MEMS Piezoresistive Accelerometer

A CMOS-MEMS Piezoresistive Accelerometer

FREE DOWNLOAD [PDF] M Khir, M Haris… – 2010
Abstract—This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer
with large proof mass. Inherent CMOS polysilicon thin film was utilized as piezoresistive material
and full Wheatstone bridge was constructed through easy wiring allowed by three metal