A MEMS (micro-electromechanical system) is a miniature machine that has both mechanical and electronic components. The physical dimension of a MEMS can range from several millimeters to less than one micrometer, a dimension many times smaller than the width of a human hair.
INFLUENCES OF THE TEMPERATURE AND HUMIDITY ON QUALITY FACTORS OF MEMS BRIDGE RESONATORS IN AIR ENVIRONEMTNS
In this paper, the modified molecular gas lubrication (MMGL) equation is used to solve for the squeeze film damping (SFD) on dynamic performance of MEMS bridge resonators. The effective viscosity of moist air is used to modify the MMGL equation to consider the effects of
Load Sensor Instability and Optimization of MEMS -based Tensile Testing Devices
MEMS -based tensile testing platforms are very powerful tools for the mechanical characterization of nanoscale materials, as they allow for testing of micro/nano-sized components in situ electron microscopes. In a typical configuration, they consist of an
Design Simulation and Analysis of MEMS Sensor for Early Detection of Parkinsons Disease
ABSTRACT Micro Electro Mechanical Systems ( MEMS ) is a technology of miniaturization that has been largely adopted from the integrated circuit (IC) industry and applied to the miniaturization of all systems (ie, not only electrical systems but also mechanical, optical
High-Q 3D micro-shell resonator with high shock immunity and low frequency mismatch for MEMS gyroscopes
In this work we report an improved design and method for fabrication of precision shell integrating (PSI) resonators for gyroscopes. PSI resonators are designed for lower thermomechanical noise and higher shock tolerance. We demonstrate fused silica (FS)
The IGN MEMS Accelerographs Record the First Accelerograms in Different Locations in the Lorca City
A recent earthquake (13 December 2018, Mag. 3.5) has allowed the recording 11 accelerograms from a network microelectromechanical systems ( MEMS ) low-cost accelerograph Silex. The National Geographic Institute of Spain (IGN) has built this kind of
RF MEMS Switches Enabled H-Shaped Beam Reconfigurable Antenna
Abstract─ This work presents a novel RF MEMS -based pattern reconfigurable antenna capable of steering beam in three different directions. The proposed H-shaped microstrip antenna is based on the basic structure of a dipole antenna and forms an Hshape by
Erratum to: A variational approach to a stationary free boundary problem modeling MEMS
Optimisation and Calculus of Variations ERRATUM TO: A VARIATIONAL APPROACH TO A STATIONARY FREE BOUNDARY PROBLEM MODELING MEMS Philippe Laurençot1,* and
3C-SiC/Si technology platform for resonant MEMS sensors
The capability of growing large-area wafers of high-quality 3C-SiC on a silicon substrate makes 3C-SiC/Si a suitable technology platform for lowcost high-performance resonant sensors. We report on the characterization of 3C-SiC resonators towards tunable resonant
Scoping MEMS Seismometers for Deployment on the Moon
Commercial Lunar Payload Services (CLPS) is a NASA program to acquire end-to-end commercial pay-load services between the Earth and lunar surface. The competitive nature of the program is expected to reduce the cost of lunar exploration. Proposals from This introductory monograph presents a broad overview of methods of both analysis and synthesis of Micro Electro Mechanical Systems ( MEMS ) and devices, mainly addressed to graduate students and young researchers in the area of electrical and computer engineering
SMMiL-E, Japanese Bio- MEMS Laboratory in France, and the Role of Scientific Direction
The first overseas laboratory of the Institute of Industrial Science (IIS), the University of Tokyo, SMMiL-E, Seeding Microsystems in Medicine in Lille European Japanese Technologies against Cancer , has been established in Lille, France. There, the
Bidirectional Carouseling Method Based on Phase Difference for MEMS Gyro North Finder
The north finder has been widely used in precision guided weapons, unmanned aerial vehicles (UAVs), and other device. In this paper, a north finder based on a low-cost microelectro-mechanical system ( MEMS ) gyro is proposed. In order to reduce the substantial
MEMS Based Acoustic Emission sensor
This study proposes an approach to measure acoustic emission (AE) signals using ultra-thin piezoresistive beam combined with a nonvaporized liquid, which was silicone oil. The AE sensor is based on liquid-on-beam structure, in which a liquid droplet is placed on a
A MEMS Accelerometer for Sub-mG Sensing
In this paper, we present a highly sensitive micro-electromechanical system ( MEMS ) accelerometer for sub-mG sensing resolution, where the thermomechanical noise (ie, Brownian noise, BN) being inversely proportional to a proof mass has to be below 1
MEMS Technology-An Overview on Scaling Advantages and Issues
In this era of think small, one would intuitively simply scale down the size of all components to a device to make it small. Unfortunately, the reality does not work out that way. It is true that nothing is there to stop one from downsizing the device components to make the device
Optimization of Surface Treatment of MEMS Probes for Single-cell Capture and Release
Micro-electromechanical system ( MEMS ) tweezers developed for the trapping and characterization of biomolecules such as DNA are also capable of cell handling, which will enable further application involving single-cell characterization. However, cellular adhesion
Fabrication and Multiphysics Model of MEMS Thermal Flow Sensor
ABSTRACT A micromachined thermal flow sensor is presented demonstrating sensing liquid flow rates as low as 2 microliters per minute capable of being used for biomedical applications. These flow sensors rely on the varying electrical resistance of sensors
Optimization of KOH etching process for MEMS square diaphragm using response surface method
Potassium hydroxide (KOH) wet etching is widely used in realizing microelectromechanical systems ( MEMS ) diaphragm due to its low cost, safe and easy handling. However, a variety of etching parameters such as etchant concentration, temperature, mask size and etching
SIMULATION AND SYNTHESIS OF ZnO NANORODS ON AAO NANO-POROUS TEMPLATE FOR USE IN A MEMS DEVICES
During the last few decades, science and technology has gain massive consideration with the foremost goal is to enhance human life . Among various technologies, nano- technology is the most prominent one possessing to its higher capability and applications in
High-shear-velocity Composite Acoustic Materials of AlN/Diamond for Biological MEMS Devices
Shear horizontal (SH) surface acoustic wave (SAW) sensors formed by combining (100) AlN films with a diamond substrate have been developed in this research. The propagation characteristics of SAW in four composite structures according to the positions of interdigital
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