Novel mems-based boiler development for low temperature applications
FREE-DOWNLOAD K Prather, H Hemphill, I Pjescic, C Tranter… – Proceedings of the …, 2009 ABSTRACT A novel MEMS-based boiler is fabricated and tested. The device is designed to operate from low-temperature heat sources using capillary action channels. The channels supply working fluid to the heated boiler surface, eliminating the need for tra- ditional working fluid
Fabrication of Electrochemically Deposited Microelectrodes for Microfluidic MEMS Applications
FREE-DOWNLOADAD Bani-Yaseen – Int. J. Electrochem. Sci, 2010 – In this paper the electrochemical deposition of three metals, namely gold, palladium, and platinum over gold microelectrode seeded by titanium thin layer in microfluidic channel has been investigated. Modified microelectrodes were characterized with cyclic voltammetry,
An analog drive loop for a capacitive MEMS gyroscope
FREE-DOWNLOAD L Aaltonen… – Analog Integrated Circuits and Signal …, Abstract The linear model and the design of an analog drive loop for the drive (primary) resonator in a capacitive gyroscope are presented. Four different types of gain control topologies are compared and analyzed with both P- and PI-type controllers. The simple model proposed in […]