ENGINEERING RESEARCH PAPERS

IEEE PAPER 2016




A Novel Scheme of Mesh Generation from an Arbitrary Topography for MEMS Analysis
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ABSTRACT This paper reports on the modeling and simulation methodology by using a scheme of mesh generation from an arbitrary topography for electrostatically driven microelectromechanical systems (MEMS). Using process recipe with mask layout

A Sparse Grid based Collocation Method for Model Order Reduction of Finite Element Models of MEMS under Uncertainty
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ABSTRACT A methodology is proposed for the model order reduction of finite element approximations of MEMS devices under random input conditions. In this approach, the reduced order system matrices are represented in terms of their convergent orthogonal

Integrated Modeling of Optical MEMS Subsystems
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ABSTRACT This paper presents top-down holistic design and verification of a MEMS-based 3-D optical switching subsystem utilizing an integrated CAD environment. The subsystem design takes place in a nodal simulation environment that includes models for fibers,

Finite Element Analysis in the Development of the MEMS-based Compound Grating (MCG)
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ABSTRACT This paper presents the development of the 1 pm ruled MEMS-based Compound Grating (MCG) in which the structural material of the rulings is SiO2 coated with Cr/Au as the top electrode. The MEMS simulation package IntelliSuiteTM is used to

Stacked Coupled-Disk MEMS Resonators for RF Applications
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ABSTRACT We present a novel, stacked coupled-disk resonator where the silicon discs vibrate in radial contour modes, actuated by electrodes wrapped around the disk periphery. The selfaligned, central stem mediates the coupling and also anchors the stack to the

Mechanical Properties Measurements of 0.35-µm BiCMOS MEMS Structures
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ABSTRACT CMOS-MEMS mechanical properties, such as effective Young's modulus, axial residual stress, and vertical and lateral stress gradients, are strongly dependent on composition, ie, relative metal and dielectric content. Test structures, measurements and

Visual Modeling and Design of Microelectromechanical System (MEMS) Transducers
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ABSTRACT Microelectromechanical systems (MEMS) integrates miniaturized mechanical structures with electronics to extend the benefits of planar integrated circuit technology to a broader class of systems. To realize the potential and growth of MENS, new modeling,

Analytical Analysis of a Squeeze Film Dominated MEMS Fluid Ejector
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ABSTRACT We present an analytical model for predicting the behavior of a squeeze-lm dominated MEMS uid ejector. The ejector consists of a piston that is driven toward a nozzle plate with a relatively thin layer of uid sandwiched between the two (Fig. 1). We derive an

Higher Order Sigma-Delta Modulator Interfaces for MEMS Capacitive Sensors
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MEMS capacitive sensors, such as pressure sensors, accelerometers and gyroscopes have been one of the most successful examples of microsystem technology. They are routinely used in many applications; the most important being automotive safety systems. These

Advanced In-and Out-off plane High Resolution X-ray Strain Analysis on MEMS
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ABSTRACT Related to the dramatically smaller volume of microelectromecanical systems (MEMS), new methods in testing and qualification are needed. In single crystal silicon (SCSi) based devices, stress and loading in operation introduces defects during the

MEMS for Drug Screening Applications
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ABSTRACT MEMs sensors have the potential to serve as a low cost method for screening new drugs. To examine the feasibility of this technique, microbeams were designed such that an afnity between the beam surface (coated with a biomolecule) and a second

MEMS/MST Model Verification and Materials Parameter Extraction using MEMSPEC -2000
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ABSTRACT We describe the current status of the MEMSPEC-2000 MEMS/MST characterization system. This system has been designed to provide automated multi-domain measurements of a wide range of MEMS/MST devices. The system is capable of high

Monolithic CMOS MEMS technology development: A piezoresistive-sensors case study
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ABSTRACT This paper presents the development of a monolithic CMOS-MEMS platform under the iDesign and SemeMEMS projects with the aim of jointly providing an open access one-stop-shop design and prototyping facility for integrated CMOS-MEMS. This work

Experimental mechanical stress characterization of MEMS by using of confocal laser scanning microscope with a Raman spectroscopy interface
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ABSTRACT In this research, confocal laser scanning microscopes (CLS) interface for micro- Raman spectroscopy system has been developed. The potential of this system for characterization MEMS device is demonstrated by measuring Si membrane of a pressure

Nano-Electrodeposits of MEMS Directional Microphones for Hearing Aid Optimization
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ABSTRACT We present an in-situ method for MEMS (microelectromechanical systems) microphone sensitivity optimization via the growth/retraction of nanoelectrodeposits to achieve high directionality in hearing aid applications. Using a DC bias at room

Non traditional dicing of MEMS devices
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ABSTRACT Many of the processes that are used in the manufacture of MEMS are taken directly from IC fabrication. Singulating the wafer into individual MEMS is such a process. Most MEMS are singulated using diamond blade dicing barrowed from the IC process.

A MEMS tunable inductor
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ABSTRACT This paper reports a single-wafer micromachined radiofrequency (RF) inductor that can be integrated in a conventional RFIC device. The inductor achieved a quality factor greater than 9 at 5Ghz and a self-resonance frequency well above 15 GHz. The inductor is

Challenges in Process Modeling for MEMS
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ABSTRACT The potency of the silicon 1 technology base, its use of CAD for design targeted for manufacturing and the related challenges faced in deployment of MEMS are discussed. The rapidly growing field of MEMS has created opportunities to merge new

MEMS-Based MHz Integrated Ultrasonic Nozzles With Applications to Micro/Nano Technologies
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ABSTRACT This paper reports on results of atomization of water and gold colloid solutions using micro electro mechanical system (MEMS)-based 3-Fourier horn 0.5 MHz ultrasonic nozzles. The resulting droplets are much smaller and more uniform than those obtained

Ultra High Performance In-line Contact MEMS RF Switch
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ABSTRACT This paper reports an in-line contact RF MEMS switch using electrostatically actuated membrane. The proposed switch was designed and the surface micro machining was used to fabricate it. Finally, RF performances and switching time were measured. The

Electromechanical and Microwave S-Parameter Properties of a Wide Tuning Range MEMSTunable Capacitor
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ABSTRACT We present the electromechanical and microwave properties of a novel micromachined parallel~ plate tunable capacitor with a wide tuning range. Different from conventional two-parallel-plate tunable capacitors, this novel tunable capacitor consists of

Investigation of Stress in AlN Thin Films for Piezoelectric MEMS
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ABSTRACT In this contribution, the mechanical stress and the Young's modulus of highly textured aluminum nitride (AlN) films are investigated on (i) thin films,(ii) on thin membranes and (iii) on resonant microstructures. Aging and thermal cycling experiments reveal that

Analysis of an Ink Ejection Failure on a MEMS Micro-Injector Printing Head
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ABSTRACT The failure mechanism of a monolithic MEMS twinbubble micro-injector failing to eject ink smoothly is investigated. The nozzle plate structure is insufficient to resist the thermally induced stress, resulting in chamber wall crack and thus ink ejection failure. A

Characterization of Microscale Material Behavior with MEMS Resonators
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ABSTRACT For reliable MEMS device fabrication and operation, there is a continued demand for precise characterization of materials at the micron scale. This paper presents a novel material characterization device for fatigue lifetime testing. The fatigue specimen is

Mechanical characterization of electrostatic MEMS switches
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ABSTRACT This paper presents a methodology developed to characterize the mechanical properties of MEMS switches. Mechanical experiments have been performed to explain the

Electrical Resistance Characterization of Strain-Induced Multiwalled Carbon Nanotubes UsingMEMS-Based Strain Engineering Device
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In this research, we clarified the electrical resistance change and mechanical properties of straininduced multiwalled carbon nanotubes (MWCNTs), synthesized by atmospheric chemical vapor deposition (CVD), using a MEMS-based strain engineering device

Study of Thermal Efficiency Optimization in a Twin-bubble MEMS Micro-injector
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ABSTRACT The methodology of design optimization to achieve optimal thermal efficiency of a twin bubble MEMS microinjector is reported. We demonstrated that the SiN layer inbetween the heater and the ink has dominant effect in optimizing the thermal efficiency

Nanocomposite Contact Material for MEMS Switches
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ABSTRACT This work introduces the fabrication and characterization of titania composite material by sputtering metals into nanostructured titania (NST) forming nanocomposite contact material. This nanostructured composite contact material is developed for

A Review Paper on Applications of RF MEMS Switches in Radar System
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Abstract:Radio frequency is the most basic used technique for wireless communication. These are electromagnetic waves that are generated for the transmission and reception of data. This radio frequency fall in the frequency range of 3 MHz to 3 GHz. The RF generally

Characterization of embedded Micro-heater and Temperature Sensor in a CMOS-MEMSResonator for gas sensing
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Abstract-In this paper, a CMOS-MEMS resonator is fabricated with embedded micro-heater and temperature sensor for application in the detection of ammonia in exhaled breath. The resonator is fabricated using commercial 0.35 µm CMOS technology. An aluminium micro-

Fabrication of 3D MEMS Antenna Array for Infrared Detector Using Novel UV-Lithography Apparatus, Plastic Micro Machining and Micro Assembly Technique
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ABSTRACT This paper reports a novel UV lithography technique for fabricating a 3- dimensional (3D) feed-hom-shaped structure mold array, and obtaining parallel light by using a mirrorreected parallel-beam illuminator (MRPBI) system. A 3D feed-horn-shaped

Analysis of an Electrostatically Actuated MEMS Drop Ejector
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ABSTRACT We present an analysis of an electrostatic-based MEMS drop ejector. The ejector consists of a microfluidic chamber with a piston that is suspended a few micrometers beneath a nozzle plate. A drop is ejected when the piston is electrostatically driven toward

Hat-type hearing system using MEMS microphone array
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Abstract For speech communications, it is useful to emphasize the sound coming from a certain direction. To give more freedom to sound directivity, we want to use a large-scale microphone array for hearing aids. However, it is difficult to mount a large-sale

Carbon Nanotube Array Sensor for MEMS Lab-on-a-chip
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ABSTRACT This paper describes fabrication and testing of vertically aligned carbon nanotube arrays (VANTAs) for biological sensor applications. This structure is created using a standard MEMS process and chemical vapor deposition (CVD) nanotube (NT) post-

Analysis of Capacitive MEMS Microphones on Sensitivity, Noise and SNR
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Abstract: With the development of microfabrication technology, micromachined capacitive microphone has been widely studied, and moreover, owning to the advantage of low cost, high sensitivity and low power consumption, they have been used in both consumer

Physically-Based High-Level System Model of a MEMS-Gyroscope for the Efficient Design of Control Algorithms
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ABSTRACT We present a high-level model of a dual gimbaled mass gyroscope, which provides an accurate physical description of the impact of external and internal disturbances on the output signal, but which also allows for the efficient analysis and optimization of the

Modeling, Fabrication and Experiment of a Novel Lateral MEMS IF/RF Filter
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ABSTRACT MEMS based mechanical resonators and filters have shown promising characteristics in achieving high Q values and good stability. This paper introduces a novel V-shape coupling element that is used to mechanically couple two clamped-clamped

Numerical Simulation of Packaging Effect on the CMOS MEMS Calorimetric Flow Sensor
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To achieve a well functionalized flow measurement system, considerable work in the packaging of thermal flow sensors is needed. To reduce the costly chip size in the CMOS process, the employment of housing structure is a practical solution. Previously, we

Design of Multi–Dimensional Variable Capacitors for RF MEMS
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ABSTRACT In this work, a multi dimensional RF MEMS variable capacitor that utilizes electrostatic actuation is designed. Here we preferred Electrostatic actuation due to its low power consumption. For calculations we assumed 1µm thick silicon monoxide as a

NanoDAC/fibDAC-Nanodeformation Measurement Techniques for Reliability Analysis ofMEMS and NEMS
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ABSTRACT Recent advances in microtechnology and the development of new electronics and micro/nanosystem devices in aerospace and automotive industry, communication sector and life science have led to a strong need in material characterization on the micro and

Low-power/High-temperature sensors and MEMS in SOI technology
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ABSTRACT Low-power and high-temperature sensors and MEMS designs based on bulk, SOI and IC compatible materials and processes are presented here.target markets are in general public sensors for UV, ozone, CO, liquids presence, eg in mobile devices. Or in

MEMS Pressure Sensor With Two Thin Film Piezoelectric Read-Out
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ABSTRACT We propose the structure to have only two pares of PZT thin films on the basis of [11]. This causes the structure to become simpler and easier to fabricate. And except its first vibration mode that is also the base mode, the other modes have no effect on the

Adaptive Subband Filtering Method for MEMS Accelerometer Noise Reduction
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ABSTRACT Silicon microaccelerometers can be considered as an alternative to high-priced piezoelectric sensors. Unfortunately, relatively high noise floor of commercially available MEMS (Micro-Electro-Mechanical Systems) sensors limits the possibility of their usage in

Novel lithography technique using an ASML stepper/scanner for the manufacture of display devices in MEMS world
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ABSTRACT In the MEMS and MOEMS product world, manufacturers of display/micro- devices require bonding of two wafers. The front side pattern of the top wafer needs to be aligned with aggressive overlay requirements with the remaining portion of the device that

CMOS MEMS and their Simulation
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ABSTRACT The most appropriate tools for the modelling and simulation of MEMS are strongly related to the technology used to fabricate them. CMOS MEMS are naturally combined with circuitry, and in a packaged form they are capable microsystems. The

Parametric Simulation of MEMS Based on Automatic Differentiation of Finite Element Codes
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ABSTRACT In this paper, we describe a simulation methodology based on differentiation of Finite Element (FE) codes to parametric simulation of coupled microelectro-mechanical systems (MEMS). The idea of the new approach is to compute not only the governing

Diffusion Induced Stresses in Microstructures of MEMS
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ABSTRACT The diffusion-induced stresses in silicon wafers were studied. The effect of local electric field on dopant diffusion was considered in the diffusion equation. Only onedimension problem with a constant surface dopant concentration was investigated.

Design Simulation of a CMOS MEMS using Standard Microelectronic CAD Environment
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ABSTRACT This paper addresses the design of CMOS monolithic microsystems through a case study. An increasing interest is given to such devices, which are intended to address large volume markets where batch fabrication is the only solution. This work demonstrates

Assessment of the Impacts of Packaging, Long-Term Storage, and Transportation on the Military MEMS
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ABSTRACT The Army is transforming into a more lethal, lighter and agile force. Enabling technologies that support this transition must decrease in size while increasing in intelligence. Micro-electromechanical systems (MEMS) are one such technology that the

MEMS/NEMS Dynamics Measurement Tool Using The Stroboscopic Principle
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ABSTRACT High resolution and noncontacted measurement tools for the dynamic characterization of micro devices are necessary to develop high performance/precision and reliable microelectromechanical systems (MEMS). In this paper, a three-dimensional

Frequency-Interleaved MEMS Ultrasound Transducer
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ABSTRACT This paper presents a sensitive, broad-bandwidth MEMS ultrasound transducer based on frequency interleaving of resonant transducers. Cantilever-like diaphragm transducers with piezoelectric ZnO films have been connected in parallel, so that the Nanoelectromechanical systems(NEMS)/microelectromechanical systems (MEMS) are systems integrating nanometer/micrometer-scale mechanical and electrical components. NEMS/MEMS resonators play an important role in viable commercial technologies and

Modeling of Surface Tension in Fluidic MEMS Using the Level-Set Method
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ABSTRACT A new numerical scheme for uidic MEMS with gas and liquid mixture is developed in order to improve bubble or droplet-based rnicrosysterns. Key of the scheme for gas liquid two-phase ow is the modeling of surface tension force on the extremely thin

MEMS Humidity Structure with Cantilever–Simulation of Behaviour
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ABSTRACT The aim of this paper is to report the design of the simple polymers structure humidity sensors. For precise simulation and modeling of Micro Electro Mechanic Systems (MEMS) is used integrated set of tools in programme CoventorWare. We have designed A microelectromechanical system (MEMS) resonant infrared (IR) sensor is a particular class of thermal detectors that relies on a transduction scheme based on the change in vibration frequency of a microelectromechanical resonator with a temperature dependent

Develop a vibration based MEMS piezoelectric energy harvester using micro cantilever beam
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Abstract Energy harvester is a self-generating energy source which is able to run small scale electronic devices. It largely reduces the dependency on external power source. This paper represents the utilization of micro cantilever beam to develop a vibration based

ANNEALED COPPER IN RF MEMS PROCESS FLOW WITH SIXNY AND SIO2
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Abstract Using Cu as a main structural material along with SixNy and SiO2 as a dielectric and a buffer layer respectively in RF MEMS fabrication process flow is described. Thin copper films are sputtered and then electroplated. This is followed by thermal processing

Optimization of GaAs MEMS structures for Microwave Power Sensor
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ABSTRACT This report discusses the design of Thermo-mechanical converter that creates heart of the RF power sensor microsystem. The idea of absorbed power measurement is based on thermal conversion, where absorbed RF power is transformed into thermal

Fabrication of 3-Dimesional Cu coaxial cylinder using the porous silicon MEMS technology
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ABSTRACT This paper presents the fabrication of a 3-D Cu coaxial cylinder with a thick OPS (oxidized porous silicon) for application of microwave and RF integrated circuit technology. The fabrication devices are expected to improve the characteristic of the insertion loss and

Tightly Coupled Integration of a Low Cost MEMS-INS/GPS System using Adaptive Kalman Filtering
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Abstract The integration of Inertial Navigation System (INS) and Global Positioning System (GPS) can produce accurate results if four or more GPS satellites are tracked. However, in GPS attenuated signal environment the errors of a low accuracy MEMS/GPS system MEMS actuators are a type of MicroElectroMechanical System (MEMS) that convert energy into motion. MEMS are systems that integrate mechanical and electrical components with dimensions on the order of micrometers. Therefore, the typical motions achieved by

High Performance RF MEMS Metal-Contact Switches and Capacitive Switches
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Micro-Electro-Mechanical Systems (MEMS) are miniature systems composed of integrated electrical and mechanical parts to sense and/or control things on a µm scale. The concept of MEMS is attributed to Richard Feynman's famous talk on December 29th, 1959 [2, 3]. Dr.

A Systematic Approach to Macromodeling Complex MEMS Devices
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Abstract This paper describes a systematic approach to lumped-con-stant modeling of arbitrary MEMS devices based on the concept of element stamps. In particular, it is shown that stamps can be used to represent the dynamical behavior of microelectromechanical

MEMS Sensors for Harsh Environment Applications
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ABSTRACT Micro and nano electro mechanical systems (MEMS and NEMS) have emerged as a technology that integrates micro/nano mechanical structures with microelectronics, mainly for sensing and actuation applications. MEMS and NEMS sensor systems that can

Experimental Verification of Inertial Navigation with MEMS for Forensic Investigation of Vehicle Collision
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This paper studies whether low-grade inertial sensors can be adequate source of data for the accident characterization and the estimation of vehicle trajectory near crash. Paper presents outcomes of an experiment carried out in accredited safety performance

RESONANCE-BASED MEMS TEMPERATURE SENSORS FOR TEMPERATURE COMPENSATION OF MEMS CAPACITIVE ACCELEROMETER
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Micro-electro-mechanical systems (MEMS) are defined as the synergistic integration of mechanical and electrical components. The development of the transducers, sensors, and actuators; which are used in various usages such as consumer electronic market towards

Multi-modal, Ultrasensitive Detection of Trace Explosives Using MEMS Devices
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Abstract Multi-modal chemical sensors based on microelectromechanical systems (MEMS) have been developed with an electrical readout. Opto-calorimetric infrared (IR) spectroscopy, capable of obtaining molecular signatures of extremely small quantities of

Design and Analysis of Mems Cantilever Switch
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Prof. Vijay Matta, [2] Ms. Sayali Dhongade, [3] Mr. Mayur Agrawal, [4] Ms. Sumita Jana, [5] Mr. Amol Bhongade International Journal of Engineering Research in Electronics and Communication Engineering (IJERECE) Vol 2, Issue 4, April 2015 Design and Analysis of Mems

INVESTIGATION OF TITANIUM BONDED GRAPHITE FOAM COMPOSITES FOR MICRO ELECTRONIC MECHANICAL SYSTEMS (MEMS) APPLICATIONS
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ABSTRACT PiMEMS Inc.(Santa Barbara, CA) in collaboration with ORNL investigated the use of Titanium Bonded Graphite Foam Composites (TBGC) for thermal mitigation in Micro Electronic Mechanical Systems (MEMS) applications. Also considered were potentially

Use of Mems and Optical Sensors for Closed Loop Heliostat Control
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Abstract. The Helio 100 project at STERG (Stellenbosch Solar Thermal Research Group) aims to help reduce the cost of Concentrated Solar Thermal plants by deploying large numbers of small (1x2 m) low cost heliostats. One of the methods employed to reduce the

A CMOS-MEMS Test Chip for process control feedback on mate-rials and devices properties
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Abstract Process monitoring and material/device property measurement at wafer level are of great importance in the development of MEMS technology. An intra-CMOS approach has been used to design the test structures which also brings the capability to be useful with

MODELING AND OPTIMIZATION OF MEMS THERMAL ACTUATOR
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ABSTRACT This paper presents a structural optimization method of Micro-electro- mechanical systems (MEMS) thermal actuator for a maximum displacement output. MEMS thermal actuator has the capability of producing large actuation force with small footprint

MEMS Based Multi-Band Energy Harvesting
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Abstract: The Energy from radiations such as from broadcast stations, cellular stations and Wi-Fi access points can be harvested by operating ultra-low power electronic devices and sensors for various applications. It can be accomplished by having multiband or multiple

Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576 Center for Sensors and MEMS, National University of
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Abstract: Technology for enabling drug delivery with precise control is strongly demanded by patients with diabetes or other chronic diseases. More intelligent functions such as drug loading and delivery in controllable manner without requiring electrical power will make

A Novel Design of Electrostatic Actuation Based on Comb Drive MEMS Resonator Using Vibrating Energy Storage Application
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Abstract: In this paper, investigates the comb drive based microelectromechanical systems MEMS resonator device has coupled interaction between the electrical and mechanical systems of the transducer. The parametric resonator is the sense and it is electrostatic

Design and Simulation of Novel MEMS based Capacitive Microphone
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Abstract: Nowadays, MEMS (Micro-electromechanical Systems) technology is widely used to design various types of microphone. The capacitive microphone is highly preferable because of its high achievable, sensitivity, miniature size, batch fabrication, integration Background Generally speaking, a MEMS/NEMS resonator is comprised of two fundamental elements: a micro/nano-mechanical structure and its integrated transducers for converting a mechanical signal to an electrical one or vice versa. Electrostatic transducers and

Design and Simulation of PZT based MEMS Piezoelectric Accelerometer
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Abstract:Micro-electro-mechanical system (MEMS) based accelerometer is designed and simulated which works on the principal of piezoelectric effect. The piezoelectric material used in the accelerometer experiences a force proportional to the acceleration which

Markov Mixed Effects Modeling of Adherence using MEMS Dosing Records from Partner's PrEP Ancillary Adherence Substudy Kumpal Madrasi1, Ayyappa
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Objectives: Adherence is a major factor in the effectiveness of pre-exposure prophylaxis (PrEP). Modeling adherence can help identify covariates influencing adherence which may be useful for adherence interventions. Here, we develop a Markov mixed effects model to

Design and Finite Element Analysis of a MEMS Based Capacitive Pressure Sensor Using CNT/PDMS Nanocomposite Electrodes
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Abstract:In this paper, a new design for MEMS capacitive pressure sensor is presented. In this study, we have examined a new electrode configuration in the capacitive sensing pressure sensor where the membrane deformation affects electrodes overlapping area

MEMS-based Gyroscopes as Physical Unclonable Functions
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Abstract:We are at the dawn of a hyper connectivity age otherwise known as the Internet of Things (IoT). It is widely accepted that to be able to reap all benefits from the IoT promise, device security will be of paramount importance. A key requirement for most security

Issues in Testing Techniques of MEMS Devices
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Abstract: The present review provides information relevant to issues, challenges in MEMS testing techniques that are implemented to analyze the Micro-electro mechanical systems (MEMS) behavior for specific application and operating conditions. MEMS devices are

Material and Performance Analysis of MEMS Piezoresistive Pressure Sensor
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Abstract:This work focuses on MEMS piezoresistive pressure sensor. The sensor was simulated in COMSOL Multiphysics v4. 4. The Motorola MPX100 series sensor was studied. Applied pressure range is varied from 0 to 100 kPa. To gain the optimum output, different

DESIGN AND ANALYSIS OF PERFORATED SI-DIAPHRAGM BASED MEMS PRESSURE SENSOR FOR ENVIRONMENTAL APPLICATIONS
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Abstract The design is advanced which is an intelligent of calculating the output responses of perforated Si-diaphragm pressure sensor as a behavior of pressure and which compare them to piezoresistive Si-diaphragm. The systematic models based on small and large

Sensitivity Analysis of MEMS Flexure FET with Multiple Gates
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Abstract:This paper deals with the design and modelling of Flexure FET and the FETs are the one of the important fundamental devices in electronic devices.. In this paper we are going analyse one of the MEMS Flexure Gate Field Effect Transistors. Here we will design

SAFETY AUTO BRAKE SYSTEM FOR VEHICLES IN HILL STATION USING MEMS SENSOR
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ABSTRACT This paper outlines the design and construction of a module suitable for driving the vehicles in hill station. Auto braking system is used for vehicles going in upward direction. This construction includes of two phases. In first module, slope of the vehicle is

MEMS–Making Engineering with Management a Success
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ABSTRACT This paper reflects on the development of the Engineering with Management degree programme-formerly known as Manufacturing Engineering with Management Science-developed and brought to fruition under John Monaghan's leadership of the

Use of MEMS Technology in Human Health Monitoring System
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ABSTRACT: As the populace is expanding around the world, tremendous need emerges to give appropriate social insurance administrations. With the approach of current advancements the need-hole might be enlarged. Sensor is one such innovation which

A REVIEW ON MEMS APPLICATION IN AUTOMOTIVE SENSORS
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ABSTRACT Sensors are the critical system components that collect and act on information in the analog environment and link it to the world of digital electronics. The functional groups of sensors, software, controller hardware, form the backbone of present and future

Vehicle Tracking and Detection by Using GPS, GSM and MEMS–A Prototype Model
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Abstract: The safety and rescue are the primary concern in every part of fast moving world. There are many accidental event occur due to an unavoidable reasons. The aim of this project is about a system which is developed to automatically detect an accident and alert

STRESS AND SENSITIVITY ANALYSIS OF CANTILEVER BASED MEMS SENSOR FOR ENVIRONMENTAL APPLICATIONS
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We present a cantilever based Micro-electromechanical System (MEMS) humidity sensor for applications of environmental monitoring. The main aim of this paper is to design, simulate and analyze the micro cantilever based MEMS sensor such as V, U and W shaped

Application of Top Down Micro-Patterned VACNTs in MEMS devices
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Abstract:Vertically aligned Carbon Nanotubes (CNTs) which are commonly referred to as CNT forests, have many potential engineering applications for its attractive mechanical, electrical, optical, and thermal properties. Various micro patterning methods of VACNTs