophysics in Arkoma Basin, Oklahoma
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In this study, a state-of-the-art seismic driven 3D geological model was built and calibrated to a petrophysical and geomechanical analysis, 1D-MEM (Mechanical Earth Model), on chosen wells within the Arkoma Basin of Oklahoma. The well information utilized in this

INFLUENCES OF THE TEMPERATURE AND HUMIDITY ON QUALITY FACTORS OF MEMS BRIDGE RESONATORS IN AIR ENVIRONEMTNS
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In this paper, the modified molecular gas lubrication (MMGL) equation is used to solve for the squeeze film damping (SFD) on dynamic performance of MEMS bridge resonators. The effective viscosity of moist air is used to modify the MMGL equation to consider the effects of

MEMS -based thermal conductivity sensor for hydrogen gas detection in automotive applications
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Sensors and Actuators A: Physical journal homepage: www.elsevier.com/locate/sna MEMS -based thermal conductivity sensor for hydrogen gas detection in automotive applications Dominik

The IGN MEMS Accelerographs Record the First Accelerograms in Different Locations in the Lorca City
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A recent earthquake (13 December 201 Mag. 3.5) has allowed the recording 11 accelerograms from a network microelectromechanical systems ( MEMS ) low-cost accelerograph Silex. The National Geographic Institute of Spain (IGN) has built this kind of

HoliFab: precise flow control using photo actuated hydrogel valves and PI controlled LED actuation for microfluidic MEMS .
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The photo responsive valves can be photo polymerised in situ using a monomeric cocktail containing 200 mg NIPAAm, 8.35 mg MBIS, 7.91 mg SPA- 7.42 mg PBPO and 6.05 μL Acrylic Acid (dissolved in 500 μL of the polymerisation solvent (2: 1 v/v, THF: DI water) and Purpose The current trend for continuous drug product manufacturing requires new, affordable process analytical techniques (PAT) to ensure control of processing. This work evaluates whether property models based on spectral data from recent Fabry P rot In this paper, Polyethylene oxide (PEO) is used as the main material to prepare PEO LiClO a polymer electrolyte packaging material. The complexation mechanism of PEO LiClO 4 was studied by fourier transform infrared (FT-IR) spectra. Finally, the bonding of PEO LiClO Post-void alarm systems to monitor bedwetting in nocturnal enuresis (NE) have been deemed unsatisfactory. The aim of this study is to develop a safe, comfortable and non- invasive pre-void wearable alarm and associated technologies using advanced

INTEGRATING A LOW-COST MEMS IMU INTO A LASER-BASED SLAM FOR INDOOR MOBILE MAPPING.
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Indoor mapping techniques are highly important in many applications, such as human navigation and indoor modelling. As satellite positioning systems do not work in indoor applications, several alternative navigational sensors and methods have been used to In this work, the operation of an active self-recovery mechanism embedded within microelectromechanical systems ( MEMS ) switches for Radio Frequency (RF) passives (ie RF- MEMS ) is reported and discussed. The mechanism is able to counteract stiction induced This paper presents the design, optimization and analysis of a novel radio-frequency micro electromechanical system (RF MEMS ) switch for reconfigurable antenna. The proposed antenna operates at frequency band from 4.5 to 12.5 GHz. The antenna is created byWe report on the lateral pull-in in capacitive MEMS transducers that employ a repulsive electrostatic force. The moving element in this system undergoes motion in two dimensions. A two degreeof-freedom mathematical model is developed to investigate the pull-in

Design and simulation of a mems -based capacitive micro-machined ultrasonic transducer for viscosity sensing applications
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An analytical and simulation study of a micro electro mechanical systems ( MEMS ) viscometer is reported. This research presents design considerations and feasibility regarding the use of capacitive micro-machined ultrasound transducer (CMUT), for viscosity The impact of the response speed of a microelectromechanical system ( MEMS ) bolometer on the quality of terahertz (THz) imaging with rapid scan has been investigated and compared with a pyroelectric detector (PED). The imaging system was an active imaging

RF MEMS Switches Enabled H-Shaped Beam Reconfigurable Antenna
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Abstract- This work presents a novel RF MEMS -based pattern reconfigurable antenna capable of steering beam in three different directions. The proposed H-shaped microstrip antenna is based on the basic structure of a dipole antenna and forms an Hshape by

Optimization of piezoelectric MEMS process on Sr and La co-doped PZT thin films
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Doped lead-zirconate-titanate (PZT) thin films are preferred for the development of micro- electro-mechanical-systems ( MEMS ) based acoustic sensors because of their inherent higher dielectric and piezoelectric coefficients. Patterning process used to develop such We present a method for tuning the resonance frequency of a comb resonator using a combination of mechanically softening and hardening springs in order to achieve a high tuning range of resonant frequency. The nonlinear behavior of the structure is due to an

Using a MEMS Inertial Measurement Unit for Planetary Gravimetry.
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Development over the last two decades has mostly focused on geodetic applications and has proven to be an effective, low-cost alternative to traditional gravimeters . Major drawback is poor long-term stability. Raw measurements typically have insufficient

A STUDY OF SPRAY PERFORMANCE OF MEMS BASED MICROSCALE PRESSURE SWIRL ATOMIZER
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Modern spray requirements are constantly demanding lower flow rates per injector. With this as the motivation, we investigate the use of microelectromechanical system ( MEMS ) technology to design, fabricate, and characterize a monolithic microscale pressure swirl

Novel Patterning Technologies for Semiconductors, MEMS /NEMS and MOEMS 2020
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The papers in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations not be available for publication. Additional

3C-SiC/Si technology platform for resonant MEMS sensors
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The capability of growing large-area wafers of high-quality 3C-SiC on a silicon substrate makes 3C-SiC/Si a suitable technology platform for lowcost high-performance resonant sensors. We report on the characterization of 3C-SiC resonators towards tunable resonant

Erratum to: A variational approach to a stationary free boundary problem modeling MEMS
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ESAIM: COCV 25 (2019) 54 ESAIM: Control, Optimisation and Calculus of Variations https://doi.org/10.1051/cocv/2019060 ERRATUM TO: A VARIATIONAL APPROACH TO A STATIONARY FREE BOUNDARY PROBLEM MODELING MEMS Philippe Laurençot * and

Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors
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The asymmetric resonance response in thermally actuated piezoresistive cantilever sensors causes a need for optimization, taking parasitic actuation sensing effects into account. In this work, two compensation methods based on Wheatstone bridge (WB) input voltage

Low-voltage InP MEMS optical switch on silicon
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In this paper, a novel MEMS Mach-Zehnder interferometer optical switch is presented. Switching is achieved by tuning the vertical gap between two coupled waveguides through the application of a reverse bias on a pin junction. The switching requires a voltage as low

Underwater Navigation System Solution using MEMS -Mobile Sensors during the GPS Outage
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Abstract? These position of Unmanned Surface Vehicle (USV) is very important in most navigation applications. The Global Position System (GPS) can be used for navigation system for most applications on the earths surface, but its signal is not available underwater

Novel design and analysis of RF MEMS shunt capacitive switch for radar and satellite communications
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In this paper, a new type of Radio Frequency Micro-Electro-Mechanical System (RF- MEMS ) shunt capacitive switch is designed and studied. RF MEMS switch has a number of advantages in a modern telecommunication system such as low power consumption, easy

A Tunable Band Stop Filter for Ku Band Communication Systems using DGS and MEMS Switches
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This paper presents a tunable bandstop filter based on an interdigital defected ground structure (DGS) and microelectromechanical ( MEMS ) switches. The switches are positioned over the bends of the DGS. Depending the switch that is actuated, the effective slot length of

Fabrication and Experimental Characterization of a MEMS Microphone Using Electrostatic Levitation
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Fabrication and acoustic performance of a microelectromechanical systems ( MEMS ) microphone are presented. The microphone utilizes an unusual electrostatic sensing scheme that causes the sensing electrode to move away, or levitate from the biasing

Novel Patterning Technologies for Semiconductors, MEMS /NEMS, and MOEMS 2019
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The papers in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations not be available for publication. Additional

Design, Simulation and Analysis of MEMS Perforated RF Switch with Platinum
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A new model of RF switch was designed using MEMS technology with a cantilever structure which is giving high sensitivity. The materials having low spring constant have been taken and will be examined in COMSOL by identifying the relation between Eigen frequency and

Nanopin-a Mems Based Sensor for the Analysis of Single-Cell Mechanical Properties
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We describe a new MEMS based sensor for mechanical characterization, such as stiffness, of individual adherent cells. Here, we evaluated its feasibility using human lung carcinoma A549 cells. Previously, MEMS based force sensors have been reported, but most of them

Integrated Navigation using MEMS -based Inertial, GPS and Sun Vector Measurements aboard the Spin-Stabilized PMWE-1 Sounding Rocket
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The paper presents the design of an integrated navigation system for spin-stabilized sounding rockets that fuses angular rate and acceleration measurements of a strap-down microelectromechanical inertial measurement unit, pseudorange and range rateThis paper proposes a MEMS resonant pressure sensor through implementing an out-of- plane repulsive (levitation) force to enhance the sensor detection threshold and consequently widen its sensing range. 2D and 3D finite-element simulations are conducted Purpose In this work, nonlinear free vibration of electrostatically actuated micromechanical system has been investigated. These nonlinear solutions are analytically derived. Methods An undamped spring-mass model and dynamic equation of motion are employed for the This paper presents for the first time implementation of zig zag and solenoidal on-chip inductors in standard and cost effective SOI-MUMPs fabrication process. The solenoidal inductor offers high Q-factor and inductance as compared to planar zig zag inductor

Bidirectional Carouseling Method Based on Phase Difference for MEMS Gyro North Finder
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The north finder has been widely used in precision guided weapons, unmanned aerial vehicles (UAVs), and other device. In this paper, a north finder based on a low-cost microelectro-mechanical system ( MEMS ) gyro is proposed. In order to reduce the substantial

Microfabrication and experimental characterization of an Out-of-Plane MEMS switch
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This paper presents an approach to improve the performance of a Micro-Electro-Mechanical ( MEMS ) switch with vertical movement, manufactured using surface micromachining technology. We focused on the investigations of the critical technological dimensions (gap

Macro-Modeling Library in Simscape for MEMS Pressure Sensors Based on Energy-Flow Paradigm
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A definitory feature of MEMS devices is the coupling at microscale between multiple energy domains. Reduced order macro-models (ROM) can be built using either signal flow or energy flow paradigms. While easier conceptually, reducing the device to a dynamical

A MEMS Accelerometer for Sub-mG Sensing
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In this paper, we present a highly sensitive micro-electromechanical system ( MEMS ) accelerometer for sub-mG sensing resolution, where the thermomechanical noise (ie, Brownian noise, BN) being inversely proportional to a proof mass has to be below 1

MEMS Technology-An Overview on Scaling Advantages and Issues
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In this era of think small, one would intuitively simply scale down the size of all components to a device to make it small. Unfortunately, the reality does not work out that way. It is true that nothing is there to stop one from downsizing the device components to make the device

Geometrical consideration and modelling of MEMS based accelerometer
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MEMS (Microelectromechanical) is an advanced technology that finds its application in several fields ie mechanical, electrical, biomedical and many more. This paper focuses on the application of MEMS devices exclusively in the mechanical field. The field of application

High-shear-velocity Composite Acoustic Materials of AlN/Diamond for Biological MEMS Devices
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Shear horizontal (SH) surface acoustic wave (SAW) sensors formed by combining (100) AlN films with a diamond substrate have been developed in this research. The propagation characteristics of SAW in four composite structures according to the positions of interdigital

H2 ANNEAL FOR SIDEWALL ROUGNESS REDUCTION IN INDUSTRIAL SETTING FOR MEMS MICROFABRICATION
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The purpose of this paper is to illustrate hydrogen (H2) anneal capability with the purpose to reduce Si surface roughness in MEMS microfabrication. This technique was successfully implemented and now being offered by C2MI fabrication facility in the sub-atmospheric

Current Reference Pierce Oscillator Circuit Topology for Low Phase Noise MEMS SAW Oscillator
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This paper presents the design and simulation of a current reference Pierce oscillator circuit topology for microelectromechanical systems ( MEMS ) based oscillator. The designed amplifier achieves a gain of 33 dB at VDD of 1.2 V. The amplifier core was tested with

Detection and Compensation of Periodic Jitters of Oscillating MEMS Mirrors used in Automotive Driving Assistance Systems
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According to industry and academia, Light Detection and Ranging (LiDAR) will be the key enabler for robust and holistic environment perception required for automated transportation. 1D and 2D scanning LiDARs employing oscillating MEMS mirrors recently

Piezoelectric MEMS to H Ambient Vib
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Piezoelectric effect helps to convert ambi vibrations into electrical energy that can be used power any electronic circuits. Electrode is used primary sensor to sense these environmental vibratio to harvest energy and convert it to mechani vibrational energy to

Development of Vibration Spectrum Analyzer Using the Raspberry Pi Microcomputer and 3-Axis Digital MEMS Accelerometer ADXL345
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In the paper, the spectrum analyzer of vibration accelerations using the Raspberry Pi microcomputer and 3-axis digital MEMS ADXL345 accelerometer has been developed. The system includes accelerometer driver for Raspberry Pi, software for data acquiring and

Design and Performance of Wheel-mounted MEMS IMU for Vehicular Navigation
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In modern cars MEMS gyroscopes and accelerometers provide essential measurements for enhancing the stability and control. Both types of sensors have significant noise at low frequencies, limiting the measurement accuracy especially in low dynamic conditions. In

Steering Co-centered and Co-directional Optical and Acoustic Beams with a Water-immersible MEMS Scanning Mirror for Underwater Ranging and
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This paper reports the development of a compact optical-acoustic frontend module for underwater communication and ranging. The module is enabled by a new water-immersible MEMS scanning mirror (WIMSM). It is capable of transmitting, receiving and steering co

Simulation and Derivation of Deflection Equation for Suspended Diaphragm for MEMS Application Using Kirchhoff-Love Theory
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In this paper, using theory of sheets, the deflection of suspended diaphragm has been obtained under uniform and circular loading. This type of diaphragm, unlike other diaphragms, has a central support which is recommended to be used in MEMS applications

Additive and Digital Fabrication of 3D Interconnects in MEMS Packaging Using Printing Technologies
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With the introduction of electrically functional inks and continuous development of printing equipment, the application of printed electronics in the fabrication of electronic circuits, structures and devices has been steadily growing over recent years. Among printed



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