ENGINEERING RESEARCH PAPERS

NEMS nano electro mechanical system IEEE PAPER 2016





Fabrication of Suspended C-NEMS Structures by EB Writer and Pyrolysis Method
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ABSTRACT Carbon micro-and nanostructures has received widespread interest recently due to their potential applications in biomedical devices, chemical sensors, and microelectronics. In this work, we successfully fabricated carbon-micro and nano

Nanotubes and Nanoribbons in displays, NEMS, and chemical sensors: recent results from First-Principles Quantum Mechanics simulations
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ABSTRACT Of the myriad of potential application areas commonly associated with Nanotechnology, sensors and displays are two of the closest ones to commercial reality. The two materials systems that have given rise to high hopes in these applications are carbon

Static and Dynamic Analysis of Silicon NEMS
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ABSTRACT We have performed a comparative study of the accuracy of the continuum model with atomistic simula-tions for silicon nanoelectromechanical (NEM) switches. Using the validated continuum nonlinear elastic model, the effect of van der Waals interactions

Control of NEMS Based on Carbon Nanotube
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ABSTRACT A new method is proposed for controlling the motion of nanoelectromechanical systems (NEMS) based on carbon nanotubes. In this method chemical adsorption of atoms and molecules at open ends of a singlewalled carbon nanotube leads to the appearance

Fabrication of nanometer-sized structures by C-NEMS technology
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ABSTRACT Herein, we report a C-NEMS (Carbon Nano Electrical Mechanical Systems) technique for the synthesis carbon structures by pyrolysis of thin film SU-8 photoresist patterned by electron beam lithography (EBL). We have demonstrated the technique to

NanoDAC/fibDAC-Nanodeformation Measurement Techniques for Reliability Analysis of MEMS and NEMS
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ABSTRACT Recent advances in microtechnology and the development of new electronics and micro/nanosystem devices in aerospace and automotive industry, communication sector and life science have led to a strong need in material characterization on the micro and

MEMS/NEMS Dynamics Measurement Tool Using The Stroboscopic Principle
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ABSTRACT High resolution and noncontacted measurement tools for the dynamic characterization of micro devices are necessary to develop high performance/precision and reliable microelectromechanical systems (MEMS). In this paper, a three-dimensional