Fully batch-fabricated MEMS magnetic vibrational energy harvesters
FREE-DOWNLOAD N Wang… – PowerMEMS 2009 (
Abstract: This paper reports the fabrication and characterization of fully-integrated,
fully-batch-microfabricated electromagnetic vibrational energy harvesters. The 4 – 15 mm3 structures
utilize embedded NdFeB powder micromagnet technology, and represent some of the .