CMOS-MEMS Piezoresistive Accelerometer
A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
FREE DOWNLOAD [PDF]MHM Khir, P Qu… – Sensors, 2011
Article A Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
environmentally-friendly. In this work, a low cost, high sensitivity CMOS-MEMS
piezoresistive accelerometer is designed, fabricated and tested