ENGINEERING RESEARCH PAPERS

micro electro mechanical system mems research papers 2015 IEEE PAPER




MEMS scanning mirrors for high power laser display and lighting applications
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Abstract: This paper reports about a new development of MEMS scanning mirrors specifically designed for high power laser displays, high power lighting applications and for laser material processing. Applying high reflective dielectric coating enables these MEMS

On the Quenching Behaviour of a Semi linear Wave Equation Modelling MEMS Technology
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Abstract. In this work we study the semilinear wave equation of the form utt= uxx+ /(1- u) 2, with homogeneous Dirichlet boundary conditions and suitable initial conditions, which, under appropriate circumstances, serves as a model of an idealized electrostatically

SIMULATION OF A MEMS POLY-SILICON CANTILEVER RESONATOR
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The simulation and analysis of a MEMS structure is presented. The model utilizes FEM analysis in order to determine the resonant modes of a cantilever fabricated from poly- silicon. Three eigen frequencies of interest are studied and their vibration behavior

Versatile CMOS-MEMS integrated piezoelectric platform
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ABSTRACT We present the extension of the InvenSense fabrication platform to piezoelectric transduction. The newly proposed CMOS-MEMS Integrated Piezoelectric Platform inherits the wafer bonding advantages of its predecessor, leverages existing semiconductor

RF MEMS
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Switches are an integral part of electronics. It is no surprise that there are countless types of switches, which can range from low-cost PIN diodes to high-power electromagnetic relays. Microelectromechanical systems (MEMS) switches are quickly becoming very popular

Sensitivity Study of the MEMS Microphone with a Composited Layer Diaphragm
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Abstract: Microphones which convert the acoustic wave into electrical output have exhibits many important applications in our daily life, such as mobile phones, tablet PC, labtop computers, etc. MEMS condenser microphones have attracted more research interesting

A Low Mechanical Noise Tri-axis MEMS Ineretial Sensor Fabricated by Multi-layered Metal Technology
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Material and process development of thin film shape memory alloy for MEMS actuator
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ABSTRACT In this work we discuss the design and fabrication of a cantilever that may be actuated by utilizing the martensite to austenite phase transformation of a sputtered thin film of equiatomic NiTi shape memory alloy (SMA). The cantilever devices were fabricated on

Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications inMEMS Accelerometers
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1CREST, Japan Science and Technology Agency, Yokohama 226-8503, Japan 2Precision and Intelligence Laboratory, Tokyo Institute of Technology, Yokohama, 226-8503, Japan 3NTT Advanced Technology Corperation,

Determination of Multiple Spring Constants, Gaps and Pull Down Voltages in MEMS CRAB Type Microaccelerometer Using Near Pull Down Capacitance
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Abstract: A simple experimental method based on capacitance voltage (CV) measurements is presented to extract the spring constants (k) different actuation voltages and gaps, in crab type capacitive MEMS accelerometer sensors. It is shown that in addition to main spring

MEMS-based thermal management of high heat flux devices edifice: Embedded droplet impingement for integrated cooling of electronics
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ABSTRACT Increases in microprocessor power dissipation coupled with reductions in feature sizes due to manufacturing process improvements have resulted in continuously increasing heat fluxes. The ever increasing chip-level heat flux has necessitated the

500-600 GHz Submillimeter-Wave 3.3 bit RF MEMS Phase Shifter Integrated in Micromachined Waveguide
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Abstract:This paper presents a 500-600 GHz submillimeterwave MEMS-reconfigurable phase shifter. It is the first ever RF MEMS component reported to be operating above 220 GHz. The phase shifter is based on a micromachined rectangular waveguide which is

Hat-type hearing system using MEMS microphone array
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Abstract For speech communications, it is useful to emphasize the sound coming from a certain direction. To give more freedom to sound directivity, we want to use a large-scale microphone array for hearing aids. However, it is difficult to mount a large-sale

500-600 GHz RF MEMS Based Tunable Stub Integrated in Micromachined Rectangular Waveguide
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Abstract:This paper presents a 500-600 GHz switchable E-plane waveguide stub tuned MEMS device. It is the first ever RF MEMS component reported to be operating above 220 GHz. The micromachined E-plane stub can be blocked/unblocked from the

MEMS based Hand Gesture Wheel Chair Movement Control for Disable Persons
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Abstract This project is to develop a wheel chair control which is useful to the physically disabled person with his hand movement or his hand gesture recognition using MEMS technology. The use of powered wheel chair with high navigational intelligence is one of The need for tunable or reconfigurable filters is becoming more apparent as the radio technologies advance and the radio spectrum becomes more crowded. Bandpass filters, specifically, can improve the radio performance by improving the signal to noise ratio,

Experimental investigation on mode coupling of bulk mode silicon MEMS resonators
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ABSTRACT This paper demonstrates the effect of nonlinear elasticity on the coupling between different bulk modes of silicon MEMS resonators. From experimental data, we observe that the coupling has a strong dependence on the resonant mode order, the

Analog/RF, sensors and MEMS in SOI
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Page 1. Analog/RF, sensors and MEMS in SOI :

An improved analytical approach for estimation of misalignment error of sensing axis inMEMS accelerometers using simple tilt measurements
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Abstract: A simple experimental method and improved analytical approach based on tilt measurements (output versus angle) is presented to determine the misalignment error in sensing axis direction of single, two or threeaxis accelerometer sensors. The approach is

Fuzzy Control for Chaotic Response Improvement in MEMS Resonators
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Abstract Starting with the design and biasing conditions to enable cross-well chaotic behaviour in a nonlinear MEMS resonator, this paper presents for the first time a control method based on fuzzy logic to maximize such a chaotic response, providing a design

Large Scale Silicon Photonic MEMS Switch
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ABSTRACT Fast optical circuit switches with large port count will allow flexible bandwidth allocation in datacenter networks by augmenting electrical packet switching. Here we report microsecond speed optical circuit switch with 50x50 port counts implemented on silicon

Reliability Prediction for MEMS Accelerometer under Random Vibration Testing
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Abstract MEMS accelerometer can measure acceleration information for carrier in movement, mainly used in the inertial navigation field of aerospace and aviation accompanied with vibration interference. In order to analyze the reliability of MEMS

Comparative Analysis between Multi-grid MEMS Structure and Inter-digital Electrodes for Moisture Measurement
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Abstract This paper describe design of novel sensor for moisture measurement that can be used in agriculture, automotive industries. In the present scenario moisture is measured by calculating change in relative permittivity which in turn depends upon change in

MEMS Sensors Applied in Finswimming Movement Analysis
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ABSTRACT. The purpose of this study aimed to use the measurement of Micro Electro Mechanical systems (MEMS) sensors to analyze the actions of finswimming for 50 meters. The analysis of the major sports limbs acceleration and angular velocity differences

Design and fabrication of a MEMS high-efficiency NIR-scanning grating based on tilted (1 1 1) silicon wafer
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Abstract A MEMS high-efficiency scanning grating for near infrared micro spectrometers has been successfully developed. This paper presents its design, fabrication, and measurement results. Compared with previously reported rectangular and V-shaped groove grating

30 GHz RF-MEMS Dicke Switch Network and a Wideband LNA in a 0.25 Ám SiGe BiCMOS Technology
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Abstract This work presents a novel monolithic integration of a 30 GHz RF-MEMS Dicke switch network and a wideband LNA realised in a 0.25 Ám SiGe BiCMOS process. The wideband LNA design has a measured gain of 10-19.9 dB at 2-33 GHz given a DC power Carbon MEMS combines different patterning techniques with carbonization to derive miniaturized glass-like carbon features from an organic precursor. Since glass-like carbon is a brittle material, the carbonization of an already patterned precursor compares

RF-MEMS Switch Design and Analysis with Photon Crystal Structure
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Abstract In this paper, a new structured switch based on photon crystal is designed, whose structure is notable in enhancing RF system performances. Experiment demonstrates that the new structure switch is of excellent transmission characteristics relative to average

Modelling and Simulation of the Effect of Air Damping on the Frequency and Quality factor of a CMOS-MEMS Resonator
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Abstract: This paper reports analytical modeling and finite element analysis (FEA) of the effect of two types of air damping (squeeze film and slide film damping) on resonance frequency and quality factor of a multi-layer CMOS-MEMS resonator designed for

PZT THIN FILMS FOR PIEZOELECTRIC MEMS MECHANICAL ENERGY HARVESTING
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ABSTRACT This thesis describes the optimization of piezoelectric Pb (ZrxTi1-x) O3 (PZT) thin films for energy generation by mechanical energy harvesting, and self-powered micro- electro-mechanical systems (MEMS). For this purpose, optimization of the material was

Research on Signal Processing of MEMS Gyro Array
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A new random drift model and the measured angular rate model of MEMS gyro are presented. Based on such models, signal processing techniques are used to decrease gyro drift. Kalman filtering equations have been built for static measurement and dynamic

MEMS/Nano-technologies for Smart Air Environmental Monitoring Sensors
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Abstract The importance of air quality monitoring is rapidly increasing. Even though state-of- the-art air quality monitoring technologies such as mass spectrometry, gas chromatography, and optical measurement enable high-fidelity measurement of air pollutants, they cannot

Fabrication and testing of electromagnetic MEMS microactuator utilizing PCB based planar micro-coil
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ABSTRACT An electromagnetic MEMS actuator with planar electromagnetic micro-coil on a PCB (Printed Circuit Board) is reported. The microactuator device consists of permanent magnet made of NdFeB, silicon based membrane and planar micro-coil electroplated on

Design and fabrication of a MEMS 3D micro-transformer for low frequency applications
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ABSTRACT This study presents the fabrication of a 3D micro-transformer using MEMS technology in 10-600 kHz frequency range. The fabrication processes is developed for high- performance and low-cost realization with respect to planner design. The coil winding and

Multi-Layer Planar Near Field Holography using MEMS microphone arrays in a noisy environment
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Summary Near-eld acoustic measurements in noisy environments su er from interference generated by undesired sources, especially when they are located close to the measurement equipment. Planar Near-eld Acoustic Holography (PNAH) using a single

Performance Characteristic Mems-Based IMUs for UAVs Navigation
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ABSTRACT: Accurate 3D reconstruction has become essential for non-traditional mapping applications such as urban planning, mining industry, environmental monitoring, navigation, surveillance, pipeline inspection, infrastructure monitoring, landslide hazard analysis,

L-SHAPED CANTILEVER PARALLEL-PLATE MEMS ACCELEROMETER DESIGN PARAMETERS USING A GRAVITATIONAL SEARCH ALGORITHM
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Abstract-Due to their small size, low weight, low cost and low energy consumption, MEMS (Micro Electro-Mechanical Systems) accelerometers have achieved great commercial success in recent decades. The objective of this paper is to find the optimum design for a

AHRS Design based on STM32 and MEMS Sensors
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Abstract Controlling UAV requires high-precision dynamic information input. However, mini UAV needs more demands because of the its small volume. Using MEMS sensor can make the UAV become high-precision, low power consumption and inexpensive machine. In MEMS is an abbreviation for microelectromechanical systems. MEMS sensor is a measurement device consisting of mechanical parts for picking up events or environmental changes (ie, sensors) and electric circuit for amplifying and filtering the signals from

A Digital Pen With a Trajectory Recognition Algorithm Using MEMS
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Abstract-This paper presents an accelerometer-based digital pen for handwritten digit and gesture trajectory recognition applications. The digital pen consists of a tri-axial accelerometer, a microcontroller, and an RF wireless transceiver for sensing and

Analysis of RF MEMS Capacitive Switches by Using Switch EM ANN Models
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Abstract:Artificial neural networks (ANNs) have appeared to be an alternative to the conventional models of RF MEMS switches. In this paper, neural models of an RF MEMS capacitive switch are developed and used for the electrical design of the switch. Namely,

OF AMPLITUDE-FREQUENCY FORMULATION TO A NONLINEAR OSCILLATOR ARISING IN THE MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS)
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Abstract: Study the application of microelectromechanical system (MEMS) devices especially the electrically actuated MEMS devices which require few mechanical components and small voltage levels for actuation is continuously growing. The MEMS

3C-SiC From Electronic to MEMS Devices
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Abstract Since decades, silicon carbide (SiC) has been avowed as an interesting material for highpower and high-temperature applications because of its significant properties including its wide bandgap energy and high temperature stability. SiC is also professed as

MEMS Based Energy Harvesting Controler Using Fuzzy Logic.
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Abstract:This paper presents the design and simulation of MEMS based energy harvester controller. Energy harvesting from physical motion such as finger motion, heart beating, walking and running are becoming so important now-a-days. In this study outputs voltage

A systematic MEMS sensor calibration framework
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Neural Network Simulation of atomic force microscopy (with capacitive technology at scaleMEMS)
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Abstract The atomic force microscopes are the new generation of microscopes that presently have gained worldwide attention, whose actuation is in the dimensions of MEMS, and are manufactured and designed here as per the rules governing the capacitors. In this study,

Design and Simulation of MEMS-based Z-Axis Capacitive Accelerometer
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ABSTRACT In this paper, a MEMS-based Z-axis capacitive accelerometer is designed and simulated. An out-of-plane Z-axis accelerometer designed for 8 Ám UV-LIGA technology for an acceleration range of▒10g. The operating voltage is 5 V DC. Simulation results show Based upon a strict definition, a CMOS-MEMS resonator is fabricated using a CMOS foundry orientated process to realize MEMS/IC integration for resonator applications, such as oscillators and filters. The integrated CMOS-MEMS fabrication platform is a key

Transistor Circuits for MEMS Based Transceiver
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Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first

Design of Diaphragm Based MEMS Pressure Sensor with Sensitivity Analysis for Environmental Applications
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Abstract: In this paper Micro-electromechanical System (MEMS) diaphragm based pressure sensor for environmental applications is discussed. The main focus of this paper is to design, simulate and analyze the sensitivity of MEMS based diaphragm using different

3C-SiC: New Interest for MEMS Devices
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Transistor Circuits For A MEMS Based Transceiver
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ABSTRACT In recent years, the push for low power wireless sensor networks has called for the introduction of RF-MEMS transceiver devices capable of operating on small batteries or small scales of scavenged power from sources such as solar and kinetic energy. The

MEMS Micro-Era Missile-Borne
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State Estimation of MEMs Capacitor Using Taylor Expansion
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ABSTRACT This paper deals with state estimation of micro tunable capacitor subjected to nonlinear electrostatic force. To this end, a nonlinear observer has been designed for state estimation of the structure. Necessary and sufficient conditions for construction of the

A Cantilever Based MEMS Sensor for Detection of Greenhouse Gases
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ABSTRACT In the past two decades global warming was being caused by rising absorptions of greenhouse gases (GHG) composed by human activities. Greenhouse gases catch heat in the atmosphere, which makes the earth warmer. The effect of greenhouse gas is the

MEMS Switches
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Page 1 ROCHESTER INSTITUTE OF TECHNOLOGY MICROELECTRONIC ENGINEERING MEMS Switches Dr. Lynn Fuller webpage: http://people.rit.edu/lffeee Page 6. May 6, 2015 Dr. Lynn Fuller MEMS Switches Page 6 ADI MEMS SWITCH Size 100 Ám x 100 Ám Page 7.

Sensitivity Analysis of MEMS Capacitive Pressure Sensor with Different Diaphragm Geometries for High Pressure Applications
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Abstract:In this paper three MEMS capacitive pressure sensors with different diaphragm geometries are designed and simulated. The sensors modelled have square, circular and rectangular diaphragms, with some fixed area. The diaphragm thickness of the three

Advances in Thermoelastic Dissipation and Anchor Loss in MEMS Resonators
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Abstract Silicon Microelectromechanical (MEMS) resonators are being developed for a wide variety of applications including frequency reference applications, positioning systems (gyroscopes) force sensors (AFM) and energy harvesters. In these applications, energy

Simulation of MEMS Energy Harvesting Generators Based on Bennet's Doubler
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Abstract:This paper presents considerations about the de-sign and operation of electrostatic generators based on Bennet's doubler, when realized with microelectromechanics techniques. Electrical models taken from mechanical analogs are

Bio-MEMS and Medical Microdevices II
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The papers included in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication.

Design of Direct Exponential Observers for Fault Detection of Nonlinear MEMS Tunable Capacitor
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ABSTRACT In this paper a novel method for construction of an exponential observer for nonlinear system is proposed. The method is based on direct solution of dynamic error without any linearizing of nonlinear terms. Necessary and sufficient conditions for

BORON-DOPED HYDROGENATED AMORPHOUS SEMICONDUCTOR MEMS
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A micromachining process for the fabrication of micro-electro-mechanical systems (MEMSs), using both boron-doped silicon and silicon-germanium amorphous films (a-SiB: H and a- Si0. 50Ge0. 50B: H) prepared with plasma-enhanced chemical vapor deposition (PECVD)

Application of MEMS microphone array for acoustic holography
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Summary The paper shows the overall potential and applicability of microphone arrays equipped with MEMS miniature capacitive microphones for use with near-field acoustic holography algorithms to visualize and localize sound sources. Comprehensive test of

Low Loss High Isolation NEMS/MEMS Switch for High Frequency RF Applications.
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Abstract: MEMS switches are advantageous in terms of low power consumption, switching times, high isolation, low insertion loss and many more. This paper proposes a MEMS switch with high isolation and low insertion loss. The model used is a CPW configuration with a

MEMS Accelerometer Based Hand Gesture Recognisition System
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Abstract: This paper presents three different gesture recognition models which are capable of recognizing seven hand gestures, ie, up, down, left, right, tick, circle and cross, based on the input signals from MEMS 3-axes accelerometers. The accelerations of a hand in

MEMS BASED RESONANT MASS SENSORS WITH FEEDTHROUGH CURRENT ELIMINATION FOR IN-LIQUID CELL DETECTION APPLICATIONS
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Resonance characterization results in air are presented to see the improvements over the benchmark design, which is previously developed in METU BioMEMS research group. Total sensor mass has been decreased without any loss in the sensor gain. Even two orders of

MEMS Computer Vision and Robotic Manipulation System
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The year is 2015, MEMS (Microelectromechanical Systems) technology is a growing field that requires more automative tools to lower the cost of production. Current industry standards of tele-operated 3D manipulated MEMS parts to create new devices are labor

A Critical Review of MEMS Capacitive Pressure Sensors
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Abstract: This paper provides an overview including developments, challenges with respect to design, modelling, simulation and analysis of MEMS pressure sensors. Recently MEMS capacitive pressure sensors have gained advantages over piezoresistive pressure sensor

MEMS Keys as a Way to Delay the Phase of the Microwave Range
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Abstract: The paper deals with a new type of phase shifter antennas scanned beam shows the principle of constructing controlled microwave phase shifters that have a low cost. Also, given the results of a theoretical study of the main characteristics of dependency-

GAS RESPONSE PROPERTIES OF METAL OXIDE NANOPARTICLE BASED SENSORS ONMEMS MICROHOTPLATE PLATFORMS
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ABSTRACT This thesis concentrated on the analysis of the gas response properties of several metal oxide based gas sensors. A thin layer of chosen metal oxide was deposited on SGX Sensortech SA sensor platforms using pulsed laser deposition (PLD). Metal oxides

Design and Simulation of MEMs Based Piezo-Resistive Pressure Sensor
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Abstract: Micro electro mechanical system predicated silicon pressure sensors have undergone a consequential magnification in the last few years. The sensitivity, maximum quantifiable pressure and linear range of pressure sensors highly depend upon the Abstract The future of wireless technology is stressing the development of ubiquitous, low- cost, highly specialized wireless devices, where both the design and fabrication of wireless antennas have an essential role. This chapter presents four modern fabrication processes

A HIGH PERFORMANCE CLOSED-LOOP ANALOG READOUT CIRCUIT FOR CAPACITIVEMEMS ACCELEROMETERS
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With the developments in the silicon-based integrated circuit fabrication techniques, the electrical circuit sizes and costs have been reducing rapidly over the years. Moreover the increasing trend for the integrated circuit demands of the market has effectively

NEW MEMS NEMS SOLUTIONS FOR INTELLIGENT MECHATRONICS MICROSYSTEMS USED FOR ULTRAPRECISE MEASUREMENTS
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Abstract: The scientific paper will research and consider new solutions MEMS NEMS for intelligent mechatronics microsystems used for ultraprecise measurement, linear and angular, describing the structural architecture, including hardware and their software.

An Embedded Real Time Digital Pen using MEMS Technology
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Abstract: Now a day, the growth of miniaturization technologies in electronic circuits and components has greatly decreased the dimension and weight of consumer electronic products, such as smart phones and handheld computers, and thus made them more

Titanium MEMS Technology Development Microfluidic Applications
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