mems-micro electro mechanical system research papers 2012 section 3

 Dynamic and Quasi-Static Simulation of a Novel Compliant MEMS Force Amplifier by Matlab/Simulink
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MEMS are micro electromechanical systems having component sizes varying from 1
micrometer to 1 millimeter and provide specific engineering operations. MEMS are used as
a micro sensor, micro actuator, micro accelerometer etc. and also have tendency to 

Digital Vibration Sensor Constructed with MEMS Technology
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G Mazurek ,International Journal of Electronics and , 2012 ,Versita
In this paper, a new digital sensor of acceleration is described. The sensor is based on
MEMS device and is capable of measuring both static (gravity) and dynamic (vibration)
accelerations. Its primary application is the measurement of vibrations in buildings and 

 Gait Analysis for Pedestrian Navigation Using MEMS Handheld Devices
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M Susi ,2012
Abstract Advances in Micro-Electro-Mechanical Systems (MEMS) technology play a central
role in the design of new generation of smartphones. Indeed MEMS sensors, such as
accelerometers and gyroscopes, are currently embedded in most smart devices in order to 

MEMS: Fabrication of cryogenic bolometers
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J Kunerta, S Andersa, T Maya ,Proc. of SPIE , 2012 ,
ABSTRACT Cryogenic bolometers are among the most sensitive devices for the detection of
electromagnetic radiation in the submillimeter wavelength range. Such radiation is of
interest for astronomical observations as well as for security checks. We describe how we 

Review of pyroelectric thermal energy harvesting and new MEMs based resonant energy conversion techniques
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SR Huntera, NV Lavrika, S Mostafac , . of SPIE Vol, 2012 ,
ABSTRACT Harvesting electrical energy from thermal energy sources using pyroelectric
conversion techniques has been under investigation for over 50 years, but it has not
received the attention that thermoelectric energy harvesting techniques have during this 

 Development and Testing of a Remote Access MEMS Lab for Distance Education
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Advancements in cyber communications are making an impact on the delivery of education
by opening up new modes of interaction. Microelectromechanical Systems (MEMS) based
technologies provide a compelling way to extend the benefits of interactive 

 Peizoresistive MEMS Cantilever based CO2 Gas Sensor
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S Subhashini, A Vimala Juliet ,International Journal of , 2012
ABSTRACT A study about the piezoresistive Micro-Electro-Mechanical Systems (MEMS)
cantilever for a chemical sensitive-mass based sensor has been carried out to enhance
sensor sensitivity. The sensitive region attracts the CO2 molecules there by introducing 

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SM Shaby, AV Juliet ,Indian Journal of Computer Science and , 2012
Abstract This paper compares a MEMS Piezoresistive pressure sensor which utilizes a
circular and square shaped polysilicon diaphragm with a nanowire to enhance the
sensitivity of the pressure sensor. The nanowires for both the sensors form the bridge 

 Coherent Porous Silicon Wick for a MEMS Loop Heat Pipe
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NS Dhillon ,2012 ,
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