CMOS MEMS accelerometer
A low-noise low-offset capacitive sensing amplifier for a 50-µg/v Hz monolithic CMOS MEMS accelerometer
FREE-DOWNLOADJ Wu, GK Fedder… – Solid-State Circuits, research …,
In a typical CMOS MEMS accelerometer, the total capacitance at the sensing electrodes is 250
fF, which leads to an impedance value of 640 k at 1 MHz. A leakage current of 1 pA could result
in voltage drift of 4 V within 1 s. To ensure less than 10% of signal attenuation, the ac