mems micro-electro-mechanical systems ieee papers 2019


MEMS Technology-An Overview on Scaling Advantages and Issues
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In this era of think small, one would intuitively simply scale down the size of all components to a device to make it small. Unfortunately, the reality does not work out that way. It is true that nothing is there to stop one from downsizing the device components to make the device

Geometrical consideration and modelling of MEMS based accelerometer
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MEMS (Microelectromechanical) is an advanced technology that finds its application in several fields ie mechanical, electrical, biomedical and many more. This paper focuses on the application of MEMS devices exclusively in the mechanical field. The field of application

High-shear-velocity Composite Acoustic Materials of AlN/Diamond for Biological MEMS Devices
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Shear horizontal (SH) surface acoustic wave (SAW) sensors formed by combining (100) AlN films with a diamond substrate have been developed in this research. The propagation characteristics of SAW in four composite structures according to the positions of interdigital

H2 ANNEAL FOR SIDEWALL ROUGNESS REDUCTION IN INDUSTRIAL SETTING FOR MEMS MICROFABRICATION
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The purpose of this paper is to illustrate hydrogen (H2) anneal capability with the purpose to reduce Si surface roughness in MEMS microfabrication. This technique was successfully implemented and now being offered by C2MI fabrication facility in the sub-atmospheric

Current Reference Pierce Oscillator Circuit Topology for Low Phase Noise MEMS SAW Oscillator
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This paper presents the design and simulation of a current reference Pierce oscillator circuit topology for microelectromechanical systems ( MEMS ) based oscillator. The designed amplifier achieves a gain of 33 dB at VDD of 1.2 V. The amplifier core was tested with

Detection and Compensation of Periodic Jitters of Oscillating MEMS Mirrors used in Automotive Driving Assistance Systems
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According to industry and academia, Light Detection and Ranging (LiDAR) will be the key enabler for robust and holistic environment perception required for automated transportation. 1D and 2D scanning LiDARs employing oscillating MEMS mirrors recently

Piezoelectric MEMS to H Ambient Vib
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Piezoelectric effect helps to convert ambi vibrations into electrical energy that can be used power any electronic circuits. Electrode is used primary sensor to sense these environmental vibratio to harvest energy and convert it to mechani vibrational energy to

Development of Vibration Spectrum Analyzer Using the Raspberry Pi Microcomputer and 3-Axis Digital MEMS Accelerometer ADXL345
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In the paper, the spectrum analyzer of vibration accelerations using the Raspberry Pi microcomputer and 3-axis digital MEMS ADXL345 accelerometer has been developed. The system includes accelerometer driver for Raspberry Pi, software for data acquiring and

Design and Performance of Wheel-mounted MEMS IMU for Vehicular Navigation
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In modern cars MEMS gyroscopes and accelerometers provide essential measurements for enhancing the stability and control. Both types of sensors have significant noise at low frequencies, limiting the measurement accuracy especially in low dynamic conditions. In

Steering Co-centered and Co-directional Optical and Acoustic Beams with a Water-immersible MEMS Scanning Mirror for Underwater Ranging and
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This paper reports the development of a compact optical-acoustic frontend module for underwater communication and ranging. The module is enabled by a new water-immersible MEMS scanning mirror (WIMSM). It is capable of transmitting, receiving and steering co

Simulation and Derivation of Deflection Equation for Suspended Diaphragm for MEMS Application Using Kirchhoff-Love Theory
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In this paper, using theory of sheets, the deflection of suspended diaphragm has been obtained under uniform and circular loading. This type of diaphragm, unlike other diaphragms, has a central support which is recommended to be used in MEMS applications

Additive and Digital Fabrication of 3D Interconnects in MEMS Packaging Using Printing Technologies
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With the introduction of electrically functional inks and continuous development of printing equipment, the application of printed electronics in the fabrication of electronic circuits, structures and devices has been steadily growing over recent years. Among printed





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